Chemical mechanical polishing 2001 - advances and future challenges: symposium held April 18 - 20, 2001, San Francisco, California, U.S.A.
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Warrendale, Pa.
Materials Research Soc.
2001
|
| Schriftenreihe: | Materials Research Society symposia proceedings
671 |
| Schlagworte: | |
| Beschreibung: | Getr. Zählung Ill., graph. Darst. |
| ISBN: | 1558996079 |
Internformat
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Datensatz im Suchindex
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| genre_facet | Konferenzschrift 2001 San Francisco Calif. |
| id | DE-604.BV014279152 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T19:00:52Z |
| institution | BVB |
| isbn | 1558996079 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009792444 |
| oclc_num | 49240901 |
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| physical | Getr. Zählung Ill., graph. Darst. |
| publishDate | 2001 |
| publishDateSearch | 2001 |
| publishDateSort | 2001 |
| publisher | Materials Research Soc. |
| record_format | marc |
| series | Materials Research Society symposia proceedings |
| series2 | Materials Research Society symposia proceedings |
| spelling | Chemical mechanical polishing 2001 - advances and future challenges symposium held April 18 - 20, 2001, San Francisco, California, U.S.A. ed.: Suryadevara V. Babu ... Chemical-mechanical polishing 2001 - advances and future challenges Warrendale, Pa. Materials Research Soc. 2001 Getr. Zählung Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials Research Society symposia proceedings 671 Chemical mechanical planarization Congresses Electrolytic polishing Congresses Grinding and polishing Congresses Polieren (DE-588)4175006-8 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2001 San Francisco Calif. gnd-content Halbleitertechnologie (DE-588)4158814-9 s Polieren (DE-588)4175006-8 s DE-604 Babu, Suryadevara V. Sonstige oth Materials Research Society symposia proceedings 671 (DE-604)BV001899105 671 |
| spellingShingle | Chemical mechanical polishing 2001 - advances and future challenges symposium held April 18 - 20, 2001, San Francisco, California, U.S.A. Materials Research Society symposia proceedings Chemical mechanical planarization Congresses Electrolytic polishing Congresses Grinding and polishing Congresses Polieren (DE-588)4175006-8 gnd Halbleitertechnologie (DE-588)4158814-9 gnd |
| subject_GND | (DE-588)4175006-8 (DE-588)4158814-9 (DE-588)1071861417 |
| title | Chemical mechanical polishing 2001 - advances and future challenges symposium held April 18 - 20, 2001, San Francisco, California, U.S.A. |
| title_alt | Chemical-mechanical polishing 2001 - advances and future challenges |
| title_auth | Chemical mechanical polishing 2001 - advances and future challenges symposium held April 18 - 20, 2001, San Francisco, California, U.S.A. |
| title_exact_search | Chemical mechanical polishing 2001 - advances and future challenges symposium held April 18 - 20, 2001, San Francisco, California, U.S.A. |
| title_full | Chemical mechanical polishing 2001 - advances and future challenges symposium held April 18 - 20, 2001, San Francisco, California, U.S.A. ed.: Suryadevara V. Babu ... |
| title_fullStr | Chemical mechanical polishing 2001 - advances and future challenges symposium held April 18 - 20, 2001, San Francisco, California, U.S.A. ed.: Suryadevara V. Babu ... |
| title_full_unstemmed | Chemical mechanical polishing 2001 - advances and future challenges symposium held April 18 - 20, 2001, San Francisco, California, U.S.A. ed.: Suryadevara V. Babu ... |
| title_short | Chemical mechanical polishing 2001 - advances and future challenges |
| title_sort | chemical mechanical polishing 2001 advances and future challenges symposium held april 18 20 2001 san francisco california u s a |
| title_sub | symposium held April 18 - 20, 2001, San Francisco, California, U.S.A. |
| topic | Chemical mechanical planarization Congresses Electrolytic polishing Congresses Grinding and polishing Congresses Polieren (DE-588)4175006-8 gnd Halbleitertechnologie (DE-588)4158814-9 gnd |
| topic_facet | Chemical mechanical planarization Congresses Electrolytic polishing Congresses Grinding and polishing Congresses Polieren Halbleitertechnologie Konferenzschrift 2001 San Francisco Calif. |
| volume_link | (DE-604)BV001899105 |
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