Advances in rapid thermal and integrated processing:
Gespeichert in:
Format: | Buch |
---|---|
Sprache: | English |
Veröffentlicht: |
Dordrecht [u.a.]
Kluwer Acad. Publ.
1996
|
Schriftenreihe: | Nato ASI series
Series E, Applied sciences ; 318 |
Schlagworte: | |
Beschreibung: | XII, 565 S. Ill., graph. Darst. |
ISBN: | 0792340116 |
Internformat
MARC
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245 | 1 | 0 | |a Advances in rapid thermal and integrated processing |c ed. by Fred Roozeboom |
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490 | 1 | |a Nato ASI series : Series E, Applied sciences |v 318 | |
650 | 4 | |a Rapid thermal processing |v Congresses | |
650 | 4 | |a Semiconductors |x Heat treatment |v Congresses | |
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700 | 1 | |a Roozeboom, Fred |e Sonstige |4 oth | |
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Datensatz im Suchindex
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any_adam_object | |
building | Verbundindex |
bvnumber | BV014148798 |
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callnumber-search | TK7871.85 |
callnumber-sort | TK 47871.85 |
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classification_rvk | UP 3200 |
ctrlnum | (OCoLC)34412525 (DE-599)BVBBV014148798 |
dewey-full | 621.3815/2 |
dewey-hundreds | 600 - Technology (Applied sciences) |
dewey-ones | 621 - Applied physics |
dewey-raw | 621.3815/2 |
dewey-search | 621.3815/2 |
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discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
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genre | (DE-588)1071861417 Konferenzschrift 1995 Maratea gnd-content |
genre_facet | Konferenzschrift 1995 Maratea |
id | DE-604.BV014148798 |
illustrated | Illustrated |
indexdate | 2024-07-09T18:58:32Z |
institution | BVB |
isbn | 0792340116 |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009696590 |
oclc_num | 34412525 |
open_access_boolean | |
owner | DE-703 DE-83 |
owner_facet | DE-703 DE-83 |
physical | XII, 565 S. Ill., graph. Darst. |
publishDate | 1996 |
publishDateSearch | 1996 |
publishDateSort | 1996 |
publisher | Kluwer Acad. Publ. |
record_format | marc |
series | Nato ASI series |
series2 | Nato ASI series : Series E, Applied sciences |
spelling | Advances in rapid thermal and integrated processing ed. by Fred Roozeboom Dordrecht [u.a.] Kluwer Acad. Publ. 1996 XII, 565 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Nato ASI series : Series E, Applied sciences 318 Rapid thermal processing Congresses Semiconductors Heat treatment Congresses Rapid thermal processing (DE-588)4347011-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1995 Maratea gnd-content Rapid thermal processing (DE-588)4347011-7 s DE-604 Roozeboom, Fred Sonstige oth Nato ASI series Series E, Applied sciences ; 318 (DE-604)BV000007015 318 |
spellingShingle | Advances in rapid thermal and integrated processing Nato ASI series Rapid thermal processing Congresses Semiconductors Heat treatment Congresses Rapid thermal processing (DE-588)4347011-7 gnd |
subject_GND | (DE-588)4347011-7 (DE-588)1071861417 |
title | Advances in rapid thermal and integrated processing |
title_auth | Advances in rapid thermal and integrated processing |
title_exact_search | Advances in rapid thermal and integrated processing |
title_full | Advances in rapid thermal and integrated processing ed. by Fred Roozeboom |
title_fullStr | Advances in rapid thermal and integrated processing ed. by Fred Roozeboom |
title_full_unstemmed | Advances in rapid thermal and integrated processing ed. by Fred Roozeboom |
title_short | Advances in rapid thermal and integrated processing |
title_sort | advances in rapid thermal and integrated processing |
topic | Rapid thermal processing Congresses Semiconductors Heat treatment Congresses Rapid thermal processing (DE-588)4347011-7 gnd |
topic_facet | Rapid thermal processing Congresses Semiconductors Heat treatment Congresses Rapid thermal processing Konferenzschrift 1995 Maratea |
volume_link | (DE-604)BV000007015 |
work_keys_str_mv | AT roozeboomfred advancesinrapidthermalandintegratedprocessing |