Encapsulated micromachined resonant force sensor:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Mikrofilm Buch |
| Sprache: | English |
| Veröffentlicht: |
2000
|
| Ausgabe: | [Mikrofiche-Ausg.] |
| Schlagworte: | |
| Beschreibung: | Zürich, Techn. Hochsch., Diss., 2000. - Mikrofiche-Ausg.: 2 Mikrofiches : 24x |
| Beschreibung: | XVI, 146 S. Ill., graph. Darst. |
Internformat
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Datensatz im Suchindex
| _version_ | 1804128820448460800 |
|---|---|
| any_adam_object | |
| author | Haueis, Martin |
| author_facet | Haueis, Martin |
| author_role | aut |
| author_sort | Haueis, Martin |
| author_variant | m h mh |
| building | Verbundindex |
| bvnumber | BV013968768 |
| classification_rvk | ZQ 3700 |
| ctrlnum | (OCoLC)634929012 (DE-599)BVBBV013968768 |
| discipline | Mess-/Steuerungs-/Regelungs-/Automatisierungstechnik / Mechatronik |
| edition | [Mikrofiche-Ausg.] |
| format | Microfilm Book |
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| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV013968768 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:55:19Z |
| institution | BVB |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009561387 |
| oclc_num | 634929012 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM DE-355 DE-BY-UBR |
| owner_facet | DE-91 DE-BY-TUM DE-355 DE-BY-UBR |
| physical | XVI, 146 S. Ill., graph. Darst. |
| publishDate | 2000 |
| publishDateSearch | 2000 |
| publishDateSort | 2000 |
| record_format | marc |
| spelling | Haueis, Martin Verfasser aut Encapsulated micromachined resonant force sensor presented by Martin Haueis [Mikrofiche-Ausg.] 2000 XVI, 146 S. Ill., graph. Darst. txt rdacontent h rdamedia he rdacarrier Zürich, Techn. Hochsch., Diss., 2000. - Mikrofiche-Ausg.: 2 Mikrofiches : 24x Silicium (DE-588)4077445-4 gnd rswk-swf Einkristall (DE-588)4013901-3 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf Resonator (DE-588)4131574-1 gnd rswk-swf Kraftsensor (DE-588)4165452-3 gnd rswk-swf Gehäuse (DE-588)4156307-4 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Kraftsensor (DE-588)4165452-3 s Resonator (DE-588)4131574-1 s Gehäuse (DE-588)4156307-4 s Silicium (DE-588)4077445-4 s Einkristall (DE-588)4013901-3 s Mikrosystemtechnik (DE-588)4221617-5 s DE-604 |
| spellingShingle | Haueis, Martin Encapsulated micromachined resonant force sensor Silicium (DE-588)4077445-4 gnd Einkristall (DE-588)4013901-3 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd Resonator (DE-588)4131574-1 gnd Kraftsensor (DE-588)4165452-3 gnd Gehäuse (DE-588)4156307-4 gnd |
| subject_GND | (DE-588)4077445-4 (DE-588)4013901-3 (DE-588)4221617-5 (DE-588)4131574-1 (DE-588)4165452-3 (DE-588)4156307-4 (DE-588)4113937-9 |
| title | Encapsulated micromachined resonant force sensor |
| title_auth | Encapsulated micromachined resonant force sensor |
| title_exact_search | Encapsulated micromachined resonant force sensor |
| title_full | Encapsulated micromachined resonant force sensor presented by Martin Haueis |
| title_fullStr | Encapsulated micromachined resonant force sensor presented by Martin Haueis |
| title_full_unstemmed | Encapsulated micromachined resonant force sensor presented by Martin Haueis |
| title_short | Encapsulated micromachined resonant force sensor |
| title_sort | encapsulated micromachined resonant force sensor |
| topic | Silicium (DE-588)4077445-4 gnd Einkristall (DE-588)4013901-3 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd Resonator (DE-588)4131574-1 gnd Kraftsensor (DE-588)4165452-3 gnd Gehäuse (DE-588)4156307-4 gnd |
| topic_facet | Silicium Einkristall Mikrosystemtechnik Resonator Kraftsensor Gehäuse Hochschulschrift |
| work_keys_str_mv | AT haueismartin encapsulatedmicromachinedresonantforcesensor |