Papers presented at the European Materials Research Society 1999 Spring Meeting, Symposium L: Ab Initio Approaches to Microelectronics Materials and Process Modelling: [June 1 - 4, 1999; Strasbourg, France]
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
Oxford
Pergamon
2000
|
| Schriftenreihe: | Materials science in semiconductor processing
3,1/2 |
| Schlagworte: | |
| Beschreibung: | Einzelaufnahme eines Zeitschr.-H. |
| Beschreibung: | 155 S. Ill., graph. Darst. |
Internformat
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV013891166 | ||
| 003 | DE-604 | ||
| 005 | 20010905 | ||
| 007 | t | ||
| 008 | 010904s2000 ad|| |||| 10||| eng d | ||
| 035 | |a (OCoLC)247941819 | ||
| 035 | |a (DE-599)BVBBV013891166 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-91 |a DE-706 | ||
| 084 | |a ELT 060f |2 stub | ||
| 111 | 2 | |a Symposium Ab Initio Approaches to Microelectronics Materials and Process Modelling |d 1999 |c Straßburg |j Verfasser |0 (DE-588)5515183-8 |4 aut | |
| 245 | 1 | 0 | |a Papers presented at the European Materials Research Society 1999 Spring Meeting, Symposium L: Ab Initio Approaches to Microelectronics Materials and Process Modelling |b [June 1 - 4, 1999; Strasbourg, France] |c guest eds.: J. C. Greer ... |
| 264 | 1 | |a Oxford |b Pergamon |c 2000 | |
| 300 | |a 155 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Materials science in semiconductor processing |v 3,1/2 | |
| 500 | |a Einzelaufnahme eines Zeitschr.-H. | ||
| 650 | 0 | 7 | |a Werkstoff |0 (DE-588)4065579-9 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Mikroelektronik |0 (DE-588)4039207-7 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1999 |z Strassburg |2 gnd-content | |
| 689 | 0 | 0 | |a Mikroelektronik |0 (DE-588)4039207-7 |D s |
| 689 | 0 | 1 | |a Werkstoff |0 (DE-588)4065579-9 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Greer, Jim C. |e Sonstige |4 oth | |
| 710 | 2 | |a European Materials Research Society |e Sonstige |0 (DE-588)5000064-0 |4 oth | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-009504410 | ||
Datensatz im Suchindex
| _version_ | 1804128731750465536 |
|---|---|
| any_adam_object | |
| author_corporate | Symposium Ab Initio Approaches to Microelectronics Materials and Process Modelling Straßburg |
| author_corporate_role | aut |
| author_facet | Symposium Ab Initio Approaches to Microelectronics Materials and Process Modelling Straßburg |
| author_sort | Symposium Ab Initio Approaches to Microelectronics Materials and Process Modelling Straßburg |
| building | Verbundindex |
| bvnumber | BV013891166 |
| classification_tum | ELT 060f |
| ctrlnum | (OCoLC)247941819 (DE-599)BVBBV013891166 |
| discipline | Elektrotechnik |
| format | Conference Proceeding Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01569nam a2200373 cb4500</leader><controlfield tag="001">BV013891166</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20010905 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">010904s2000 ad|| |||| 10||| eng d</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)247941819</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV013891166</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-91</subfield><subfield code="a">DE-706</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ELT 060f</subfield><subfield code="2">stub</subfield></datafield><datafield tag="111" ind1="2" ind2=" "><subfield code="a">Symposium Ab Initio Approaches to Microelectronics Materials and Process Modelling</subfield><subfield code="d">1999</subfield><subfield code="c">Straßburg</subfield><subfield code="j">Verfasser</subfield><subfield code="0">(DE-588)5515183-8</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Papers presented at the European Materials Research Society 1999 Spring Meeting, Symposium L: Ab Initio Approaches to Microelectronics Materials and Process Modelling</subfield><subfield code="b">[June 1 - 4, 1999; Strasbourg, France]</subfield><subfield code="c">guest eds.: J. C. Greer ...</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Oxford</subfield><subfield code="b">Pergamon</subfield><subfield code="c">2000</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">155 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Materials science in semiconductor processing</subfield><subfield code="v">3,1/2</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Einzelaufnahme eines Zeitschr.-H.</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Werkstoff</subfield><subfield code="0">(DE-588)4065579-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Mikroelektronik</subfield><subfield code="0">(DE-588)4039207-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="y">1999</subfield><subfield code="z">Strassburg</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Mikroelektronik</subfield><subfield code="0">(DE-588)4039207-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Werkstoff</subfield><subfield code="0">(DE-588)4065579-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Greer, Jim C.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="710" ind1="2" ind2=" "><subfield code="a">European Materials Research Society</subfield><subfield code="e">Sonstige</subfield><subfield code="0">(DE-588)5000064-0</subfield><subfield code="4">oth</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-009504410</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift 1999 Strassburg gnd-content |
| genre_facet | Konferenzschrift 1999 Strassburg |
| id | DE-604.BV013891166 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:53:54Z |
| institution | BVB |
| institution_GND | (DE-588)5515183-8 (DE-588)5000064-0 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009504410 |
| oclc_num | 247941819 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM DE-706 |
| owner_facet | DE-91 DE-BY-TUM DE-706 |
| physical | 155 S. Ill., graph. Darst. |
| publishDate | 2000 |
| publishDateSearch | 2000 |
| publishDateSort | 2000 |
| publisher | Pergamon |
| record_format | marc |
| series2 | Materials science in semiconductor processing |
| spelling | Symposium Ab Initio Approaches to Microelectronics Materials and Process Modelling 1999 Straßburg Verfasser (DE-588)5515183-8 aut Papers presented at the European Materials Research Society 1999 Spring Meeting, Symposium L: Ab Initio Approaches to Microelectronics Materials and Process Modelling [June 1 - 4, 1999; Strasbourg, France] guest eds.: J. C. Greer ... Oxford Pergamon 2000 155 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials science in semiconductor processing 3,1/2 Einzelaufnahme eines Zeitschr.-H. Werkstoff (DE-588)4065579-9 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1999 Strassburg gnd-content Mikroelektronik (DE-588)4039207-7 s Werkstoff (DE-588)4065579-9 s DE-604 Greer, Jim C. Sonstige oth European Materials Research Society Sonstige (DE-588)5000064-0 oth |
| spellingShingle | Papers presented at the European Materials Research Society 1999 Spring Meeting, Symposium L: Ab Initio Approaches to Microelectronics Materials and Process Modelling [June 1 - 4, 1999; Strasbourg, France] Werkstoff (DE-588)4065579-9 gnd Mikroelektronik (DE-588)4039207-7 gnd |
| subject_GND | (DE-588)4065579-9 (DE-588)4039207-7 (DE-588)1071861417 |
| title | Papers presented at the European Materials Research Society 1999 Spring Meeting, Symposium L: Ab Initio Approaches to Microelectronics Materials and Process Modelling [June 1 - 4, 1999; Strasbourg, France] |
| title_auth | Papers presented at the European Materials Research Society 1999 Spring Meeting, Symposium L: Ab Initio Approaches to Microelectronics Materials and Process Modelling [June 1 - 4, 1999; Strasbourg, France] |
| title_exact_search | Papers presented at the European Materials Research Society 1999 Spring Meeting, Symposium L: Ab Initio Approaches to Microelectronics Materials and Process Modelling [June 1 - 4, 1999; Strasbourg, France] |
| title_full | Papers presented at the European Materials Research Society 1999 Spring Meeting, Symposium L: Ab Initio Approaches to Microelectronics Materials and Process Modelling [June 1 - 4, 1999; Strasbourg, France] guest eds.: J. C. Greer ... |
| title_fullStr | Papers presented at the European Materials Research Society 1999 Spring Meeting, Symposium L: Ab Initio Approaches to Microelectronics Materials and Process Modelling [June 1 - 4, 1999; Strasbourg, France] guest eds.: J. C. Greer ... |
| title_full_unstemmed | Papers presented at the European Materials Research Society 1999 Spring Meeting, Symposium L: Ab Initio Approaches to Microelectronics Materials and Process Modelling [June 1 - 4, 1999; Strasbourg, France] guest eds.: J. C. Greer ... |
| title_short | Papers presented at the European Materials Research Society 1999 Spring Meeting, Symposium L: Ab Initio Approaches to Microelectronics Materials and Process Modelling |
| title_sort | papers presented at the european materials research society 1999 spring meeting symposium l ab initio approaches to microelectronics materials and process modelling june 1 4 1999 strasbourg france |
| title_sub | [June 1 - 4, 1999; Strasbourg, France] |
| topic | Werkstoff (DE-588)4065579-9 gnd Mikroelektronik (DE-588)4039207-7 gnd |
| topic_facet | Werkstoff Mikroelektronik Konferenzschrift 1999 Strassburg |
| work_keys_str_mv | AT symposiumabinitioapproachestomicroelectronicsmaterialsandprocessmodellingstraßburg paperspresentedattheeuropeanmaterialsresearchsociety1999springmeetingsymposiumlabinitioapproachestomicroelectronicsmaterialsandprocessmodellingjune141999strasbourgfrance AT greerjimc paperspresentedattheeuropeanmaterialsresearchsociety1999springmeetingsymposiumlabinitioapproachestomicroelectronicsmaterialsandprocessmodellingjune141999strasbourgfrance AT europeanmaterialsresearchsociety paperspresentedattheeuropeanmaterialsresearchsociety1999springmeetingsymposiumlabinitioapproachestomicroelectronicsmaterialsandprocessmodellingjune141999strasbourgfrance |