Optical scattering: measurement and analysis
As the authoritative resource on optical scattering, this book was developed from many years of teaching light-scatter measurement and analysis courses to optical engineers. Dr. Stover covers scattering beginning with its basics and covering surface roughness calculations, measurements, instrumentat...
Gespeichert in:
1. Verfasser: | |
---|---|
Format: | Buch |
Sprache: | English |
Veröffentlicht: |
Bellingham, Wa.
SPIE Optical Engineering Pr.
1995
|
Ausgabe: | 2. ed. |
Schlagworte: | |
Zusammenfassung: | As the authoritative resource on optical scattering, this book was developed from many years of teaching light-scatter measurement and analysis courses to optical engineers. Dr. Stover covers scattering beginning with its basics and covering surface roughness calculations, measurements, instrumentation, predictions, specifications, and industrial applications. Also included are appendices that review the basics of wave propagation and Kirchhoff diffraction. Whether you're an optical engineer currently investigating roughness-induced haze in the semiconductor industry, or just entering the field of scatter metrology, this text will be invaluable. |
Beschreibung: | XIII, 321 S. graph. Darst. |
ISBN: | 0819419346 |
Internformat
MARC
LEADER | 00000nam a2200000 c 4500 | ||
---|---|---|---|
001 | BV014275777 | ||
003 | DE-604 | ||
005 | 00000000000000.0 | ||
007 | t | ||
008 | 020429s1995 d||| |||| 00||| eng d | ||
020 | |a 0819419346 |9 0-8194-1934-6 | ||
035 | |a (OCoLC)729659795 | ||
035 | |a (DE-599)BVBBV014275777 | ||
040 | |a DE-604 |b ger |e rakwb | ||
041 | 0 | |a eng | |
049 | |a DE-29T |a DE-83 | ||
050 | 0 | |a QC427.4 | |
082 | 0 | |a 535/.4 |2 20 | |
100 | 1 | |a Stover, John C. |e Verfasser |4 aut | |
245 | 1 | 0 | |a Optical scattering |b measurement and analysis |c John C. Stover |
250 | |a 2. ed. | ||
264 | 1 | |a Bellingham, Wa. |b SPIE Optical Engineering Pr. |c 1995 | |
300 | |a XIII, 321 S. |b graph. Darst. | ||
336 | |b txt |2 rdacontent | ||
337 | |b n |2 rdamedia | ||
338 | |b nc |2 rdacarrier | ||
520 | 3 | |a As the authoritative resource on optical scattering, this book was developed from many years of teaching light-scatter measurement and analysis courses to optical engineers. Dr. Stover covers scattering beginning with its basics and covering surface roughness calculations, measurements, instrumentation, predictions, specifications, and industrial applications. Also included are appendices that review the basics of wave propagation and Kirchhoff diffraction. Whether you're an optical engineer currently investigating roughness-induced haze in the semiconductor industry, or just entering the field of scatter metrology, this text will be invaluable. | |
650 | 4 | |a Light |x Scattering | |
650 | 0 | 7 | |a Lichtstreuung |0 (DE-588)4167602-6 |2 gnd |9 rswk-swf |
689 | 0 | 0 | |a Lichtstreuung |0 (DE-588)4167602-6 |D s |
689 | 0 | |8 1\p |5 DE-604 | |
999 | |a oai:aleph.bib-bvb.de:BVB01-009789405 | ||
883 | 1 | |8 1\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk |
Datensatz im Suchindex
_version_ | 1804129165675331584 |
---|---|
any_adam_object | |
author | Stover, John C. |
author_facet | Stover, John C. |
author_role | aut |
author_sort | Stover, John C. |
author_variant | j c s jc jcs |
building | Verbundindex |
bvnumber | BV014275777 |
callnumber-first | Q - Science |
callnumber-label | QC427 |
callnumber-raw | QC427.4 |
callnumber-search | QC427.4 |
callnumber-sort | QC 3427.4 |
callnumber-subject | QC - Physics |
ctrlnum | (OCoLC)729659795 (DE-599)BVBBV014275777 |
dewey-full | 535/.4 |
dewey-hundreds | 500 - Natural sciences and mathematics |
dewey-ones | 535 - Light and related radiation |
dewey-raw | 535/.4 |
dewey-search | 535/.4 |
dewey-sort | 3535 14 |
dewey-tens | 530 - Physics |
discipline | Physik |
edition | 2. ed. |
format | Book |
fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01753nam a2200361 c 4500</leader><controlfield tag="001">BV014275777</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">020429s1995 d||| |||| 00||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0819419346</subfield><subfield code="9">0-8194-1934-6</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)729659795</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV014275777</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-29T</subfield><subfield code="a">DE-83</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">QC427.4</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">535/.4</subfield><subfield code="2">20</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Stover, John C.</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Optical scattering</subfield><subfield code="b">measurement and analysis</subfield><subfield code="c">John C. Stover</subfield></datafield><datafield tag="250" ind1=" " ind2=" "><subfield code="a">2. ed.</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Bellingham, Wa.</subfield><subfield code="b">SPIE Optical Engineering Pr.</subfield><subfield code="c">1995</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XIII, 321 S.</subfield><subfield code="b">graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="520" ind1="3" ind2=" "><subfield code="a">As the authoritative resource on optical scattering, this book was developed from many years of teaching light-scatter measurement and analysis courses to optical engineers. Dr. Stover covers scattering beginning with its basics and covering surface roughness calculations, measurements, instrumentation, predictions, specifications, and industrial applications. Also included are appendices that review the basics of wave propagation and Kirchhoff diffraction. Whether you're an optical engineer currently investigating roughness-induced haze in the semiconductor industry, or just entering the field of scatter metrology, this text will be invaluable.</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Light</subfield><subfield code="x">Scattering</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Lichtstreuung</subfield><subfield code="0">(DE-588)4167602-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Lichtstreuung</subfield><subfield code="0">(DE-588)4167602-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="8">1\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-009789405</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">1\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield></record></collection> |
id | DE-604.BV014275777 |
illustrated | Illustrated |
indexdate | 2024-07-09T19:00:48Z |
institution | BVB |
isbn | 0819419346 |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009789405 |
oclc_num | 729659795 |
open_access_boolean | |
owner | DE-29T DE-83 |
owner_facet | DE-29T DE-83 |
physical | XIII, 321 S. graph. Darst. |
publishDate | 1995 |
publishDateSearch | 1995 |
publishDateSort | 1995 |
publisher | SPIE Optical Engineering Pr. |
record_format | marc |
spelling | Stover, John C. Verfasser aut Optical scattering measurement and analysis John C. Stover 2. ed. Bellingham, Wa. SPIE Optical Engineering Pr. 1995 XIII, 321 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier As the authoritative resource on optical scattering, this book was developed from many years of teaching light-scatter measurement and analysis courses to optical engineers. Dr. Stover covers scattering beginning with its basics and covering surface roughness calculations, measurements, instrumentation, predictions, specifications, and industrial applications. Also included are appendices that review the basics of wave propagation and Kirchhoff diffraction. Whether you're an optical engineer currently investigating roughness-induced haze in the semiconductor industry, or just entering the field of scatter metrology, this text will be invaluable. Light Scattering Lichtstreuung (DE-588)4167602-6 gnd rswk-swf Lichtstreuung (DE-588)4167602-6 s 1\p DE-604 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
spellingShingle | Stover, John C. Optical scattering measurement and analysis Light Scattering Lichtstreuung (DE-588)4167602-6 gnd |
subject_GND | (DE-588)4167602-6 |
title | Optical scattering measurement and analysis |
title_auth | Optical scattering measurement and analysis |
title_exact_search | Optical scattering measurement and analysis |
title_full | Optical scattering measurement and analysis John C. Stover |
title_fullStr | Optical scattering measurement and analysis John C. Stover |
title_full_unstemmed | Optical scattering measurement and analysis John C. Stover |
title_short | Optical scattering |
title_sort | optical scattering measurement and analysis |
title_sub | measurement and analysis |
topic | Light Scattering Lichtstreuung (DE-588)4167602-6 gnd |
topic_facet | Light Scattering Lichtstreuung |
work_keys_str_mv | AT stoverjohnc opticalscatteringmeasurementandanalysis |