Formation of aluminium nitride by plasma immersion ion implantation:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Abschlussarbeit Buch |
| Sprache: | English |
| Veröffentlicht: |
Berlin
Mensch-&-Buch-Verl.
2001
|
| Schlagworte: | |
| Beschreibung: | 109 S. Ill., graph. Darst. |
| ISBN: | 3898202704 |
Internformat
MARC
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| 300 | |a 109 S. |b Ill., graph. Darst. | ||
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| 502 | |a Augsburg, Univ., Diss., 2001 | ||
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Datensatz im Suchindex
| _version_ | 1804128888422400000 |
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| author | Manova, Darina Ilcheva 1963- |
| author_GND | (DE-588)173633293 |
| author_facet | Manova, Darina Ilcheva 1963- |
| author_role | aut |
| author_sort | Manova, Darina Ilcheva 1963- |
| author_variant | d i m di dim |
| building | Verbundindex |
| bvnumber | BV014031142 |
| classification_rvk | UP 9350 |
| ctrlnum | (OCoLC)76288476 (DE-599)BVBBV014031142 |
| discipline | Physik |
| format | Thesis Book |
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| id | DE-604.BV014031142 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:56:24Z |
| institution | BVB |
| isbn | 3898202704 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009606647 |
| oclc_num | 76288476 |
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| physical | 109 S. Ill., graph. Darst. |
| publishDate | 2001 |
| publishDateSearch | 2001 |
| publishDateSort | 2001 |
| publisher | Mensch-&-Buch-Verl. |
| record_format | marc |
| spelling | Manova, Darina Ilcheva 1963- Verfasser (DE-588)173633293 aut Formation of aluminium nitride by plasma immersion ion implantation by Darina Manova Berlin Mensch-&-Buch-Verl. 2001 109 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Augsburg, Univ., Diss., 2001 Plasma-Immersions-Implantation (DE-588)4555810-3 gnd rswk-swf Aluminiumnitrid (DE-588)4226770-5 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Aluminiumnitrid (DE-588)4226770-5 s Plasma-Immersions-Implantation (DE-588)4555810-3 s DE-604 |
| spellingShingle | Manova, Darina Ilcheva 1963- Formation of aluminium nitride by plasma immersion ion implantation Plasma-Immersions-Implantation (DE-588)4555810-3 gnd Aluminiumnitrid (DE-588)4226770-5 gnd |
| subject_GND | (DE-588)4555810-3 (DE-588)4226770-5 (DE-588)4113937-9 |
| title | Formation of aluminium nitride by plasma immersion ion implantation |
| title_auth | Formation of aluminium nitride by plasma immersion ion implantation |
| title_exact_search | Formation of aluminium nitride by plasma immersion ion implantation |
| title_full | Formation of aluminium nitride by plasma immersion ion implantation by Darina Manova |
| title_fullStr | Formation of aluminium nitride by plasma immersion ion implantation by Darina Manova |
| title_full_unstemmed | Formation of aluminium nitride by plasma immersion ion implantation by Darina Manova |
| title_short | Formation of aluminium nitride by plasma immersion ion implantation |
| title_sort | formation of aluminium nitride by plasma immersion ion implantation |
| topic | Plasma-Immersions-Implantation (DE-588)4555810-3 gnd Aluminiumnitrid (DE-588)4226770-5 gnd |
| topic_facet | Plasma-Immersions-Implantation Aluminiumnitrid Hochschulschrift |
| work_keys_str_mv | AT manovadarinailcheva formationofaluminiumnitridebyplasmaimmersionionimplantation |