Materials and device characterization in micromachining III: 18 - 19 September 2000, Santa Clara, USA
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Bellingham, Wash.
SPIE
2000
|
| Schriftenreihe: | Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers
4175 |
| Schlagworte: | |
| Beschreibung: | IX, 200 S. Ill., graph. Darst. |
| ISBN: | 0819438316 |
Internformat
MARC
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| 490 | 1 | |a Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers |v 4175 | |
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| 650 | 4 | |a Micromachining |v Congresses | |
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Datensatz im Suchindex
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| genre | (DE-588)1071861417 Konferenzschrift 2000 Santa Clara Calif. gnd-content |
| genre_facet | Konferenzschrift 2000 Santa Clara Calif. |
| id | DE-604.BV014093836 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:57:32Z |
| institution | BVB |
| isbn | 0819438316 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009655292 |
| oclc_num | 45411232 |
| open_access_boolean | |
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| owner_facet | DE-703 |
| physical | IX, 200 S. Ill., graph. Darst. |
| publishDate | 2000 |
| publishDateSearch | 2000 |
| publishDateSort | 2000 |
| publisher | SPIE |
| record_format | marc |
| series2 | Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers |
| spelling | Materials and device characterization in micromachining III 18 - 19 September 2000, Santa Clara, USA Yuli Vladimirsky ..., chairs/ed. Bellingham, Wash. SPIE 2000 IX, 200 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers 4175 Electromechanical devices Congresses Micromachining Congresses Micromechanics Congresses Mikrobearbeitung (DE-588)4582923-8 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2000 Santa Clara Calif. gnd-content Mikrobearbeitung (DE-588)4582923-8 s DE-604 Vladimirsky, Yuli Sonstige oth Society of Photo-Optical Instrumentation Engineers Proceedings of SPIE 4175 (DE-604)BV000010887 4175 |
| spellingShingle | Materials and device characterization in micromachining III 18 - 19 September 2000, Santa Clara, USA Electromechanical devices Congresses Micromachining Congresses Micromechanics Congresses Mikrobearbeitung (DE-588)4582923-8 gnd |
| subject_GND | (DE-588)4582923-8 (DE-588)1071861417 |
| title | Materials and device characterization in micromachining III 18 - 19 September 2000, Santa Clara, USA |
| title_auth | Materials and device characterization in micromachining III 18 - 19 September 2000, Santa Clara, USA |
| title_exact_search | Materials and device characterization in micromachining III 18 - 19 September 2000, Santa Clara, USA |
| title_full | Materials and device characterization in micromachining III 18 - 19 September 2000, Santa Clara, USA Yuli Vladimirsky ..., chairs/ed. |
| title_fullStr | Materials and device characterization in micromachining III 18 - 19 September 2000, Santa Clara, USA Yuli Vladimirsky ..., chairs/ed. |
| title_full_unstemmed | Materials and device characterization in micromachining III 18 - 19 September 2000, Santa Clara, USA Yuli Vladimirsky ..., chairs/ed. |
| title_short | Materials and device characterization in micromachining III |
| title_sort | materials and device characterization in micromachining iii 18 19 september 2000 santa clara usa |
| title_sub | 18 - 19 September 2000, Santa Clara, USA |
| topic | Electromechanical devices Congresses Micromachining Congresses Micromechanics Congresses Mikrobearbeitung (DE-588)4582923-8 gnd |
| topic_facet | Electromechanical devices Congresses Micromachining Congresses Micromechanics Congresses Mikrobearbeitung Konferenzschrift 2000 Santa Clara Calif. |
| volume_link | (DE-604)BV000010887 |
| work_keys_str_mv | AT vladimirskyyuli materialsanddevicecharacterizationinmicromachiningiii1819september2000santaclarausa |