Handbook of VLSI microlithography: principles, technology and applications
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Westwood, NJ
Noyes
1991
|
| Ausgabe: | Reprint ed. |
| Schriftenreihe: | Materials science and process technology series
|
| Schlagworte: | |
| Beschreibung: | XXII, 649 S. Ill., graph. Darst. |
| ISBN: | 0815512813 |
Internformat
MARC
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| 245 | 1 | 0 | |a Handbook of VLSI microlithography |b principles, technology and applications |c ed. by William B. Glendinning ... |
| 250 | |a Reprint ed. | ||
| 264 | 1 | |a Westwood, NJ |b Noyes |c 1991 | |
| 300 | |a XXII, 649 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Materials science and process technology series | |
| 650 | 4 | |a Integrated circuits |x Very large scale integration | |
| 650 | 4 | |a Microlithography | |
| 650 | 0 | 7 | |a Elektronenstrahllithografie |0 (DE-588)4151897-4 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a VLSI |0 (DE-588)4117388-0 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Fotolithografie |g Halbleitertechnologie |0 (DE-588)4174516-4 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Lithografie |g Halbleitertechnologie |0 (DE-588)4191584-7 |2 gnd |9 rswk-swf |
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Datensatz im Suchindex
| _version_ | 1804129089376747520 |
|---|---|
| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV014207271 |
| callnumber-first | T - Technology |
| callnumber-label | TK7874 |
| callnumber-raw | TK7874 |
| callnumber-search | TK7874 |
| callnumber-sort | TK 47874 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | ZN 4170 |
| ctrlnum | (OCoLC)22731519 (DE-599)BVBBV014207271 |
| dewey-full | 621.381/531 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381/531 |
| dewey-search | 621.381/531 |
| dewey-sort | 3621.381 3531 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | Reprint ed. |
| format | Book |
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| id | DE-604.BV014207271 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:59:35Z |
| institution | BVB |
| isbn | 0815512813 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009739763 |
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| physical | XXII, 649 S. Ill., graph. Darst. |
| publishDate | 1991 |
| publishDateSearch | 1991 |
| publishDateSort | 1991 |
| publisher | Noyes |
| record_format | marc |
| series2 | Materials science and process technology series |
| spelling | Handbook of VLSI microlithography principles, technology and applications ed. by William B. Glendinning ... Reprint ed. Westwood, NJ Noyes 1991 XXII, 649 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials science and process technology series Integrated circuits Very large scale integration Microlithography Elektronenstrahllithografie (DE-588)4151897-4 gnd rswk-swf VLSI (DE-588)4117388-0 gnd rswk-swf Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd rswk-swf Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf VLSI (DE-588)4117388-0 s Lithografie Halbleitertechnologie (DE-588)4191584-7 s DE-604 Fotolithografie Halbleitertechnologie (DE-588)4174516-4 s 1\p DE-604 Elektronenstrahllithografie (DE-588)4151897-4 s 2\p DE-604 Glendinning, William B. Sonstige oth 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Handbook of VLSI microlithography principles, technology and applications Integrated circuits Very large scale integration Microlithography Elektronenstrahllithografie (DE-588)4151897-4 gnd VLSI (DE-588)4117388-0 gnd Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| subject_GND | (DE-588)4151897-4 (DE-588)4117388-0 (DE-588)4174516-4 (DE-588)4191584-7 |
| title | Handbook of VLSI microlithography principles, technology and applications |
| title_auth | Handbook of VLSI microlithography principles, technology and applications |
| title_exact_search | Handbook of VLSI microlithography principles, technology and applications |
| title_full | Handbook of VLSI microlithography principles, technology and applications ed. by William B. Glendinning ... |
| title_fullStr | Handbook of VLSI microlithography principles, technology and applications ed. by William B. Glendinning ... |
| title_full_unstemmed | Handbook of VLSI microlithography principles, technology and applications ed. by William B. Glendinning ... |
| title_short | Handbook of VLSI microlithography |
| title_sort | handbook of vlsi microlithography principles technology and applications |
| title_sub | principles, technology and applications |
| topic | Integrated circuits Very large scale integration Microlithography Elektronenstrahllithografie (DE-588)4151897-4 gnd VLSI (DE-588)4117388-0 gnd Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| topic_facet | Integrated circuits Very large scale integration Microlithography Elektronenstrahllithografie VLSI Fotolithografie Halbleitertechnologie Lithografie Halbleitertechnologie |
| work_keys_str_mv | AT glendinningwilliamb handbookofvlsimicrolithographyprinciplestechnologyandapplications |