In-line methods and monitors for process and yield improvement: 22 - 23 September 1999, Santa Clara, California
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Bellingham, Wash.
SPIE
1999
|
| Schriftenreihe: | Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers
3884 |
| Schlagworte: | |
| Beschreibung: | IX, 334 S. Ill., graph. Darst. |
| ISBN: | 0819434817 |
Internformat
MARC
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| 245 | 1 | 0 | |a In-line methods and monitors for process and yield improvement |b 22 - 23 September 1999, Santa Clara, California |c Sergio Ajuria ... chairs/ed. |
| 264 | 1 | |a Bellingham, Wash. |b SPIE |c 1999 | |
| 300 | |a IX, 334 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
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| 490 | 1 | |a Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers |v 3884 | |
| 650 | 4 | |a Integrated circuits |x Design and construction |v Congresses | |
| 650 | 4 | |a Manufacturing processes |v Congresses | |
| 650 | 4 | |a Optical pattern recognition |x Industrial applications |v Congresses | |
| 650 | 4 | |a Semiconductors |x Design and construction |v Congresses | |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |2 gnd-content | |
| 700 | 1 | |a Ajuria, Sergio |e Sonstige |4 oth | |
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Datensatz im Suchindex
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| dewey-search | 621.3815/2 |
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| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik Mess-/Steuerungs-/Regelungs-/Automatisierungstechnik / Mechatronik |
| format | Book |
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| genre | (DE-588)1071861417 Konferenzschrift gnd-content |
| genre_facet | Konferenzschrift |
| id | DE-604.BV013882622 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:53:44Z |
| institution | BVB |
| isbn | 0819434817 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009497615 |
| oclc_num | 42795184 |
| open_access_boolean | |
| owner | DE-83 |
| owner_facet | DE-83 |
| physical | IX, 334 S. Ill., graph. Darst. |
| publishDate | 1999 |
| publishDateSearch | 1999 |
| publishDateSort | 1999 |
| publisher | SPIE |
| record_format | marc |
| series2 | Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers |
| spelling | In-line methods and monitors for process and yield improvement 22 - 23 September 1999, Santa Clara, California Sergio Ajuria ... chairs/ed. Bellingham, Wash. SPIE 1999 IX, 334 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers 3884 Integrated circuits Design and construction Congresses Manufacturing processes Congresses Optical pattern recognition Industrial applications Congresses Semiconductors Design and construction Congresses (DE-588)1071861417 Konferenzschrift gnd-content Ajuria, Sergio Sonstige oth Society of Photo-Optical Instrumentation Engineers Proceedings of SPIE 3884 (DE-604)BV000010887 3884 |
| spellingShingle | In-line methods and monitors for process and yield improvement 22 - 23 September 1999, Santa Clara, California Integrated circuits Design and construction Congresses Manufacturing processes Congresses Optical pattern recognition Industrial applications Congresses Semiconductors Design and construction Congresses |
| subject_GND | (DE-588)1071861417 |
| title | In-line methods and monitors for process and yield improvement 22 - 23 September 1999, Santa Clara, California |
| title_auth | In-line methods and monitors for process and yield improvement 22 - 23 September 1999, Santa Clara, California |
| title_exact_search | In-line methods and monitors for process and yield improvement 22 - 23 September 1999, Santa Clara, California |
| title_full | In-line methods and monitors for process and yield improvement 22 - 23 September 1999, Santa Clara, California Sergio Ajuria ... chairs/ed. |
| title_fullStr | In-line methods and monitors for process and yield improvement 22 - 23 September 1999, Santa Clara, California Sergio Ajuria ... chairs/ed. |
| title_full_unstemmed | In-line methods and monitors for process and yield improvement 22 - 23 September 1999, Santa Clara, California Sergio Ajuria ... chairs/ed. |
| title_short | In-line methods and monitors for process and yield improvement |
| title_sort | in line methods and monitors for process and yield improvement 22 23 september 1999 santa clara california |
| title_sub | 22 - 23 September 1999, Santa Clara, California |
| topic | Integrated circuits Design and construction Congresses Manufacturing processes Congresses Optical pattern recognition Industrial applications Congresses Semiconductors Design and construction Congresses |
| topic_facet | Integrated circuits Design and construction Congresses Manufacturing processes Congresses Optical pattern recognition Industrial applications Congresses Semiconductors Design and construction Congresses Konferenzschrift |
| volume_link | (DE-604)BV000010887 |
| work_keys_str_mv | AT ajuriasergio inlinemethodsandmonitorsforprocessandyieldimprovement2223september1999santaclaracalifornia |