APA-Zitierstil (7. Ausg.)

Jones, E. C. (2001). Si front end processing - physics and technology of dopant defect interactions III: Symposium held April 17 - 19, 2001, San Francisco, California, U.S.A. Materials Research Soc.

Chicago-Zitierstil (17. Ausg.)

Jones, Erin C. Si Front End Processing - Physics and Technology of Dopant Defect Interactions III: Symposium Held April 17 - 19, 2001, San Francisco, California, U.S.A. Warrendale, Pa: Materials Research Soc, 2001.

MLA-Zitierstil (9. Ausg.)

Jones, Erin C. Si Front End Processing - Physics and Technology of Dopant Defect Interactions III: Symposium Held April 17 - 19, 2001, San Francisco, California, U.S.A. Materials Research Soc, 2001.