Design, test, and microfabrication of MEMS and MOEMS: 30 March - 1 April 1999, Paris, France
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Bellingham, Wash.
SPIE
|
| Schriftenreihe: | Proceedings of SPIE
3680 |
| Schlagworte: | |
| ISBN: | 0819431540 |
Internformat
MARC
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Datensatz im Suchindex
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| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
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| indexdate | 2024-07-09T19:55:50Z |
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| spelling | Design, test, and microfabrication of MEMS and MOEMS 30 March - 1 April 1999, Paris, France Bernard Courtois ... chairs/eds. Bellingham, Wash. SPIE txt rdacontent n rdamedia nc rdacarrier Proceedings of SPIE 3680 Mikroelektronik (DE-588)4039207-7 gnd rswk-swf Mikromechanik (DE-588)4205811-9 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1999 Paris gnd-content Mikromechanik (DE-588)4205811-9 s Mikroelektronik (DE-588)4039207-7 s DE-604 Courtois, Bernard 1777-1838 Sonstige (DE-588)117701254 oth |
| spellingShingle | Design, test, and microfabrication of MEMS and MOEMS 30 March - 1 April 1999, Paris, France Mikroelektronik (DE-588)4039207-7 gnd Mikromechanik (DE-588)4205811-9 gnd |
| subject_GND | (DE-588)4039207-7 (DE-588)4205811-9 (DE-588)1071861417 |
| title | Design, test, and microfabrication of MEMS and MOEMS 30 March - 1 April 1999, Paris, France |
| title_auth | Design, test, and microfabrication of MEMS and MOEMS 30 March - 1 April 1999, Paris, France |
| title_exact_search | Design, test, and microfabrication of MEMS and MOEMS 30 March - 1 April 1999, Paris, France |
| title_full | Design, test, and microfabrication of MEMS and MOEMS 30 March - 1 April 1999, Paris, France Bernard Courtois ... chairs/eds. |
| title_fullStr | Design, test, and microfabrication of MEMS and MOEMS 30 March - 1 April 1999, Paris, France Bernard Courtois ... chairs/eds. |
| title_full_unstemmed | Design, test, and microfabrication of MEMS and MOEMS 30 March - 1 April 1999, Paris, France Bernard Courtois ... chairs/eds. |
| title_short | Design, test, and microfabrication of MEMS and MOEMS |
| title_sort | design test and microfabrication of mems and moems 30 march 1 april 1999 paris france |
| title_sub | 30 March - 1 April 1999, Paris, France |
| topic | Mikroelektronik (DE-588)4039207-7 gnd Mikromechanik (DE-588)4205811-9 gnd |
| topic_facet | Mikroelektronik Mikromechanik Konferenzschrift 1999 Paris |
| work_keys_str_mv | AT courtoisbernard designtestandmicrofabricationofmemsandmoems30march1april1999parisfrance |