Si front end processing - physics and technology of dopant defect interactions II: symposium held April 24 - 27, 2000, San Francisco, California, U.S.A.
Gespeichert in:
| Weitere Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Warrendale, Pa.
MRS
2001
|
| Schriftenreihe: | Materials Research Society symposia proceedings
610 |
| Schlagworte: | |
| Beschreibung: | Getr. Zählung Ill., graph. Darst. |
| ISBN: | 1558995188 |
Internformat
MARC
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| 245 | 1 | 0 | |a Si front end processing - physics and technology of dopant defect interactions II |b symposium held April 24 - 27, 2000, San Francisco, California, U.S.A. |c ed.: Aditya Agarwal ... |
| 264 | 1 | |a Warrendale, Pa. |b MRS |c 2001 | |
| 300 | |a Getr. Zählung |b Ill., graph. Darst. | ||
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| 490 | 1 | |a Materials Research Society symposia proceedings |v 610 | |
| 650 | 4 | |a Semiconductor doping |v Congresses | |
| 650 | 4 | |a Semiconductors |x Defects |v Congresses | |
| 650 | 4 | |a Semiconductors |x Design and construction |v Congresses | |
| 650 | 4 | |a Silicon |v Congresses | |
| 650 | 0 | 7 | |a Gitterbaufehler |0 (DE-588)4125030-8 |2 gnd |9 rswk-swf |
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| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 2000 |z San Francisco Calif. |2 gnd-content | |
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Datensatz im Suchindex
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| id | DE-604.BV013945250 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:54:51Z |
| institution | BVB |
| isbn | 1558995188 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009542063 |
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| physical | Getr. Zählung Ill., graph. Darst. |
| publishDate | 2001 |
| publishDateSearch | 2001 |
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| publisher | MRS |
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| series | Materials Research Society symposia proceedings |
| series2 | Materials Research Society symposia proceedings |
| spelling | Si front end processing - physics and technology of dopant defect interactions II symposium held April 24 - 27, 2000, San Francisco, California, U.S.A. ed.: Aditya Agarwal ... Warrendale, Pa. MRS 2001 Getr. Zählung Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials Research Society symposia proceedings 610 Semiconductor doping Congresses Semiconductors Defects Congresses Semiconductors Design and construction Congresses Silicon Congresses Gitterbaufehler (DE-588)4125030-8 gnd rswk-swf Siliciumhalbleiter (DE-588)4274465-9 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2000 San Francisco Calif. gnd-content Siliciumhalbleiter (DE-588)4274465-9 s Gitterbaufehler (DE-588)4125030-8 s DE-604 Agarwal, Aditya edt Materials Research Society symposia proceedings 610 (DE-604)BV001899105 610 |
| spellingShingle | Si front end processing - physics and technology of dopant defect interactions II symposium held April 24 - 27, 2000, San Francisco, California, U.S.A. Materials Research Society symposia proceedings Semiconductor doping Congresses Semiconductors Defects Congresses Semiconductors Design and construction Congresses Silicon Congresses Gitterbaufehler (DE-588)4125030-8 gnd Siliciumhalbleiter (DE-588)4274465-9 gnd |
| subject_GND | (DE-588)4125030-8 (DE-588)4274465-9 (DE-588)1071861417 |
| title | Si front end processing - physics and technology of dopant defect interactions II symposium held April 24 - 27, 2000, San Francisco, California, U.S.A. |
| title_auth | Si front end processing - physics and technology of dopant defect interactions II symposium held April 24 - 27, 2000, San Francisco, California, U.S.A. |
| title_exact_search | Si front end processing - physics and technology of dopant defect interactions II symposium held April 24 - 27, 2000, San Francisco, California, U.S.A. |
| title_full | Si front end processing - physics and technology of dopant defect interactions II symposium held April 24 - 27, 2000, San Francisco, California, U.S.A. ed.: Aditya Agarwal ... |
| title_fullStr | Si front end processing - physics and technology of dopant defect interactions II symposium held April 24 - 27, 2000, San Francisco, California, U.S.A. ed.: Aditya Agarwal ... |
| title_full_unstemmed | Si front end processing - physics and technology of dopant defect interactions II symposium held April 24 - 27, 2000, San Francisco, California, U.S.A. ed.: Aditya Agarwal ... |
| title_short | Si front end processing - physics and technology of dopant defect interactions II |
| title_sort | si front end processing physics and technology of dopant defect interactions ii symposium held april 24 27 2000 san francisco california u s a |
| title_sub | symposium held April 24 - 27, 2000, San Francisco, California, U.S.A. |
| topic | Semiconductor doping Congresses Semiconductors Defects Congresses Semiconductors Design and construction Congresses Silicon Congresses Gitterbaufehler (DE-588)4125030-8 gnd Siliciumhalbleiter (DE-588)4274465-9 gnd |
| topic_facet | Semiconductor doping Congresses Semiconductors Defects Congresses Semiconductors Design and construction Congresses Silicon Congresses Gitterbaufehler Siliciumhalbleiter Konferenzschrift 2000 San Francisco Calif. |
| volume_link | (DE-604)BV001899105 |
| work_keys_str_mv | AT agarwaladitya sifrontendprocessingphysicsandtechnologyofdopantdefectinteractionsiisymposiumheldapril24272000sanfranciscocaliforniausa |