The science and engineering of microelectronic fabrication:
Gespeichert in:
| Späterer Titel: | Campbell, Stephen A. Fabrication engineering at the micro- and nanoscale |
|---|---|
| 1. Verfasser: | |
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
New York [u.a.]
Oxford Univ. Press
2001
|
| Ausgabe: | 2. ed. |
| Schriftenreihe: | The Oxford series in electrical and computer engineering
|
| Schlagworte: | |
| Beschreibung: | XIV, 603 S. Ill., graph. Darst. |
| ISBN: | 0195136055 |
Internformat
MARC
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| 245 | 1 | 0 | |a The science and engineering of microelectronic fabrication |c Stephen A. Campbell |
| 250 | |a 2. ed. | ||
| 264 | 1 | |a New York [u.a.] |b Oxford Univ. Press |c 2001 | |
| 300 | |a XIV, 603 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
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| 490 | 0 | |a The Oxford series in electrical and computer engineering | |
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Datensatz im Suchindex
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|---|---|
| any_adam_object | |
| author | Campbell, Stephen A. |
| author_facet | Campbell, Stephen A. |
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| callnumber-label | TK7871 |
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| callnumber-search | TK7871.85 |
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| callnumber-subject | TK - Electrical and Nuclear Engineering |
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| ctrlnum | (OCoLC)45209102 (DE-599)BVBBV013957020 |
| dewey-full | 621.3815/2 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/2 |
| dewey-search | 621.3815/2 |
| dewey-sort | 3621.3815 12 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | 2. ed. |
| format | Book |
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| id | DE-604.BV013957020 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:55:05Z |
| institution | BVB |
| isbn | 0195136055 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009551690 |
| oclc_num | 45209102 |
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| physical | XIV, 603 S. Ill., graph. Darst. |
| publishDate | 2001 |
| publishDateSearch | 2001 |
| publishDateSort | 2001 |
| publisher | Oxford Univ. Press |
| record_format | marc |
| series2 | The Oxford series in electrical and computer engineering |
| spelling | Campbell, Stephen A. Verfasser aut The science and engineering of microelectronic fabrication Stephen A. Campbell 2. ed. New York [u.a.] Oxford Univ. Press 2001 XIV, 603 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier The Oxford series in electrical and computer engineering Microfabrication rasuqam Microélectronique rasuqam Semiconducteur rasuqam Semiconductors Design and construction Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 s DE-604 Spätere Aufl. u.d.T. Campbell, Stephen A. Fabrication engineering at the micro- and nanoscale |
| spellingShingle | Campbell, Stephen A. The science and engineering of microelectronic fabrication Microfabrication rasuqam Microélectronique rasuqam Semiconducteur rasuqam Semiconductors Design and construction Halbleitertechnologie (DE-588)4158814-9 gnd |
| subject_GND | (DE-588)4158814-9 |
| title | The science and engineering of microelectronic fabrication |
| title_auth | The science and engineering of microelectronic fabrication |
| title_exact_search | The science and engineering of microelectronic fabrication |
| title_full | The science and engineering of microelectronic fabrication Stephen A. Campbell |
| title_fullStr | The science and engineering of microelectronic fabrication Stephen A. Campbell |
| title_full_unstemmed | The science and engineering of microelectronic fabrication Stephen A. Campbell |
| title_new | Campbell, Stephen A. Fabrication engineering at the micro- and nanoscale |
| title_short | The science and engineering of microelectronic fabrication |
| title_sort | the science and engineering of microelectronic fabrication |
| topic | Microfabrication rasuqam Microélectronique rasuqam Semiconducteur rasuqam Semiconductors Design and construction Halbleitertechnologie (DE-588)4158814-9 gnd |
| topic_facet | Microfabrication Microélectronique Semiconducteur Semiconductors Design and construction Halbleitertechnologie |
| work_keys_str_mv | AT campbellstephena thescienceandengineeringofmicroelectronicfabrication |