Electronics and structures for MEMS: 27 - 29 October 1999, Royal Pines Resort, Queensland, Australia
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Bellingham, Wash.
SPIE
1999
|
| Series: | Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers
3891 |
| Subjects: | |
| Physical Description: | VIII, 428 S. Ill., graph. Darst. |
| ISBN: | 0819434922 |
Staff View
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV013882280 | ||
| 003 | DE-604 | ||
| 005 | 20020619 | ||
| 007 | t | ||
| 008 | 010828s1999 ad|| |||| 10||| eng d | ||
| 020 | |a 0819434922 |9 0-8194-3492-2 | ||
| 035 | |a (OCoLC)43167234 | ||
| 035 | |a (DE-599)BVBBV013882280 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-703 | ||
| 050 | 0 | |a TK7875 | |
| 050 | 0 | |a TS510 | |
| 082 | 0 | |a 621.381 |2 21 | |
| 084 | |a ZN 4980 |0 (DE-625)157428: |2 rvk | ||
| 245 | 1 | 0 | |a Electronics and structures for MEMS |b 27 - 29 October 1999, Royal Pines Resort, Queensland, Australia |c Neil W. Bergmann ... chairs/ed. |
| 264 | 1 | |a Bellingham, Wash. |b SPIE |c 1999 | |
| 300 | |a VIII, 428 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers |v 3891 | |
| 650 | 4 | |a Microelectromechanical systems |v Congresses | |
| 650 | 4 | |a Microelectronics |v Congresses | |
| 650 | 4 | |a Smart structures |v Congresses | |
| 650 | 0 | 7 | |a Mikroelektronik |0 (DE-588)4039207-7 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Mikromechanik |0 (DE-588)4205811-9 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1999 |2 gnd-content | |
| 689 | 0 | 0 | |a Mikromechanik |0 (DE-588)4205811-9 |D s |
| 689 | 0 | 1 | |a Mikroelektronik |0 (DE-588)4039207-7 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Bergmann, Neil W. |e Sonstige |4 oth | |
| 810 | 2 | |a Society of Photo-Optical Instrumentation Engineers |t Proceedings of SPIE |v 3891 |w (DE-604)BV000010887 |9 3891 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-009497308 | ||
Record in the Search Index
| _version_ | 1804128720533848064 |
|---|---|
| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV013882280 |
| callnumber-first | T - Technology |
| callnumber-label | TK7875 |
| callnumber-raw | TK7875 TS510 |
| callnumber-search | TK7875 TS510 |
| callnumber-sort | TK 47875 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | ZN 4980 |
| ctrlnum | (OCoLC)43167234 (DE-599)BVBBV013882280 |
| dewey-full | 621.381 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381 |
| dewey-search | 621.381 |
| dewey-sort | 3621.381 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01610nam a2200433 cb4500</leader><controlfield tag="001">BV013882280</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20020619 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">010828s1999 ad|| |||| 10||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0819434922</subfield><subfield code="9">0-8194-3492-2</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)43167234</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV013882280</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-703</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TK7875</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TS510</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.381</subfield><subfield code="2">21</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 4980</subfield><subfield code="0">(DE-625)157428:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Electronics and structures for MEMS</subfield><subfield code="b">27 - 29 October 1999, Royal Pines Resort, Queensland, Australia</subfield><subfield code="c">Neil W. Bergmann ... chairs/ed.</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Bellingham, Wash.</subfield><subfield code="b">SPIE</subfield><subfield code="c">1999</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">VIII, 428 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers</subfield><subfield code="v">3891</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microelectromechanical systems</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microelectronics</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Smart structures</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Mikroelektronik</subfield><subfield code="0">(DE-588)4039207-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Mikromechanik</subfield><subfield code="0">(DE-588)4205811-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="y">1999</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Mikromechanik</subfield><subfield code="0">(DE-588)4205811-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Mikroelektronik</subfield><subfield code="0">(DE-588)4039207-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Bergmann, Neil W.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="810" ind1="2" ind2=" "><subfield code="a">Society of Photo-Optical Instrumentation Engineers</subfield><subfield code="t">Proceedings of SPIE</subfield><subfield code="v">3891</subfield><subfield code="w">(DE-604)BV000010887</subfield><subfield code="9">3891</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-009497308</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift 1999 gnd-content |
| genre_facet | Konferenzschrift 1999 |
| id | DE-604.BV013882280 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:53:44Z |
| institution | BVB |
| isbn | 0819434922 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009497308 |
| oclc_num | 43167234 |
| open_access_boolean | |
| owner | DE-703 |
| owner_facet | DE-703 |
| physical | VIII, 428 S. Ill., graph. Darst. |
| publishDate | 1999 |
| publishDateSearch | 1999 |
| publishDateSort | 1999 |
| publisher | SPIE |
| record_format | marc |
| series2 | Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers |
| spelling | Electronics and structures for MEMS 27 - 29 October 1999, Royal Pines Resort, Queensland, Australia Neil W. Bergmann ... chairs/ed. Bellingham, Wash. SPIE 1999 VIII, 428 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers 3891 Microelectromechanical systems Congresses Microelectronics Congresses Smart structures Congresses Mikroelektronik (DE-588)4039207-7 gnd rswk-swf Mikromechanik (DE-588)4205811-9 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1999 gnd-content Mikromechanik (DE-588)4205811-9 s Mikroelektronik (DE-588)4039207-7 s DE-604 Bergmann, Neil W. Sonstige oth Society of Photo-Optical Instrumentation Engineers Proceedings of SPIE 3891 (DE-604)BV000010887 3891 |
| spellingShingle | Electronics and structures for MEMS 27 - 29 October 1999, Royal Pines Resort, Queensland, Australia Microelectromechanical systems Congresses Microelectronics Congresses Smart structures Congresses Mikroelektronik (DE-588)4039207-7 gnd Mikromechanik (DE-588)4205811-9 gnd |
| subject_GND | (DE-588)4039207-7 (DE-588)4205811-9 (DE-588)1071861417 |
| title | Electronics and structures for MEMS 27 - 29 October 1999, Royal Pines Resort, Queensland, Australia |
| title_auth | Electronics and structures for MEMS 27 - 29 October 1999, Royal Pines Resort, Queensland, Australia |
| title_exact_search | Electronics and structures for MEMS 27 - 29 October 1999, Royal Pines Resort, Queensland, Australia |
| title_full | Electronics and structures for MEMS 27 - 29 October 1999, Royal Pines Resort, Queensland, Australia Neil W. Bergmann ... chairs/ed. |
| title_fullStr | Electronics and structures for MEMS 27 - 29 October 1999, Royal Pines Resort, Queensland, Australia Neil W. Bergmann ... chairs/ed. |
| title_full_unstemmed | Electronics and structures for MEMS 27 - 29 October 1999, Royal Pines Resort, Queensland, Australia Neil W. Bergmann ... chairs/ed. |
| title_short | Electronics and structures for MEMS |
| title_sort | electronics and structures for mems 27 29 october 1999 royal pines resort queensland australia |
| title_sub | 27 - 29 October 1999, Royal Pines Resort, Queensland, Australia |
| topic | Microelectromechanical systems Congresses Microelectronics Congresses Smart structures Congresses Mikroelektronik (DE-588)4039207-7 gnd Mikromechanik (DE-588)4205811-9 gnd |
| topic_facet | Microelectromechanical systems Congresses Microelectronics Congresses Smart structures Congresses Mikroelektronik Mikromechanik Konferenzschrift 1999 |
| volume_link | (DE-604)BV000010887 |
| work_keys_str_mv | AT bergmannneilw electronicsandstructuresformems2729october1999royalpinesresortqueenslandaustralia |