Principles of lithography:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Bellingham, Wash.
SPIE Press
2001
|
| Schlagworte: | |
| Beschreibung: | IX, 373 S. Ill., graph. Darst. |
| ISBN: | 0819440450 |
Internformat
MARC
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| 100 | 1 | |a Levinson, Harry J. |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Principles of lithography |c Harry J. Levinson |
| 264 | 1 | |a Bellingham, Wash. |b SPIE Press |c 2001 | |
| 300 | |a IX, 373 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 650 | 4 | |a Integrated circuits |x Design and construction | |
| 650 | 4 | |a Microlithography | |
| 650 | 0 | 7 | |a Lithografie |g Halbleitertechnologie |0 (DE-588)4191584-7 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Lithografie |g Halbleitertechnologie |0 (DE-588)4191584-7 |D s |
| 689 | 0 | |5 DE-604 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-009566784 | ||
Datensatz im Suchindex
| _version_ | 1804128828672442368 |
|---|---|
| any_adam_object | |
| author | Levinson, Harry J. |
| author_facet | Levinson, Harry J. |
| author_role | aut |
| author_sort | Levinson, Harry J. |
| author_variant | h j l hj hjl |
| building | Verbundindex |
| bvnumber | BV013976372 |
| callnumber-first | T - Technology |
| callnumber-label | TK7874 |
| callnumber-raw | TK7874 |
| callnumber-search | TK7874 |
| callnumber-sort | TK 47874 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | ZN 4170 |
| ctrlnum | (OCoLC)45493267 (DE-599)BVBBV013976372 |
| dewey-full | 621.3815/31 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/31 |
| dewey-search | 621.3815/31 |
| dewey-sort | 3621.3815 231 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| id | DE-604.BV013976372 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:55:27Z |
| institution | BVB |
| isbn | 0819440450 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009566784 |
| oclc_num | 45493267 |
| open_access_boolean | |
| owner | DE-703 DE-20 DE-1046 DE-522 |
| owner_facet | DE-703 DE-20 DE-1046 DE-522 |
| physical | IX, 373 S. Ill., graph. Darst. |
| publishDate | 2001 |
| publishDateSearch | 2001 |
| publishDateSort | 2001 |
| publisher | SPIE Press |
| record_format | marc |
| spelling | Levinson, Harry J. Verfasser aut Principles of lithography Harry J. Levinson Bellingham, Wash. SPIE Press 2001 IX, 373 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Integrated circuits Design and construction Microlithography Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf Lithografie Halbleitertechnologie (DE-588)4191584-7 s DE-604 |
| spellingShingle | Levinson, Harry J. Principles of lithography Integrated circuits Design and construction Microlithography Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| subject_GND | (DE-588)4191584-7 |
| title | Principles of lithography |
| title_auth | Principles of lithography |
| title_exact_search | Principles of lithography |
| title_full | Principles of lithography Harry J. Levinson |
| title_fullStr | Principles of lithography Harry J. Levinson |
| title_full_unstemmed | Principles of lithography Harry J. Levinson |
| title_short | Principles of lithography |
| title_sort | principles of lithography |
| topic | Integrated circuits Design and construction Microlithography Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| topic_facet | Integrated circuits Design and construction Microlithography Lithografie Halbleitertechnologie |
| work_keys_str_mv | AT levinsonharryj principlesoflithography |