Papers from the sixth International Workshop on Fabrication, Characterization, and Modeling of Ultra Shallow Doping Profiles in Semiconductors:
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
New York
American Inst. of Physics
2002
|
| Schriftenreihe: | Journal of vacuum science & technology / B
20,1 |
| Schlagworte: | |
| Beschreibung: | Einzelaufnahme eines Zeitschr.-H. |
| Beschreibung: | 15, 493 S. Ill., graph. Darst. |
Internformat
MARC
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| 111 | 2 | |a International Workshop on Fabrication, Characterization, and Modeling of Ultra Shallow Doping Profiles in Semiconductors |n 6 |d 2001 |c Napa, Calif. |j Verfasser |0 (DE-588)1500343-7 |4 aut | |
| 245 | 1 | 0 | |a Papers from the sixth International Workshop on Fabrication, Characterization, and Modeling of Ultra Shallow Doping Profiles in Semiconductors |
| 246 | 1 | 0 | |a ultra-shallow |
| 264 | 1 | |a New York |b American Inst. of Physics |c 2002 | |
| 300 | |a 15, 493 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Journal of vacuum science & technology / B |v 20,1 | |
| 500 | |a Einzelaufnahme eines Zeitschr.-H. | ||
| 650 | 0 | 7 | |a Dünnschichttechnik |0 (DE-588)4136339-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Mikroelektronik |0 (DE-588)4039207-7 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Halbleiter |0 (DE-588)4022993-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Nanostruktur |0 (DE-588)4204530-7 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 2001 |z Napa Calif. |2 gnd-content | |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 2001 |z Napa Valley Calif. |2 gnd-content | |
| 689 | 0 | 0 | |a Mikroelektronik |0 (DE-588)4039207-7 |D s |
| 689 | 0 | 1 | |a Nanostruktur |0 (DE-588)4204530-7 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a Halbleiter |0 (DE-588)4022993-2 |D s |
| 689 | 1 | 1 | |a Dünnschichttechnik |0 (DE-588)4136339-5 |D s |
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Datensatz im Suchindex
| _version_ | 1804129088148865024 |
|---|---|
| any_adam_object | |
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| author_corporate_role | aut |
| author_facet | International Workshop on Fabrication, Characterization, and Modeling of Ultra Shallow Doping Profiles in Semiconductors Napa, Calif |
| author_sort | International Workshop on Fabrication, Characterization, and Modeling of Ultra Shallow Doping Profiles in Semiconductors Napa, Calif |
| building | Verbundindex |
| bvnumber | BV014206344 |
| ctrlnum | (OCoLC)634793279 (DE-599)BVBBV014206344 |
| format | Conference Proceeding Book |
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| genre | (DE-588)1071861417 Konferenzschrift 2001 Napa Calif. gnd-content (DE-588)1071861417 Konferenzschrift 2001 Napa Valley Calif. gnd-content |
| genre_facet | Konferenzschrift 2001 Napa Calif. Konferenzschrift 2001 Napa Valley Calif. |
| id | DE-604.BV014206344 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:59:34Z |
| institution | BVB |
| institution_GND | (DE-588)1500343-7 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009738945 |
| oclc_num | 634793279 |
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| physical | 15, 493 S. Ill., graph. Darst. |
| publishDate | 2002 |
| publishDateSearch | 2002 |
| publishDateSort | 2002 |
| publisher | American Inst. of Physics |
| record_format | marc |
| series2 | Journal of vacuum science & technology / B |
| spelling | International Workshop on Fabrication, Characterization, and Modeling of Ultra Shallow Doping Profiles in Semiconductors 6 2001 Napa, Calif. Verfasser (DE-588)1500343-7 aut Papers from the sixth International Workshop on Fabrication, Characterization, and Modeling of Ultra Shallow Doping Profiles in Semiconductors ultra-shallow New York American Inst. of Physics 2002 15, 493 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Journal of vacuum science & technology / B 20,1 Einzelaufnahme eines Zeitschr.-H. Dünnschichttechnik (DE-588)4136339-5 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf Nanostruktur (DE-588)4204530-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2001 Napa Calif. gnd-content (DE-588)1071861417 Konferenzschrift 2001 Napa Valley Calif. gnd-content Mikroelektronik (DE-588)4039207-7 s Nanostruktur (DE-588)4204530-7 s DE-604 Halbleiter (DE-588)4022993-2 s Dünnschichttechnik (DE-588)4136339-5 s |
| spellingShingle | Papers from the sixth International Workshop on Fabrication, Characterization, and Modeling of Ultra Shallow Doping Profiles in Semiconductors Dünnschichttechnik (DE-588)4136339-5 gnd Mikroelektronik (DE-588)4039207-7 gnd Halbleiter (DE-588)4022993-2 gnd Nanostruktur (DE-588)4204530-7 gnd |
| subject_GND | (DE-588)4136339-5 (DE-588)4039207-7 (DE-588)4022993-2 (DE-588)4204530-7 (DE-588)1071861417 |
| title | Papers from the sixth International Workshop on Fabrication, Characterization, and Modeling of Ultra Shallow Doping Profiles in Semiconductors |
| title_alt | ultra-shallow |
| title_auth | Papers from the sixth International Workshop on Fabrication, Characterization, and Modeling of Ultra Shallow Doping Profiles in Semiconductors |
| title_exact_search | Papers from the sixth International Workshop on Fabrication, Characterization, and Modeling of Ultra Shallow Doping Profiles in Semiconductors |
| title_full | Papers from the sixth International Workshop on Fabrication, Characterization, and Modeling of Ultra Shallow Doping Profiles in Semiconductors |
| title_fullStr | Papers from the sixth International Workshop on Fabrication, Characterization, and Modeling of Ultra Shallow Doping Profiles in Semiconductors |
| title_full_unstemmed | Papers from the sixth International Workshop on Fabrication, Characterization, and Modeling of Ultra Shallow Doping Profiles in Semiconductors |
| title_short | Papers from the sixth International Workshop on Fabrication, Characterization, and Modeling of Ultra Shallow Doping Profiles in Semiconductors |
| title_sort | papers from the sixth international workshop on fabrication characterization and modeling of ultra shallow doping profiles in semiconductors |
| topic | Dünnschichttechnik (DE-588)4136339-5 gnd Mikroelektronik (DE-588)4039207-7 gnd Halbleiter (DE-588)4022993-2 gnd Nanostruktur (DE-588)4204530-7 gnd |
| topic_facet | Dünnschichttechnik Mikroelektronik Halbleiter Nanostruktur Konferenzschrift 2001 Napa Calif. Konferenzschrift 2001 Napa Valley Calif. |
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