APA-Zitierstil (7. Ausg.)

(1999). In-line methods and monitors for process and yield improvement: 22 - 23 September 1999, Santa Clara, California. SPIE.

Chicago-Zitierstil (17. Ausg.)

In-line Methods and Monitors for Process and Yield Improvement: 22 - 23 September 1999, Santa Clara, California. Bellingham, Wash: SPIE, 1999.

MLA-Zitierstil (9. Ausg.)

In-line Methods and Monitors for Process and Yield Improvement: 22 - 23 September 1999, Santa Clara, California. SPIE, 1999.