APA (7th ed.) Citation

(2002). Silicon wafer bonding technology for VLSI and MEMS applications. Institution of Electrical Engineers.

Chicago Style (17th ed.) Citation

Silicon Wafer Bonding Technology for VLSI and MEMS Applications. Stevenage: Institution of Electrical Engineers, 2002.

MLA (9th ed.) Citation

Silicon Wafer Bonding Technology for VLSI and MEMS Applications. Institution of Electrical Engineers, 2002.

Warning: These citations may not always be 100% accurate.