Materials and device characterization in micromachining III: 18 - 19 September 2000, Santa Clara, USA
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Bellingham, Wash.
SPIE
2000
|
| Series: | Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers
4175 |
| Subjects: | |
| Physical Description: | IX, 200 S. Ill., graph. Darst. |
| ISBN: | 0819438316 |
Staff View
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV014093836 | ||
| 003 | DE-604 | ||
| 005 | 20060831 | ||
| 007 | t | ||
| 008 | 020116s2000 ad|| |||| 00||| eng d | ||
| 020 | |a 0819438316 |9 0-8194-3831-6 | ||
| 035 | |a (OCoLC)45411232 | ||
| 035 | |a (DE-599)BVBBV014093836 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-703 | ||
| 050 | 0 | |a TA1505 | |
| 050 | 0 | |a TJ1191.5 | |
| 082 | 0 | |a 671.3/5 |2 21 | |
| 084 | |a ZN 4100 |0 (DE-625)157351: |2 rvk | ||
| 084 | |a ZN 4980 |0 (DE-625)157428: |2 rvk | ||
| 245 | 1 | 0 | |a Materials and device characterization in micromachining III |b 18 - 19 September 2000, Santa Clara, USA |c Yuli Vladimirsky ..., chairs/ed. |
| 264 | 1 | |a Bellingham, Wash. |b SPIE |c 2000 | |
| 300 | |a IX, 200 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers |v 4175 | |
| 650 | 4 | |a Electromechanical devices |v Congresses | |
| 650 | 4 | |a Micromachining |v Congresses | |
| 650 | 4 | |a Micromechanics |v Congresses | |
| 650 | 0 | 7 | |a Mikrobearbeitung |0 (DE-588)4582923-8 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 2000 |z Santa Clara Calif. |2 gnd-content | |
| 689 | 0 | 0 | |a Mikrobearbeitung |0 (DE-588)4582923-8 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Vladimirsky, Yuli |e Sonstige |4 oth | |
| 810 | 2 | |a Society of Photo-Optical Instrumentation Engineers |t Proceedings of SPIE |v 4175 |w (DE-604)BV000010887 |9 4175 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-009655292 | ||
Record in the Search Index
| _version_ | 1804128960322207744 |
|---|---|
| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV014093836 |
| callnumber-first | T - Technology |
| callnumber-label | TA1505 |
| callnumber-raw | TA1505 TJ1191.5 |
| callnumber-search | TA1505 TJ1191.5 |
| callnumber-sort | TA 41505 |
| callnumber-subject | TA - General and Civil Engineering |
| classification_rvk | ZN 4100 ZN 4980 |
| ctrlnum | (OCoLC)45411232 (DE-599)BVBBV014093836 |
| dewey-full | 671.3/5 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 671 - Metalworking & primary metal products |
| dewey-raw | 671.3/5 |
| dewey-search | 671.3/5 |
| dewey-sort | 3671.3 15 |
| dewey-tens | 670 - Manufacturing |
| discipline | Werkstoffwissenschaften / Fertigungstechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01556nam a2200421 cb4500</leader><controlfield tag="001">BV014093836</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20060831 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">020116s2000 ad|| |||| 00||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0819438316</subfield><subfield code="9">0-8194-3831-6</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)45411232</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV014093836</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-703</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TA1505</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TJ1191.5</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">671.3/5</subfield><subfield code="2">21</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 4100</subfield><subfield code="0">(DE-625)157351:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 4980</subfield><subfield code="0">(DE-625)157428:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Materials and device characterization in micromachining III</subfield><subfield code="b">18 - 19 September 2000, Santa Clara, USA</subfield><subfield code="c">Yuli Vladimirsky ..., chairs/ed.</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Bellingham, Wash.</subfield><subfield code="b">SPIE</subfield><subfield code="c">2000</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">IX, 200 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers</subfield><subfield code="v">4175</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Electromechanical devices</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Micromachining</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Micromechanics</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Mikrobearbeitung</subfield><subfield code="0">(DE-588)4582923-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="y">2000</subfield><subfield code="z">Santa Clara Calif.</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Mikrobearbeitung</subfield><subfield code="0">(DE-588)4582923-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Vladimirsky, Yuli</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="810" ind1="2" ind2=" "><subfield code="a">Society of Photo-Optical Instrumentation Engineers</subfield><subfield code="t">Proceedings of SPIE</subfield><subfield code="v">4175</subfield><subfield code="w">(DE-604)BV000010887</subfield><subfield code="9">4175</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-009655292</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift 2000 Santa Clara Calif. gnd-content |
| genre_facet | Konferenzschrift 2000 Santa Clara Calif. |
| id | DE-604.BV014093836 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:57:32Z |
| institution | BVB |
| isbn | 0819438316 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009655292 |
| oclc_num | 45411232 |
| open_access_boolean | |
| owner | DE-703 |
| owner_facet | DE-703 |
| physical | IX, 200 S. Ill., graph. Darst. |
| publishDate | 2000 |
| publishDateSearch | 2000 |
| publishDateSort | 2000 |
| publisher | SPIE |
| record_format | marc |
| series2 | Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers |
| spelling | Materials and device characterization in micromachining III 18 - 19 September 2000, Santa Clara, USA Yuli Vladimirsky ..., chairs/ed. Bellingham, Wash. SPIE 2000 IX, 200 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers 4175 Electromechanical devices Congresses Micromachining Congresses Micromechanics Congresses Mikrobearbeitung (DE-588)4582923-8 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2000 Santa Clara Calif. gnd-content Mikrobearbeitung (DE-588)4582923-8 s DE-604 Vladimirsky, Yuli Sonstige oth Society of Photo-Optical Instrumentation Engineers Proceedings of SPIE 4175 (DE-604)BV000010887 4175 |
| spellingShingle | Materials and device characterization in micromachining III 18 - 19 September 2000, Santa Clara, USA Electromechanical devices Congresses Micromachining Congresses Micromechanics Congresses Mikrobearbeitung (DE-588)4582923-8 gnd |
| subject_GND | (DE-588)4582923-8 (DE-588)1071861417 |
| title | Materials and device characterization in micromachining III 18 - 19 September 2000, Santa Clara, USA |
| title_auth | Materials and device characterization in micromachining III 18 - 19 September 2000, Santa Clara, USA |
| title_exact_search | Materials and device characterization in micromachining III 18 - 19 September 2000, Santa Clara, USA |
| title_full | Materials and device characterization in micromachining III 18 - 19 September 2000, Santa Clara, USA Yuli Vladimirsky ..., chairs/ed. |
| title_fullStr | Materials and device characterization in micromachining III 18 - 19 September 2000, Santa Clara, USA Yuli Vladimirsky ..., chairs/ed. |
| title_full_unstemmed | Materials and device characterization in micromachining III 18 - 19 September 2000, Santa Clara, USA Yuli Vladimirsky ..., chairs/ed. |
| title_short | Materials and device characterization in micromachining III |
| title_sort | materials and device characterization in micromachining iii 18 19 september 2000 santa clara usa |
| title_sub | 18 - 19 September 2000, Santa Clara, USA |
| topic | Electromechanical devices Congresses Micromachining Congresses Micromechanics Congresses Mikrobearbeitung (DE-588)4582923-8 gnd |
| topic_facet | Electromechanical devices Congresses Micromachining Congresses Micromechanics Congresses Mikrobearbeitung Konferenzschrift 2000 Santa Clara Calif. |
| volume_link | (DE-604)BV000010887 |
| work_keys_str_mv | AT vladimirskyyuli materialsanddevicecharacterizationinmicromachiningiii1819september2000santaclarausa |