Microstereolithography and other fabrication techniques for 3D MEMS:
Gespeichert in:
Hauptverfasser: | , , |
---|---|
Format: | Buch |
Sprache: | English |
Veröffentlicht: |
Chichester [u.a.]
Wiley
2001
|
Schlagworte: | |
Beschreibung: | XIII, 260 S. Ill., graph. Darst. |
ISBN: | 047152185X |
Internformat
MARC
LEADER | 00000nam a2200000 c 4500 | ||
---|---|---|---|
001 | BV013975230 | ||
003 | DE-604 | ||
005 | 20060912 | ||
007 | t | ||
008 | 011024s2001 ad|| |||| 00||| eng d | ||
020 | |a 047152185X |9 0-471-52185-X | ||
035 | |a (OCoLC)223170272 | ||
035 | |a (DE-599)BVBBV013975230 | ||
040 | |a DE-604 |b ger |e rakwb | ||
041 | 0 | |a eng | |
049 | |a DE-703 | ||
050 | 0 | |a TK7875 | |
082 | 0 | |a 621.381 |2 21 | |
084 | |a ZN 3750 |0 (DE-625)157334: |2 rvk | ||
084 | |a ZN 4980 |0 (DE-625)157428: |2 rvk | ||
100 | 1 | |a Varadan, Vijay K. |e Verfasser |4 aut | |
245 | 1 | 0 | |a Microstereolithography and other fabrication techniques for 3D MEMS |c Vijay K. Varadan, Xiaoning Jiang and Vasundra V. Varadan |
264 | 1 | |a Chichester [u.a.] |b Wiley |c 2001 | |
300 | |a XIII, 260 S. |b Ill., graph. Darst. | ||
336 | |b txt |2 rdacontent | ||
337 | |b n |2 rdamedia | ||
338 | |b nc |2 rdacarrier | ||
650 | 4 | |a Microelectromechanical systems |x Design and construction | |
650 | 4 | |a Microlithography | |
650 | 4 | |a Three-dimensional display systems | |
650 | 0 | 7 | |a Stereolithographie |0 (DE-588)4401168-4 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Mikroelektronik |0 (DE-588)4039207-7 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Mikromechanik |0 (DE-588)4205811-9 |2 gnd |9 rswk-swf |
689 | 0 | 0 | |a Stereolithographie |0 (DE-588)4401168-4 |D s |
689 | 0 | 1 | |a Mikromechanik |0 (DE-588)4205811-9 |D s |
689 | 0 | 2 | |a Mikroelektronik |0 (DE-588)4039207-7 |D s |
689 | 0 | |5 DE-604 | |
700 | 1 | |a Jiang, Xiaoning |e Verfasser |4 aut | |
700 | 1 | |a Varadan, Vasundara V. |e Verfasser |4 aut | |
999 | |a oai:aleph.bib-bvb.de:BVB01-009565764 |
Datensatz im Suchindex
_version_ | 1804128827203387392 |
---|---|
any_adam_object | |
author | Varadan, Vijay K. Jiang, Xiaoning Varadan, Vasundara V. |
author_facet | Varadan, Vijay K. Jiang, Xiaoning Varadan, Vasundara V. |
author_role | aut aut aut |
author_sort | Varadan, Vijay K. |
author_variant | v k v vk vkv x j xj v v v vv vvv |
building | Verbundindex |
bvnumber | BV013975230 |
callnumber-first | T - Technology |
callnumber-label | TK7875 |
callnumber-raw | TK7875 |
callnumber-search | TK7875 |
callnumber-sort | TK 47875 |
callnumber-subject | TK - Electrical and Nuclear Engineering |
classification_rvk | ZN 3750 ZN 4980 |
ctrlnum | (OCoLC)223170272 (DE-599)BVBBV013975230 |
dewey-full | 621.381 |
dewey-hundreds | 600 - Technology (Applied sciences) |
dewey-ones | 621 - Applied physics |
dewey-raw | 621.381 |
dewey-search | 621.381 |
dewey-sort | 3621.381 |
dewey-tens | 620 - Engineering and allied operations |
discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
format | Book |
fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01575nam a2200445 c 4500</leader><controlfield tag="001">BV013975230</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20060912 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">011024s2001 ad|| |||| 00||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">047152185X</subfield><subfield code="9">0-471-52185-X</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)223170272</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV013975230</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-703</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TK7875</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.381</subfield><subfield code="2">21</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 3750</subfield><subfield code="0">(DE-625)157334:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 4980</subfield><subfield code="0">(DE-625)157428:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Varadan, Vijay K.</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Microstereolithography and other fabrication techniques for 3D MEMS</subfield><subfield code="c">Vijay K. Varadan, Xiaoning Jiang and Vasundra V. Varadan</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Chichester [u.a.]</subfield><subfield code="b">Wiley</subfield><subfield code="c">2001</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XIII, 260 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microelectromechanical systems</subfield><subfield code="x">Design and construction</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microlithography</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Three-dimensional display systems</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Stereolithographie</subfield><subfield code="0">(DE-588)4401168-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Mikroelektronik</subfield><subfield code="0">(DE-588)4039207-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Mikromechanik</subfield><subfield code="0">(DE-588)4205811-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Stereolithographie</subfield><subfield code="0">(DE-588)4401168-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Mikromechanik</subfield><subfield code="0">(DE-588)4205811-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">Mikroelektronik</subfield><subfield code="0">(DE-588)4039207-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Jiang, Xiaoning</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Varadan, Vasundara V.</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-009565764</subfield></datafield></record></collection> |
id | DE-604.BV013975230 |
illustrated | Illustrated |
indexdate | 2024-07-09T18:55:25Z |
institution | BVB |
isbn | 047152185X |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009565764 |
oclc_num | 223170272 |
open_access_boolean | |
owner | DE-703 |
owner_facet | DE-703 |
physical | XIII, 260 S. Ill., graph. Darst. |
publishDate | 2001 |
publishDateSearch | 2001 |
publishDateSort | 2001 |
publisher | Wiley |
record_format | marc |
spelling | Varadan, Vijay K. Verfasser aut Microstereolithography and other fabrication techniques for 3D MEMS Vijay K. Varadan, Xiaoning Jiang and Vasundra V. Varadan Chichester [u.a.] Wiley 2001 XIII, 260 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Microelectromechanical systems Design and construction Microlithography Three-dimensional display systems Stereolithographie (DE-588)4401168-4 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 gnd rswk-swf Mikromechanik (DE-588)4205811-9 gnd rswk-swf Stereolithographie (DE-588)4401168-4 s Mikromechanik (DE-588)4205811-9 s Mikroelektronik (DE-588)4039207-7 s DE-604 Jiang, Xiaoning Verfasser aut Varadan, Vasundara V. Verfasser aut |
spellingShingle | Varadan, Vijay K. Jiang, Xiaoning Varadan, Vasundara V. Microstereolithography and other fabrication techniques for 3D MEMS Microelectromechanical systems Design and construction Microlithography Three-dimensional display systems Stereolithographie (DE-588)4401168-4 gnd Mikroelektronik (DE-588)4039207-7 gnd Mikromechanik (DE-588)4205811-9 gnd |
subject_GND | (DE-588)4401168-4 (DE-588)4039207-7 (DE-588)4205811-9 |
title | Microstereolithography and other fabrication techniques for 3D MEMS |
title_auth | Microstereolithography and other fabrication techniques for 3D MEMS |
title_exact_search | Microstereolithography and other fabrication techniques for 3D MEMS |
title_full | Microstereolithography and other fabrication techniques for 3D MEMS Vijay K. Varadan, Xiaoning Jiang and Vasundra V. Varadan |
title_fullStr | Microstereolithography and other fabrication techniques for 3D MEMS Vijay K. Varadan, Xiaoning Jiang and Vasundra V. Varadan |
title_full_unstemmed | Microstereolithography and other fabrication techniques for 3D MEMS Vijay K. Varadan, Xiaoning Jiang and Vasundra V. Varadan |
title_short | Microstereolithography and other fabrication techniques for 3D MEMS |
title_sort | microstereolithography and other fabrication techniques for 3d mems |
topic | Microelectromechanical systems Design and construction Microlithography Three-dimensional display systems Stereolithographie (DE-588)4401168-4 gnd Mikroelektronik (DE-588)4039207-7 gnd Mikromechanik (DE-588)4205811-9 gnd |
topic_facet | Microelectromechanical systems Design and construction Microlithography Three-dimensional display systems Stereolithographie Mikroelektronik Mikromechanik |
work_keys_str_mv | AT varadanvijayk microstereolithographyandotherfabricationtechniquesfor3dmems AT jiangxiaoning microstereolithographyandotherfabricationtechniquesfor3dmems AT varadanvasundarav microstereolithographyandotherfabricationtechniquesfor3dmems |