(2001). Materials science of microelectromechanical systems (MEMS) devices III: Symposium held November 27 - 28, 2000, Boston, Massachusetts, U.S.A. Materials Research Soc.
Chicago-Zitierstil (17. Ausg.)Materials Science of Microelectromechanical Systems (MEMS) Devices III: Symposium Held November 27 - 28, 2000, Boston, Massachusetts, U.S.A. Warrendale, Pa: Materials Research Soc, 2001.
MLA-Zitierstil (9. Ausg.)Materials Science of Microelectromechanical Systems (MEMS) Devices III: Symposium Held November 27 - 28, 2000, Boston, Massachusetts, U.S.A. Materials Research Soc, 2001.
Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.