The science and engineering of microelectronic fabrication:
Saved in:
| New Title: | Campbell, Stephen A. Fabrication engineering at the micro- and nanoscale |
|---|---|
| Main Author: | |
| Format: | Book |
| Language: | English |
| Published: |
New York [u.a.]
Oxford Univ. Press
2001
|
| Edition: | 2. ed. |
| Series: | The Oxford series in electrical and computer engineering
|
| Subjects: | |
| Physical Description: | XIV, 603 S. Ill., graph. Darst. |
| ISBN: | 0195136055 |
Staff View
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Record in the Search Index
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| dewey-search | 621.3815/2 |
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| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
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| id | DE-604.BV013957020 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:55:05Z |
| institution | BVB |
| isbn | 0195136055 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009551690 |
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| physical | XIV, 603 S. Ill., graph. Darst. |
| publishDate | 2001 |
| publishDateSearch | 2001 |
| publishDateSort | 2001 |
| publisher | Oxford Univ. Press |
| record_format | marc |
| series2 | The Oxford series in electrical and computer engineering |
| spelling | Campbell, Stephen A. Verfasser aut The science and engineering of microelectronic fabrication Stephen A. Campbell 2. ed. New York [u.a.] Oxford Univ. Press 2001 XIV, 603 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier The Oxford series in electrical and computer engineering Microfabrication rasuqam Microélectronique rasuqam Semiconducteur rasuqam Semiconductors Design and construction Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 s DE-604 Spätere Aufl. u.d.T. Campbell, Stephen A. Fabrication engineering at the micro- and nanoscale |
| spellingShingle | Campbell, Stephen A. The science and engineering of microelectronic fabrication Microfabrication rasuqam Microélectronique rasuqam Semiconducteur rasuqam Semiconductors Design and construction Halbleitertechnologie (DE-588)4158814-9 gnd |
| subject_GND | (DE-588)4158814-9 |
| title | The science and engineering of microelectronic fabrication |
| title_auth | The science and engineering of microelectronic fabrication |
| title_exact_search | The science and engineering of microelectronic fabrication |
| title_full | The science and engineering of microelectronic fabrication Stephen A. Campbell |
| title_fullStr | The science and engineering of microelectronic fabrication Stephen A. Campbell |
| title_full_unstemmed | The science and engineering of microelectronic fabrication Stephen A. Campbell |
| title_new | Campbell, Stephen A. Fabrication engineering at the micro- and nanoscale |
| title_short | The science and engineering of microelectronic fabrication |
| title_sort | the science and engineering of microelectronic fabrication |
| topic | Microfabrication rasuqam Microélectronique rasuqam Semiconducteur rasuqam Semiconductors Design and construction Halbleitertechnologie (DE-588)4158814-9 gnd |
| topic_facet | Microfabrication Microélectronique Semiconducteur Semiconductors Design and construction Halbleitertechnologie |
| work_keys_str_mv | AT campbellstephena thescienceandengineeringofmicroelectronicfabrication |