EUV, X-ray and neutron optics and sources: 21 - 23 July 1999, Denver, Colorado
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Bellingham, Wash.
SPIE
1999
|
| Schriftenreihe: | Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers
3767 |
| Schlagworte: | |
| Beschreibung: | X, 394 S. Ill., graph. Darst. |
| ISBN: | 0819432539 |
Internformat
MARC
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| 245 | 1 | 0 | |a EUV, X-ray and neutron optics and sources |b 21 - 23 July 1999, Denver, Colorado |c Carolyn A. MacDonald ... chairs/ed. |
| 264 | 1 | |a Bellingham, Wash. |b SPIE |c 1999 | |
| 300 | |a X, 394 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
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| 490 | 1 | |a Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers |v 3767 | |
| 650 | 4 | |a Extreme ultraviolet lithography. |v Congresses | |
| 650 | 4 | |a Ion beam lithography |v Congresses | |
| 650 | 4 | |a Lithography, Electron beam |v Congresses | |
| 650 | 4 | |a Neutron sources |v Congresses | |
| 650 | 4 | |a X-ray optics |v Congresses | |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |2 gnd-content | |
| 700 | 1 | |a MacDonald, Carolyn A. |e Sonstige |4 oth | |
| 810 | 2 | |a Society of Photo-Optical Instrumentation Engineers |t Proceedings of SPIE |v 3767 |w (DE-604)BV000010887 |9 3767 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-009652627 | ||
Datensatz im Suchindex
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|---|---|
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| building | Verbundindex |
| bvnumber | BV014090805 |
| callnumber-first | T - Technology |
| callnumber-label | TA1775 |
| callnumber-raw | TA1775 TS510 |
| callnumber-search | TA1775 TS510 |
| callnumber-sort | TA 41775 |
| callnumber-subject | TA - General and Civil Engineering |
| classification_rvk | UH 6650 |
| ctrlnum | (OCoLC)43290164 (DE-599)BVBBV014090805 |
| dewey-full | 621.36 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.36 |
| dewey-search | 621.36 |
| dewey-sort | 3621.36 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| genre | (DE-588)1071861417 Konferenzschrift gnd-content |
| genre_facet | Konferenzschrift |
| id | DE-604.BV014090805 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:57:29Z |
| institution | BVB |
| isbn | 0819432539 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009652627 |
| oclc_num | 43290164 |
| open_access_boolean | |
| owner | DE-703 |
| owner_facet | DE-703 |
| physical | X, 394 S. Ill., graph. Darst. |
| publishDate | 1999 |
| publishDateSearch | 1999 |
| publishDateSort | 1999 |
| publisher | SPIE |
| record_format | marc |
| series2 | Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers |
| spelling | EUV, X-ray and neutron optics and sources 21 - 23 July 1999, Denver, Colorado Carolyn A. MacDonald ... chairs/ed. Bellingham, Wash. SPIE 1999 X, 394 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers 3767 Extreme ultraviolet lithography. Congresses Ion beam lithography Congresses Lithography, Electron beam Congresses Neutron sources Congresses X-ray optics Congresses (DE-588)1071861417 Konferenzschrift gnd-content MacDonald, Carolyn A. Sonstige oth Society of Photo-Optical Instrumentation Engineers Proceedings of SPIE 3767 (DE-604)BV000010887 3767 |
| spellingShingle | EUV, X-ray and neutron optics and sources 21 - 23 July 1999, Denver, Colorado Extreme ultraviolet lithography. Congresses Ion beam lithography Congresses Lithography, Electron beam Congresses Neutron sources Congresses X-ray optics Congresses |
| subject_GND | (DE-588)1071861417 |
| title | EUV, X-ray and neutron optics and sources 21 - 23 July 1999, Denver, Colorado |
| title_auth | EUV, X-ray and neutron optics and sources 21 - 23 July 1999, Denver, Colorado |
| title_exact_search | EUV, X-ray and neutron optics and sources 21 - 23 July 1999, Denver, Colorado |
| title_full | EUV, X-ray and neutron optics and sources 21 - 23 July 1999, Denver, Colorado Carolyn A. MacDonald ... chairs/ed. |
| title_fullStr | EUV, X-ray and neutron optics and sources 21 - 23 July 1999, Denver, Colorado Carolyn A. MacDonald ... chairs/ed. |
| title_full_unstemmed | EUV, X-ray and neutron optics and sources 21 - 23 July 1999, Denver, Colorado Carolyn A. MacDonald ... chairs/ed. |
| title_short | EUV, X-ray and neutron optics and sources |
| title_sort | euv x ray and neutron optics and sources 21 23 july 1999 denver colorado |
| title_sub | 21 - 23 July 1999, Denver, Colorado |
| topic | Extreme ultraviolet lithography. Congresses Ion beam lithography Congresses Lithography, Electron beam Congresses Neutron sources Congresses X-ray optics Congresses |
| topic_facet | Extreme ultraviolet lithography. Congresses Ion beam lithography Congresses Lithography, Electron beam Congresses Neutron sources Congresses X-ray optics Congresses Konferenzschrift |
| volume_link | (DE-604)BV000010887 |
| work_keys_str_mv | AT macdonaldcarolyna euvxrayandneutronopticsandsources2123july1999denvercolorado |