Encapsulated micromachined resonant force sensor:
Saved in:
| Main Author: | |
|---|---|
| Format: | Microfilm Book |
| Language: | English |
| Published: |
2000
|
| Edition: | [Mikrofiche-Ausg.] |
| Subjects: | |
| Item Description: | Zürich, Techn. Hochsch., Diss., 2000. - Mikrofiche-Ausg.: 2 Mikrofiches : 24x |
| Physical Description: | XVI, 146 S. Ill., graph. Darst. |
Staff View
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV013968768 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | he|uuuuuuuuuu | ||
| 008 | 011022s2000 ad|| bm||| 00||| eng d | ||
| 035 | |a (OCoLC)634929012 | ||
| 035 | |a (DE-599)BVBBV013968768 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-91 |a DE-355 | ||
| 084 | |a ZQ 3700 |0 (DE-625)158072: |2 rvk | ||
| 100 | 1 | |a Haueis, Martin |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Encapsulated micromachined resonant force sensor |c presented by Martin Haueis |
| 250 | |a [Mikrofiche-Ausg.] | ||
| 264 | 1 | |c 2000 | |
| 300 | |a XVI, 146 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b h |2 rdamedia | ||
| 338 | |b he |2 rdacarrier | ||
| 500 | |a Zürich, Techn. Hochsch., Diss., 2000. - Mikrofiche-Ausg.: 2 Mikrofiches : 24x | ||
| 650 | 0 | 7 | |a Silicium |0 (DE-588)4077445-4 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Einkristall |0 (DE-588)4013901-3 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Mikrosystemtechnik |0 (DE-588)4221617-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Resonator |0 (DE-588)4131574-1 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Kraftsensor |0 (DE-588)4165452-3 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Gehäuse |0 (DE-588)4156307-4 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
| 689 | 0 | 0 | |a Kraftsensor |0 (DE-588)4165452-3 |D s |
| 689 | 0 | 1 | |a Resonator |0 (DE-588)4131574-1 |D s |
| 689 | 0 | 2 | |a Gehäuse |0 (DE-588)4156307-4 |D s |
| 689 | 0 | 3 | |a Silicium |0 (DE-588)4077445-4 |D s |
| 689 | 0 | 4 | |a Einkristall |0 (DE-588)4013901-3 |D s |
| 689 | 0 | 5 | |a Mikrosystemtechnik |0 (DE-588)4221617-5 |D s |
| 689 | 0 | |5 DE-604 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-009561387 | ||
Record in the Search Index
| _version_ | 1804128820448460800 |
|---|---|
| any_adam_object | |
| author | Haueis, Martin |
| author_facet | Haueis, Martin |
| author_role | aut |
| author_sort | Haueis, Martin |
| author_variant | m h mh |
| building | Verbundindex |
| bvnumber | BV013968768 |
| classification_rvk | ZQ 3700 |
| ctrlnum | (OCoLC)634929012 (DE-599)BVBBV013968768 |
| discipline | Mess-/Steuerungs-/Regelungs-/Automatisierungstechnik / Mechatronik |
| edition | [Mikrofiche-Ausg.] |
| format | Microfilm Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01622nam a2200445 c 4500</leader><controlfield tag="001">BV013968768</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">he|uuuuuuuuuu</controlfield><controlfield tag="008">011022s2000 ad|| bm||| 00||| eng d</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)634929012</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV013968768</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-91</subfield><subfield code="a">DE-355</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZQ 3700</subfield><subfield code="0">(DE-625)158072:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Haueis, Martin</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Encapsulated micromachined resonant force sensor</subfield><subfield code="c">presented by Martin Haueis</subfield></datafield><datafield tag="250" ind1=" " ind2=" "><subfield code="a">[Mikrofiche-Ausg.]</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2000</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XVI, 146 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">h</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">he</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Zürich, Techn. Hochsch., Diss., 2000. - Mikrofiche-Ausg.: 2 Mikrofiches : 24x</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Silicium</subfield><subfield code="0">(DE-588)4077445-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Einkristall</subfield><subfield code="0">(DE-588)4013901-3</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Mikrosystemtechnik</subfield><subfield code="0">(DE-588)4221617-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Resonator</subfield><subfield code="0">(DE-588)4131574-1</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Kraftsensor</subfield><subfield code="0">(DE-588)4165452-3</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Gehäuse</subfield><subfield code="0">(DE-588)4156307-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)4113937-9</subfield><subfield code="a">Hochschulschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Kraftsensor</subfield><subfield code="0">(DE-588)4165452-3</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Resonator</subfield><subfield code="0">(DE-588)4131574-1</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">Gehäuse</subfield><subfield code="0">(DE-588)4156307-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="3"><subfield code="a">Silicium</subfield><subfield code="0">(DE-588)4077445-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="4"><subfield code="a">Einkristall</subfield><subfield code="0">(DE-588)4013901-3</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="5"><subfield code="a">Mikrosystemtechnik</subfield><subfield code="0">(DE-588)4221617-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-009561387</subfield></datafield></record></collection> |
| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV013968768 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:55:19Z |
| institution | BVB |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009561387 |
| oclc_num | 634929012 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM DE-355 DE-BY-UBR |
| owner_facet | DE-91 DE-BY-TUM DE-355 DE-BY-UBR |
| physical | XVI, 146 S. Ill., graph. Darst. |
| publishDate | 2000 |
| publishDateSearch | 2000 |
| publishDateSort | 2000 |
| record_format | marc |
| spelling | Haueis, Martin Verfasser aut Encapsulated micromachined resonant force sensor presented by Martin Haueis [Mikrofiche-Ausg.] 2000 XVI, 146 S. Ill., graph. Darst. txt rdacontent h rdamedia he rdacarrier Zürich, Techn. Hochsch., Diss., 2000. - Mikrofiche-Ausg.: 2 Mikrofiches : 24x Silicium (DE-588)4077445-4 gnd rswk-swf Einkristall (DE-588)4013901-3 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf Resonator (DE-588)4131574-1 gnd rswk-swf Kraftsensor (DE-588)4165452-3 gnd rswk-swf Gehäuse (DE-588)4156307-4 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Kraftsensor (DE-588)4165452-3 s Resonator (DE-588)4131574-1 s Gehäuse (DE-588)4156307-4 s Silicium (DE-588)4077445-4 s Einkristall (DE-588)4013901-3 s Mikrosystemtechnik (DE-588)4221617-5 s DE-604 |
| spellingShingle | Haueis, Martin Encapsulated micromachined resonant force sensor Silicium (DE-588)4077445-4 gnd Einkristall (DE-588)4013901-3 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd Resonator (DE-588)4131574-1 gnd Kraftsensor (DE-588)4165452-3 gnd Gehäuse (DE-588)4156307-4 gnd |
| subject_GND | (DE-588)4077445-4 (DE-588)4013901-3 (DE-588)4221617-5 (DE-588)4131574-1 (DE-588)4165452-3 (DE-588)4156307-4 (DE-588)4113937-9 |
| title | Encapsulated micromachined resonant force sensor |
| title_auth | Encapsulated micromachined resonant force sensor |
| title_exact_search | Encapsulated micromachined resonant force sensor |
| title_full | Encapsulated micromachined resonant force sensor presented by Martin Haueis |
| title_fullStr | Encapsulated micromachined resonant force sensor presented by Martin Haueis |
| title_full_unstemmed | Encapsulated micromachined resonant force sensor presented by Martin Haueis |
| title_short | Encapsulated micromachined resonant force sensor |
| title_sort | encapsulated micromachined resonant force sensor |
| topic | Silicium (DE-588)4077445-4 gnd Einkristall (DE-588)4013901-3 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd Resonator (DE-588)4131574-1 gnd Kraftsensor (DE-588)4165452-3 gnd Gehäuse (DE-588)4156307-4 gnd |
| topic_facet | Silicium Einkristall Mikrosystemtechnik Resonator Kraftsensor Gehäuse Hochschulschrift |
| work_keys_str_mv | AT haueismartin encapsulatedmicromachinedresonantforcesensor |