Handbook of silicon semiconductor metrology:
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
New York [u.a.]
Dekker
2001
|
| Schlagworte: | |
| Beschreibung: | XVI, 874 S. Ill., graph. Darst. |
| ISBN: | 0824705068 |
Internformat
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV013831107 | ||
| 003 | DE-604 | ||
| 005 | 20070425 | ||
| 007 | t | ||
| 008 | 010724s2001 ad|| |||| 00||| eng d | ||
| 020 | |a 0824705068 |9 0-8247-0506-8 | ||
| 035 | |a (OCoLC)248653472 | ||
| 035 | |a (DE-599)BVBBV013831107 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-703 |a DE-706 |a DE-91 |a DE-634 |a DE-83 | ||
| 050 | 0 | |a TK7871.85 | |
| 082 | 0 | |a 621.3815/2 |2 21 | |
| 084 | |a ZN 4100 |0 (DE-625)157351: |2 rvk | ||
| 084 | |a ZN 4800 |0 (DE-625)157408: |2 rvk | ||
| 084 | |a MSR 055f |2 stub | ||
| 084 | |a ELT 299f |2 stub | ||
| 245 | 1 | 0 | |a Handbook of silicon semiconductor metrology |c ed. by Alain C. Diebold |
| 264 | 1 | |a New York [u.a.] |b Dekker |c 2001 | |
| 300 | |a XVI, 874 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 650 | 4 | |a Semiconducteurs - Inspection | |
| 650 | 4 | |a Semiconducteurs - Mesure | |
| 650 | 4 | |a Semiconductors |x Inspection | |
| 650 | 4 | |a Semiconductors |x Measurement | |
| 650 | 0 | 7 | |a Silicium |0 (DE-588)4077445-4 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Metrologie |0 (DE-588)4169749-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Halbleitertechnologie |0 (DE-588)4158814-9 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Silicium |0 (DE-588)4077445-4 |D s |
| 689 | 0 | 1 | |a Halbleitertechnologie |0 (DE-588)4158814-9 |D s |
| 689 | 0 | 2 | |a Metrologie |0 (DE-588)4169749-2 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Diebold, Alain C. |e Sonstige |4 oth | |
| 943 | 1 | |a oai:aleph.bib-bvb.de:BVB01-009459724 | |
Datensatz im Suchindex
| _version_ | 1809403458343665664 |
|---|---|
| adam_text | |
| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV013831107 |
| callnumber-first | T - Technology |
| callnumber-label | TK7871 |
| callnumber-raw | TK7871.85 |
| callnumber-search | TK7871.85 |
| callnumber-sort | TK 47871.85 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | ZN 4100 ZN 4800 |
| classification_tum | MSR 055f ELT 299f |
| ctrlnum | (OCoLC)248653472 (DE-599)BVBBV013831107 |
| dewey-full | 621.3815/2 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/2 |
| dewey-search | 621.3815/2 |
| dewey-sort | 3621.3815 12 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik Mess-/Steuerungs-/Regelungs-/Automatisierungstechnik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>00000nam a2200000 c 4500</leader><controlfield tag="001">BV013831107</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20070425</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">010724s2001 ad|| |||| 00||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0824705068</subfield><subfield code="9">0-8247-0506-8</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)248653472</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV013831107</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-703</subfield><subfield code="a">DE-706</subfield><subfield code="a">DE-91</subfield><subfield code="a">DE-634</subfield><subfield code="a">DE-83</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TK7871.85</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.3815/2</subfield><subfield code="2">21</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 4100</subfield><subfield code="0">(DE-625)157351:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 4800</subfield><subfield code="0">(DE-625)157408:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">MSR 055f</subfield><subfield code="2">stub</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ELT 299f</subfield><subfield code="2">stub</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Handbook of silicon semiconductor metrology</subfield><subfield code="c">ed. by Alain C. Diebold</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">New York [u.a.]</subfield><subfield code="b">Dekker</subfield><subfield code="c">2001</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XVI, 874 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconducteurs - Inspection</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconducteurs - Mesure</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconductors</subfield><subfield code="x">Inspection</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconductors</subfield><subfield code="x">Measurement</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Silicium</subfield><subfield code="0">(DE-588)4077445-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Metrologie</subfield><subfield code="0">(DE-588)4169749-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleitertechnologie</subfield><subfield code="0">(DE-588)4158814-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Silicium</subfield><subfield code="0">(DE-588)4077445-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Halbleitertechnologie</subfield><subfield code="0">(DE-588)4158814-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">Metrologie</subfield><subfield code="0">(DE-588)4169749-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Diebold, Alain C.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="943" ind1="1" ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-009459724</subfield></datafield></record></collection> |
| id | DE-604.BV013831107 |
| illustrated | Illustrated |
| indexdate | 2024-09-06T00:13:26Z |
| institution | BVB |
| isbn | 0824705068 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009459724 |
| oclc_num | 248653472 |
| open_access_boolean | |
| owner | DE-703 DE-706 DE-91 DE-BY-TUM DE-634 DE-83 |
| owner_facet | DE-703 DE-706 DE-91 DE-BY-TUM DE-634 DE-83 |
| physical | XVI, 874 S. Ill., graph. Darst. |
| publishDate | 2001 |
| publishDateSearch | 2001 |
| publishDateSort | 2001 |
| publisher | Dekker |
| record_format | marc |
| spelling | Handbook of silicon semiconductor metrology ed. by Alain C. Diebold New York [u.a.] Dekker 2001 XVI, 874 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Semiconducteurs - Inspection Semiconducteurs - Mesure Semiconductors Inspection Semiconductors Measurement Silicium (DE-588)4077445-4 gnd rswk-swf Metrologie (DE-588)4169749-2 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf Silicium (DE-588)4077445-4 s Halbleitertechnologie (DE-588)4158814-9 s Metrologie (DE-588)4169749-2 s DE-604 Diebold, Alain C. Sonstige oth |
| spellingShingle | Handbook of silicon semiconductor metrology Semiconducteurs - Inspection Semiconducteurs - Mesure Semiconductors Inspection Semiconductors Measurement Silicium (DE-588)4077445-4 gnd Metrologie (DE-588)4169749-2 gnd Halbleitertechnologie (DE-588)4158814-9 gnd |
| subject_GND | (DE-588)4077445-4 (DE-588)4169749-2 (DE-588)4158814-9 |
| title | Handbook of silicon semiconductor metrology |
| title_auth | Handbook of silicon semiconductor metrology |
| title_exact_search | Handbook of silicon semiconductor metrology |
| title_full | Handbook of silicon semiconductor metrology ed. by Alain C. Diebold |
| title_fullStr | Handbook of silicon semiconductor metrology ed. by Alain C. Diebold |
| title_full_unstemmed | Handbook of silicon semiconductor metrology ed. by Alain C. Diebold |
| title_short | Handbook of silicon semiconductor metrology |
| title_sort | handbook of silicon semiconductor metrology |
| topic | Semiconducteurs - Inspection Semiconducteurs - Mesure Semiconductors Inspection Semiconductors Measurement Silicium (DE-588)4077445-4 gnd Metrologie (DE-588)4169749-2 gnd Halbleitertechnologie (DE-588)4158814-9 gnd |
| topic_facet | Semiconducteurs - Inspection Semiconducteurs - Mesure Semiconductors Inspection Semiconductors Measurement Silicium Metrologie Halbleitertechnologie |
| work_keys_str_mv | AT dieboldalainc handbookofsiliconsemiconductormetrology |