Semiconductor manufacturing technology:
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Bibliographic Details
Main Authors: Quirk, Michael (Author), Serda, Julian (Author)
Format: Book
Language:English
Published: Upper Saddle River, NJ [u.a.] Prentice Hall 2001
Subjects:
Physical Description:XIII, 666 S. Ill., graph. Darst.
ISBN:0130815209

There is no print copy available.

Interlibrary loan Place Request Caution: Not in THWS collection!