Handbook of VLSI microlithography: principles, technology and applications
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Westwood, NJ
Noyes
1991
|
| Edition: | Reprint ed. |
| Series: | Materials science and process technology series
|
| Subjects: | |
| Physical Description: | XXII, 649 S. Ill., graph. Darst. |
| ISBN: | 0815512813 |
Staff View
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Record in the Search Index
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| bvnumber | BV014207271 |
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| classification_rvk | ZN 4170 |
| ctrlnum | (OCoLC)22731519 (DE-599)BVBBV014207271 |
| dewey-full | 621.381/531 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381/531 |
| dewey-search | 621.381/531 |
| dewey-sort | 3621.381 3531 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | Reprint ed. |
| format | Book |
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| id | DE-604.BV014207271 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:59:35Z |
| institution | BVB |
| isbn | 0815512813 |
| language | English |
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| physical | XXII, 649 S. Ill., graph. Darst. |
| publishDate | 1991 |
| publishDateSearch | 1991 |
| publishDateSort | 1991 |
| publisher | Noyes |
| record_format | marc |
| series2 | Materials science and process technology series |
| spelling | Handbook of VLSI microlithography principles, technology and applications ed. by William B. Glendinning ... Reprint ed. Westwood, NJ Noyes 1991 XXII, 649 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials science and process technology series Integrated circuits Very large scale integration Microlithography Elektronenstrahllithografie (DE-588)4151897-4 gnd rswk-swf VLSI (DE-588)4117388-0 gnd rswk-swf Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd rswk-swf Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf VLSI (DE-588)4117388-0 s Lithografie Halbleitertechnologie (DE-588)4191584-7 s DE-604 Fotolithografie Halbleitertechnologie (DE-588)4174516-4 s 1\p DE-604 Elektronenstrahllithografie (DE-588)4151897-4 s 2\p DE-604 Glendinning, William B. Sonstige oth 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Handbook of VLSI microlithography principles, technology and applications Integrated circuits Very large scale integration Microlithography Elektronenstrahllithografie (DE-588)4151897-4 gnd VLSI (DE-588)4117388-0 gnd Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| subject_GND | (DE-588)4151897-4 (DE-588)4117388-0 (DE-588)4174516-4 (DE-588)4191584-7 |
| title | Handbook of VLSI microlithography principles, technology and applications |
| title_auth | Handbook of VLSI microlithography principles, technology and applications |
| title_exact_search | Handbook of VLSI microlithography principles, technology and applications |
| title_full | Handbook of VLSI microlithography principles, technology and applications ed. by William B. Glendinning ... |
| title_fullStr | Handbook of VLSI microlithography principles, technology and applications ed. by William B. Glendinning ... |
| title_full_unstemmed | Handbook of VLSI microlithography principles, technology and applications ed. by William B. Glendinning ... |
| title_short | Handbook of VLSI microlithography |
| title_sort | handbook of vlsi microlithography principles technology and applications |
| title_sub | principles, technology and applications |
| topic | Integrated circuits Very large scale integration Microlithography Elektronenstrahllithografie (DE-588)4151897-4 gnd VLSI (DE-588)4117388-0 gnd Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| topic_facet | Integrated circuits Very large scale integration Microlithography Elektronenstrahllithografie VLSI Fotolithografie Halbleitertechnologie Lithografie Halbleitertechnologie |
| work_keys_str_mv | AT glendinningwilliamb handbookofvlsimicrolithographyprinciplestechnologyandapplications |