APA (7th ed.) Citation

Levinson, H. J. (2001). Principles of lithography. SPIE Press.

Chicago Style (17th ed.) Citation

Levinson, Harry J. Principles of Lithography. Bellingham, Wash: SPIE Press, 2001.

MLA (9th ed.) Citation

Levinson, Harry J. Principles of Lithography. SPIE Press, 2001.

Warning: These citations may not always be 100% accurate.