APA (7th ed.) Citation

(1999). Lithography for semiconductor manufacturing: 19 - 21 May 1999, Edinburgh, Scotland. SPIE.

Chicago Style (17th ed.) Citation

Lithography for Semiconductor Manufacturing: 19 - 21 May 1999, Edinburgh, Scotland. Bellingham, Wash: SPIE, 1999.

MLA (9th ed.) Citation

Lithography for Semiconductor Manufacturing: 19 - 21 May 1999, Edinburgh, Scotland. SPIE, 1999.

Warning: These citations may not always be 100% accurate.