Investigation of stress in silicon membranes:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Abschlussarbeit Buch |
| Sprache: | English |
| Veröffentlicht: |
2001
|
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | VII, 144 S. Ill., graph. Darst. : 21 cm |
Internformat
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV014269865 | ||
| 003 | DE-604 | ||
| 005 | 20021217 | ||
| 007 | t | ||
| 008 | 020423s2001 gw ad|| m||| 00||| eng d | ||
| 016 | 7 | |a 964067374 |2 DE-101 | |
| 035 | |a (OCoLC)248906057 | ||
| 035 | |a (DE-599)BVBBV014269865 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 044 | |a gw |c DE | ||
| 049 | |a DE-355 |a DE-29T |a DE-706 |a DE-188 | ||
| 100 | 1 | |a Degen, Artur |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Investigation of stress in silicon membranes |c by Artur Degen |
| 264 | 1 | |c 2001 | |
| 300 | |a VII, 144 S. |b Ill., graph. Darst. : 21 cm | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 502 | |a Kassel, Univ., Diss., 2001 | ||
| 650 | 4 | |a Silicium - Kreismembran - Elastische Spannung - Messung | |
| 650 | 0 | 7 | |a Mechanische Spannung |0 (DE-588)4134428-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Silicium |0 (DE-588)4077445-4 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Kreismembran |0 (DE-588)4500726-3 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Messung |0 (DE-588)4038852-9 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
| 689 | 0 | 0 | |a Silicium |0 (DE-588)4077445-4 |D s |
| 689 | 0 | 1 | |a Kreismembran |0 (DE-588)4500726-3 |D s |
| 689 | 0 | 2 | |a Mechanische Spannung |0 (DE-588)4134428-5 |D s |
| 689 | 0 | 3 | |a Messung |0 (DE-588)4038852-9 |D s |
| 689 | 0 | |5 DE-604 | |
| 856 | 4 | 2 | |m DNB Datenaustausch |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009786283&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
| 943 | 1 | |a oai:aleph.bib-bvb.de:BVB01-009786283 | |
Datensatz im Suchindex
| _version_ | 1807229147061157888 |
|---|---|
| adam_text |
CONTENTS
ACKNOWLEDGMENTS
1
1
INTRODUCTION
2
1.1
EXTREME
ULTRAVIOLET
LITHOGRAPHY
.
4
1.2
X-RAY
LITHOGRAPHY
.
6
1.3
CHARGED
PARTICLE
LITHOGRAPHY
.
6
1.3.1
DIRECT
AND
MULTI-ELECTRON
LITHOGRAPHY
.
7
1.3.2
ELECTRON
PROJECTION
LITHOGRAPHY
.
7
1.3.3
ION
PROJECTION
LITHOGRAPHY
.
8
1.4
MOTIVATION
.
8
1.5
THESIS
STRUCTURE
.
10
2
METHODS
OF
STRESS
DETERMINATION
11
2.1
X-RAY
DIFFRACTION
TECHNIQUE
.
11
2.2
RAMAN
SPECTROSCOPY
.
12
2.3
MEASUREMENT
OF
WAFER
CURVATURE
.
12
2.4
TEST
STRUCTURE
TECHNIQUE
.
13
2.4.1
GUCKEL
STRUCTURES
.
13
2.4.2
FREE
STANDING
BEAMS,
T-STRUCTURES
.
14
2.5
VIBRATION
TECHNIQUE
.
16
2.6
BULGING
METHOD
.
16
2.7
SUMMARY
.
18
3
ELASTICITY
THEORY
20
3.1
BASICS
OF
THE
ELASTICITY
THEORY
.
20
3.1.1
STRAIN
.
20
3.1.2
STRESS
AND
ELASTICITY
.
23
3.1.3
EFFECT
OF
SYMMETRY
FOR
THE
CUBIC
CRYSTALS
.
26
3.2
THE
MEMBRANE
AND
STRESS
ENGINEERING
.
29
3.2.1
STRESSED
FILM
ON
THE
SUBSTRATE
.
29
3.2.2
MEMBRANE
FABRICATION
PROCESS
.
32
3.3
BASICS
OF
STRESS
FORMATION
.
33
3.3.1
ONE-DIMENSIONAL
MODEL:
CHAIN
OF
ATOMS
.
34
CONTENTS
N
3.3.2
TWO
AND
THREE
DIMENSIONAL
CASE
.
35
3.3.3
ATOM
PACKAGING
AND
GEOMETRY
FACTOR
.
36
4
MEMBRANE
AND
WAFER
RING
SYSTEM
40
4.1
SYMMETRICAL
STRESS
DISTRIBUTION
AROUND
ROTATION
AXIS
.
40
4.2
BENDING
OF
A
RING
UNDER
HOMOGENEOUS
BENDING
MOMENT.
.
42
4.3
STRESSED
MEMBRANE
UPON
THE
WAFER
RING
.
44
4.4
RING
SYSTEM
WITH
HOMOGENEOUS
STRESSED
RINGS
.
47
4.4.1
DOUBLE
RING
SYSTEM
.
47
4.4.2
TRIPLE
AND
MULTI
RING
SYSTEM
.
52
4.5
THE
SYSTEM
WITH
MULTIPLE
STRESSED
RINGS
AND
A
STRESSED
MEMBRANE
.
55
4.6
CALCULATION
FOR
EXAMPLE
MEMBRANE
.
57
5
BULGING
THEORY
61
5.1
SPHERICAL
DEFORMATION
.
61
5.2
SOLUTION
TO
THE
BOUNDARY
VALUE
PROBLEM
.
64
5.3
SOLUTION
FROM
VIRTUAL
WORK
PRINCIPLE
.
64
5.3.1
TIMOSHENKO
'
S
APPROXIMATION
.
66
5.3.2
LIN
'
S
APPROXIMATION
.
66
5.4
NUMERICAL
VERIFICATION
OF
THE
BULGING
MODEL
.
67
6
SET
UP
71
6.1
DIFFRACTION
IMAGE
METHOD
.
71
6.2
DIFFRACTION
GRID
.
74
6.3
THE
MEMBRANE
CHUCK
HOLDER
.
75
6.4
SET
UP
.
77
6.4.1
PRESSURE
SYSTEM
.
78
6.4.2
OPTICAL
ACQUISITION
SYSTEM
.
79
6.5
CALCULATION
PROCEDURES
.
79
6.5.1
LEAST
SQUARE
FIT
.
80
6.5.2
IMPROVED
LEAST
SQUARE
FIT
.
81
6.5.3
CALCULATION
OF
NUMERICAL
ERROR
FOR
LEAST
SQUARE
FIT
.
.
.
82
7
MEASUREMENTS
84
7.1
ACCURACY
ANALYSIS
.
84
7.1.1
ERROR
IN
DETERMINATION
OF
SET-UP
GEOMETRY
.
84
7.1.2
ERROR
IN
DETERMINATION
OF
THE
VARIABLES
.
85
7.1.3
MEMBRANE
GEOMETRY
ERROR
.
85
7.1.3.1
DESCRIPTION
OF
MEAN
THICKNESS
OF
THE
MEMBRANE
85
7.1.3.2
THICKNESS
DISTRIBUTION
.
87
7.1.3.3
FE
SIMULATION
OF
BULGING
NON-UNIFORM
MEM
BRANE
.
90
7.2
EXPERIMENTAL
RESULTS
.
97
CONTENTS
IN
7.3
THE
DOUBLE
BULGING
EXPERIMENT
.
101
7.4
SUMMARY
.
102
CONCLUSIONS
104
ZUSAMMENFASSUNG
107
LIST
OF
PUBLICATIONS
110
BIBLIOGRAPHY
112
CURRICULUM
VITAE
122
STATEMENT
122
A
LAYOUT
OF
THE
MASK
123
B
CHUCK
PLANS
126
2.1
BASE
PART
OF
CHUCK
.
126
2.2
CHUCK
LID
FOR
6
"
WAFER
.
128
C
ELASTIC
TENSOR
TRANSFORMATION
130
D
ISOTROPIC
MEDIUM
132
E
PROGRAMS
133
5.1
SOURCE
CODE
VB
FOR
APPLICATION
FOR
MS
EXCEL
.
133
5.2
SOURCE
CODE
IN
C++
FOR
"
LFIT3DU_V7.DLL
"
.
137
5.2.1
"LFIT3DLL.H
"
.
137
5.2.2
"
LFIT3DLLV7.C
"
.
137 |
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| ctrlnum | (OCoLC)248906057 (DE-599)BVBBV014269865 |
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| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV014269865 |
| illustrated | Illustrated |
| indexdate | 2024-08-13T00:13:40Z |
| institution | BVB |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009786283 |
| oclc_num | 248906057 |
| open_access_boolean | |
| owner | DE-355 DE-BY-UBR DE-29T DE-706 DE-188 |
| owner_facet | DE-355 DE-BY-UBR DE-29T DE-706 DE-188 |
| physical | VII, 144 S. Ill., graph. Darst. : 21 cm |
| publishDate | 2001 |
| publishDateSearch | 2001 |
| publishDateSort | 2001 |
| record_format | marc |
| spelling | Degen, Artur Verfasser aut Investigation of stress in silicon membranes by Artur Degen 2001 VII, 144 S. Ill., graph. Darst. : 21 cm txt rdacontent n rdamedia nc rdacarrier Kassel, Univ., Diss., 2001 Silicium - Kreismembran - Elastische Spannung - Messung Mechanische Spannung (DE-588)4134428-5 gnd rswk-swf Silicium (DE-588)4077445-4 gnd rswk-swf Kreismembran (DE-588)4500726-3 gnd rswk-swf Messung (DE-588)4038852-9 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Silicium (DE-588)4077445-4 s Kreismembran (DE-588)4500726-3 s Mechanische Spannung (DE-588)4134428-5 s Messung (DE-588)4038852-9 s DE-604 DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009786283&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Degen, Artur Investigation of stress in silicon membranes Silicium - Kreismembran - Elastische Spannung - Messung Mechanische Spannung (DE-588)4134428-5 gnd Silicium (DE-588)4077445-4 gnd Kreismembran (DE-588)4500726-3 gnd Messung (DE-588)4038852-9 gnd |
| subject_GND | (DE-588)4134428-5 (DE-588)4077445-4 (DE-588)4500726-3 (DE-588)4038852-9 (DE-588)4113937-9 |
| title | Investigation of stress in silicon membranes |
| title_auth | Investigation of stress in silicon membranes |
| title_exact_search | Investigation of stress in silicon membranes |
| title_full | Investigation of stress in silicon membranes by Artur Degen |
| title_fullStr | Investigation of stress in silicon membranes by Artur Degen |
| title_full_unstemmed | Investigation of stress in silicon membranes by Artur Degen |
| title_short | Investigation of stress in silicon membranes |
| title_sort | investigation of stress in silicon membranes |
| topic | Silicium - Kreismembran - Elastische Spannung - Messung Mechanische Spannung (DE-588)4134428-5 gnd Silicium (DE-588)4077445-4 gnd Kreismembran (DE-588)4500726-3 gnd Messung (DE-588)4038852-9 gnd |
| topic_facet | Silicium - Kreismembran - Elastische Spannung - Messung Mechanische Spannung Silicium Kreismembran Messung Hochschulschrift |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009786283&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT degenartur investigationofstressinsiliconmembranes |