Electronics and structures for MEMS: 27 - 29 October 1999, Royal Pines Resort, Queensland, Australia
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Bellingham, Wash.
SPIE
1999
|
| Schriftenreihe: | Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers
3891 |
| Schlagworte: | |
| Beschreibung: | VIII, 428 S. Ill., graph. Darst. |
| ISBN: | 0819434922 |
Internformat
MARC
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| 300 | |a VIII, 428 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
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| 490 | 1 | |a Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers |v 3891 | |
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Datensatz im Suchindex
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| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
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| genre | (DE-588)1071861417 Konferenzschrift 1999 gnd-content |
| genre_facet | Konferenzschrift 1999 |
| id | DE-604.BV013882280 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:53:44Z |
| institution | BVB |
| isbn | 0819434922 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009497308 |
| oclc_num | 43167234 |
| open_access_boolean | |
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| owner_facet | DE-703 |
| physical | VIII, 428 S. Ill., graph. Darst. |
| publishDate | 1999 |
| publishDateSearch | 1999 |
| publishDateSort | 1999 |
| publisher | SPIE |
| record_format | marc |
| series2 | Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers |
| spelling | Electronics and structures for MEMS 27 - 29 October 1999, Royal Pines Resort, Queensland, Australia Neil W. Bergmann ... chairs/ed. Bellingham, Wash. SPIE 1999 VIII, 428 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers 3891 Microelectromechanical systems Congresses Microelectronics Congresses Smart structures Congresses Mikroelektronik (DE-588)4039207-7 gnd rswk-swf Mikromechanik (DE-588)4205811-9 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1999 gnd-content Mikromechanik (DE-588)4205811-9 s Mikroelektronik (DE-588)4039207-7 s DE-604 Bergmann, Neil W. Sonstige oth Society of Photo-Optical Instrumentation Engineers Proceedings of SPIE 3891 (DE-604)BV000010887 3891 |
| spellingShingle | Electronics and structures for MEMS 27 - 29 October 1999, Royal Pines Resort, Queensland, Australia Microelectromechanical systems Congresses Microelectronics Congresses Smart structures Congresses Mikroelektronik (DE-588)4039207-7 gnd Mikromechanik (DE-588)4205811-9 gnd |
| subject_GND | (DE-588)4039207-7 (DE-588)4205811-9 (DE-588)1071861417 |
| title | Electronics and structures for MEMS 27 - 29 October 1999, Royal Pines Resort, Queensland, Australia |
| title_auth | Electronics and structures for MEMS 27 - 29 October 1999, Royal Pines Resort, Queensland, Australia |
| title_exact_search | Electronics and structures for MEMS 27 - 29 October 1999, Royal Pines Resort, Queensland, Australia |
| title_full | Electronics and structures for MEMS 27 - 29 October 1999, Royal Pines Resort, Queensland, Australia Neil W. Bergmann ... chairs/ed. |
| title_fullStr | Electronics and structures for MEMS 27 - 29 October 1999, Royal Pines Resort, Queensland, Australia Neil W. Bergmann ... chairs/ed. |
| title_full_unstemmed | Electronics and structures for MEMS 27 - 29 October 1999, Royal Pines Resort, Queensland, Australia Neil W. Bergmann ... chairs/ed. |
| title_short | Electronics and structures for MEMS |
| title_sort | electronics and structures for mems 27 29 october 1999 royal pines resort queensland australia |
| title_sub | 27 - 29 October 1999, Royal Pines Resort, Queensland, Australia |
| topic | Microelectromechanical systems Congresses Microelectronics Congresses Smart structures Congresses Mikroelektronik (DE-588)4039207-7 gnd Mikromechanik (DE-588)4205811-9 gnd |
| topic_facet | Microelectromechanical systems Congresses Microelectronics Congresses Smart structures Congresses Mikroelektronik Mikromechanik Konferenzschrift 1999 |
| volume_link | (DE-604)BV000010887 |
| work_keys_str_mv | AT bergmannneilw electronicsandstructuresformems2729october1999royalpinesresortqueenslandaustralia |