Materials science of microelectromechanical systems (MEMS) devices III: symposium held November 27 - 28, 2000, Boston, Massachusetts, U.S.A.
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Warrendale, Pa.
Materials Research Soc.
2001
|
| Schriftenreihe: | Materials Research Society symposia proceedings
657 |
| Schlagworte: | |
| Beschreibung: | Getr. Zählung Ill., graph. Darst. |
| ISBN: | 1558995676 |
Internformat
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Datensatz im Suchindex
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| id | DE-604.BV014125721 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:58:08Z |
| institution | BVB |
| isbn | 1558995676 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009680491 |
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| physical | Getr. Zählung Ill., graph. Darst. |
| publishDate | 2001 |
| publishDateSearch | 2001 |
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| publisher | Materials Research Soc. |
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| series | Materials Research Society symposia proceedings |
| series2 | Materials Research Society symposia proceedings |
| spelling | Materials science of microelectromechanical systems (MEMS) devices III symposium held November 27 - 28, 2000, Boston, Massachusetts, U.S.A. ed.: Harold Kahn ... Warrendale, Pa. Materials Research Soc. 2001 Getr. Zählung Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials Research Society symposia proceedings 657 Microelectromechanical systems Materials Congresses Mikroelektronik (DE-588)4039207-7 gnd rswk-swf Mikromechanik (DE-588)4205811-9 gnd rswk-swf Werkstoff (DE-588)4065579-9 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2000 Boston Mass. gnd-content Werkstoff (DE-588)4065579-9 s Mikromechanik (DE-588)4205811-9 s Mikroelektronik (DE-588)4039207-7 s DE-604 Kahn, Harold Sonstige oth Materials Research Society symposia proceedings 657 (DE-604)BV001899105 657 |
| spellingShingle | Materials science of microelectromechanical systems (MEMS) devices III symposium held November 27 - 28, 2000, Boston, Massachusetts, U.S.A. Materials Research Society symposia proceedings Microelectromechanical systems Materials Congresses Mikroelektronik (DE-588)4039207-7 gnd Mikromechanik (DE-588)4205811-9 gnd Werkstoff (DE-588)4065579-9 gnd |
| subject_GND | (DE-588)4039207-7 (DE-588)4205811-9 (DE-588)4065579-9 (DE-588)1071861417 |
| title | Materials science of microelectromechanical systems (MEMS) devices III symposium held November 27 - 28, 2000, Boston, Massachusetts, U.S.A. |
| title_auth | Materials science of microelectromechanical systems (MEMS) devices III symposium held November 27 - 28, 2000, Boston, Massachusetts, U.S.A. |
| title_exact_search | Materials science of microelectromechanical systems (MEMS) devices III symposium held November 27 - 28, 2000, Boston, Massachusetts, U.S.A. |
| title_full | Materials science of microelectromechanical systems (MEMS) devices III symposium held November 27 - 28, 2000, Boston, Massachusetts, U.S.A. ed.: Harold Kahn ... |
| title_fullStr | Materials science of microelectromechanical systems (MEMS) devices III symposium held November 27 - 28, 2000, Boston, Massachusetts, U.S.A. ed.: Harold Kahn ... |
| title_full_unstemmed | Materials science of microelectromechanical systems (MEMS) devices III symposium held November 27 - 28, 2000, Boston, Massachusetts, U.S.A. ed.: Harold Kahn ... |
| title_short | Materials science of microelectromechanical systems (MEMS) devices III |
| title_sort | materials science of microelectromechanical systems mems devices iii symposium held november 27 28 2000 boston massachusetts u s a |
| title_sub | symposium held November 27 - 28, 2000, Boston, Massachusetts, U.S.A. |
| topic | Microelectromechanical systems Materials Congresses Mikroelektronik (DE-588)4039207-7 gnd Mikromechanik (DE-588)4205811-9 gnd Werkstoff (DE-588)4065579-9 gnd |
| topic_facet | Microelectromechanical systems Materials Congresses Mikroelektronik Mikromechanik Werkstoff Konferenzschrift 2000 Boston Mass. |
| volume_link | (DE-604)BV001899105 |
| work_keys_str_mv | AT kahnharold materialsscienceofmicroelectromechanicalsystemsmemsdevicesiiisymposiumheldnovember27282000bostonmassachusettsusa |