Suspension handling system, a micromachined channel network with integrated actuators and sensors:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Aachen
Shaker
2001
|
| Schriftenreihe: | Berichte aus der Mikromechanik
|
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | Zugl.: Zürich, Eidgenössische Techn. Hochsch., Diss., 2001 |
| Beschreibung: | X, 123 S. Ill., graph. Darst. : 21 cm |
| ISBN: | 3826590570 |
Internformat
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV013824477 | ||
| 003 | DE-604 | ||
| 005 | 20020116 | ||
| 007 | t| | ||
| 008 | 010710s2001 gw ad|| m||| 00||| eng d | ||
| 016 | 7 | |a 961892463 |2 DE-101 | |
| 020 | |a 3826590570 |c kart. : sfr 89.00 |9 3-8265-9057-0 | ||
| 035 | |a (OCoLC)50254265 | ||
| 035 | |a (DE-599)BVBBV013824477 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 044 | |a gw |c DE | ||
| 049 | |a DE-703 | ||
| 100 | 1 | |a Bächi, Daniel |d 1971- |e Verfasser |0 (DE-588)123115892 |4 aut | |
| 245 | 1 | 0 | |a Suspension handling system, a micromachined channel network with integrated actuators and sensors |c Daniel Bächi |
| 264 | 1 | |a Aachen |b Shaker |c 2001 | |
| 300 | |a X, 123 S. |b Ill., graph. Darst. : 21 cm | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Berichte aus der Mikromechanik | |
| 500 | |a Zugl.: Zürich, Eidgenössische Techn. Hochsch., Diss., 2001 | ||
| 650 | 0 | 7 | |a Mikrosystemtechnik |0 (DE-588)4221617-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Strömungskanal |0 (DE-588)4183713-7 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Handhabungstechnik |0 (DE-588)4129683-7 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Fluid-Feststoff-System |0 (DE-588)4198003-7 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Ventil |0 (DE-588)4062521-7 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
| 689 | 0 | 0 | |a Fluid-Feststoff-System |0 (DE-588)4198003-7 |D s |
| 689 | 0 | 1 | |a Handhabungstechnik |0 (DE-588)4129683-7 |D s |
| 689 | 0 | 2 | |a Strömungskanal |0 (DE-588)4183713-7 |D s |
| 689 | 0 | 3 | |a Ventil |0 (DE-588)4062521-7 |D s |
| 689 | 0 | 4 | |a Mikrosystemtechnik |0 (DE-588)4221617-5 |D s |
| 689 | 0 | |5 DE-604 | |
| 856 | 4 | 2 | |m DNB Datenaustausch |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009454487&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
| 943 | 1 | |a oai:aleph.bib-bvb.de:BVB01-009454487 | |
Datensatz im Suchindex
| _version_ | 1816444282187284480 |
|---|---|
| adam_text |
TABLE
OF
CONTENTS
TABLE
OF
CONTENTS
.
I
ABSTRACT
.
IV
ZUSAMMENFASSUNG
.
VI
LIST
OF
SYMBOLS
.
VIII
1.
INTRODUCTION
.
1
1.1.
INNOVATION
.
4
1.2.
STATE
OF
THE
ART
.
6
1.3.
OVERVIEW
OF
THESIS
.
7
1.4.
OUTLINE
OF
PROJECT
SUSPENSION
HANDLING
SYSTEM
.
8
2.
THEORETICAL
CONSIDERATIONS
.
11
2.1.
FLUID
FLOW
AND
FLOW
SWITCHING
.
11
2.1.1.
FLUID
FLOW
IN
RECTANGULAR
MICROCHANNELS
.
11
2.1.2.
FLUID
FLOW
SWITCHING
.
15
2.1.3.
FLUID
-
PARTICLE
INTERACTION
.
18
2.2.
MICROVALVES
.
21
2.2.1.
ACTUATION
PRINCIPLES
.
21
2.2.2.
THERMOPNEUMATIC
ACTUATION
.
25
2.2.3.
WATER-COOLING
OF
VALVE
ARRAYS
.
30
2.3.
PARTICLE
DETECTION
.
38
2.3.1.
CCD
CAMERA
WITH
OPTICAL
MICROSCOPE
.
39
2.3.2.
INTEGRATED
PHOTODIODES
.
41
3.
FABRICATION
.
47
3.1.
SYSTEM
WITH
INTEGRATED
THERMOPNEUMATIC
VALVES
.
48
3.1.1.
HEATER
STRUCTURES
.
50
3.1.2.
VALVE
MEMBRANES
.
52
II
3.1.3.
HEATER
CAVITIES
AND
COOLING
CHANNELS
.
56
3.1.4.
CHANNELS
.
57
3.1.5.
ELECTROCHEMICAL
DISCHARGE
MACHINING
OF
GLASS
.
58
3.1.6.
CHIP
BONDING
.
61
3.1.7.
TUBING
.
62
3.1.8.
PACKAGING
AND
WIRE
BONDING
.
63
3.1.9.
CONCLUSIONS
.
63
3.2.
SYSTEM
WITH
WATER
-
COOLING
.
63
3.2.1.
SILICONE
BOND
PROCESS
.
66
3.2.2.
COOLING
CHANNELS
AND
VALVE
CAVITIES
.
67
3.2.3.
SYSTEM
ASSEMBLY
AND
PACKAGING
.
67
3.2.4.
CONCLUSIONS
.
67
3.3.
SYSTEM
WITH
INTEGRATED
PHOTODIODES
.
68
3.3.1.
FABRICATION
OF
PHOTODIODES
.
71
3.3.2.
PHOTOSTRUCTURABLE
GLASS
.
76
3.3.3.
DEEP
REACTIVE
ION
ETCHING
OF
CAVITY
ARRAYS
.
77
3.3.4.
ASSEMBLY
AND
PACKAGING
.
78
3.3.5.
CONCLUSIONS
.
79
4.
ANALYSIS
AND
RESULTS
.
80
4.1.
VALVE
MECHANICS
.
80
4.1.1.
STIFFNESS
OF
VALVE
MEMBRANES
.
81
4.1.2.
PRESSURE
GENERATED
WITH
THE
INTEGRATED
ACTUATION
.
85
4.1.3.
ACTUATION
SPEED
AND
VALVE
MEMBRANE
DEFLECTION
.
86
4.2.
THERMAL
CHARACTERIZATION
.
87
4.2.1.
MEASUREMENT
OF
HEAT
TRANSFER
COEFFICIENT
.
88
4.2.2.
INFRARED
THERMOGRAPHY
.
'.
.
93
4.3.
PARTICLE
DETECTION
.
95
4.3.1.
IMAGE
PROCESSING
.
95
III
4.3.2.
PERFORMANCE
OF
INTEGRATED
PHOTODIODES
.
98
4.4.
SUSPENSION
HANDLING
.
104
4.4.1.
FLOW
SPEED
.
104
4.4.2.
SYSTEM
CONTROL
SETUP
.
105
4.4.3.
FLUIDIC
SWITCHING
.106
5.
CONCLUSIONS
AND
OUTLOOK
.
108
6.
REFERENCES
.
110
7.
APPENDIX
.
120
7.1.
LIGHT
PENETRATION
DEPTH
.120
7.2.
THERMAL
OXIDATION
OF
PHOTODIODES
.
121
7.3.
NUMERICAL
CALCULATION
OF
DOPANT
DIFFUSION
.
121
7.4.
NUMERICAL
CALCULATION
OF
THE
SHEET
RESISTANCE
.
122
8.
CURRICULUM
VITAE
.
123 |
| any_adam_object | 1 |
| author | Bächi, Daniel 1971- |
| author_GND | (DE-588)123115892 |
| author_facet | Bächi, Daniel 1971- |
| author_role | aut |
| author_sort | Bächi, Daniel 1971- |
| author_variant | d b db |
| building | Verbundindex |
| bvnumber | BV013824477 |
| ctrlnum | (OCoLC)50254265 (DE-599)BVBBV013824477 |
| format | Book |
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| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV013824477 |
| illustrated | Illustrated |
| indexdate | 2024-11-22T17:24:17Z |
| institution | BVB |
| isbn | 3826590570 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009454487 |
| oclc_num | 50254265 |
| open_access_boolean | |
| owner | DE-703 |
| owner_facet | DE-703 |
| physical | X, 123 S. Ill., graph. Darst. : 21 cm |
| publishDate | 2001 |
| publishDateSearch | 2001 |
| publishDateSort | 2001 |
| publisher | Shaker |
| record_format | marc |
| series2 | Berichte aus der Mikromechanik |
| spelling | Bächi, Daniel 1971- Verfasser (DE-588)123115892 aut Suspension handling system, a micromachined channel network with integrated actuators and sensors Daniel Bächi Aachen Shaker 2001 X, 123 S. Ill., graph. Darst. : 21 cm txt rdacontent n rdamedia nc rdacarrier Berichte aus der Mikromechanik Zugl.: Zürich, Eidgenössische Techn. Hochsch., Diss., 2001 Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf Strömungskanal (DE-588)4183713-7 gnd rswk-swf Handhabungstechnik (DE-588)4129683-7 gnd rswk-swf Fluid-Feststoff-System (DE-588)4198003-7 gnd rswk-swf Ventil (DE-588)4062521-7 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Fluid-Feststoff-System (DE-588)4198003-7 s Handhabungstechnik (DE-588)4129683-7 s Strömungskanal (DE-588)4183713-7 s Ventil (DE-588)4062521-7 s Mikrosystemtechnik (DE-588)4221617-5 s DE-604 DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009454487&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Bächi, Daniel 1971- Suspension handling system, a micromachined channel network with integrated actuators and sensors Mikrosystemtechnik (DE-588)4221617-5 gnd Strömungskanal (DE-588)4183713-7 gnd Handhabungstechnik (DE-588)4129683-7 gnd Fluid-Feststoff-System (DE-588)4198003-7 gnd Ventil (DE-588)4062521-7 gnd |
| subject_GND | (DE-588)4221617-5 (DE-588)4183713-7 (DE-588)4129683-7 (DE-588)4198003-7 (DE-588)4062521-7 (DE-588)4113937-9 |
| title | Suspension handling system, a micromachined channel network with integrated actuators and sensors |
| title_auth | Suspension handling system, a micromachined channel network with integrated actuators and sensors |
| title_exact_search | Suspension handling system, a micromachined channel network with integrated actuators and sensors |
| title_full | Suspension handling system, a micromachined channel network with integrated actuators and sensors Daniel Bächi |
| title_fullStr | Suspension handling system, a micromachined channel network with integrated actuators and sensors Daniel Bächi |
| title_full_unstemmed | Suspension handling system, a micromachined channel network with integrated actuators and sensors Daniel Bächi |
| title_short | Suspension handling system, a micromachined channel network with integrated actuators and sensors |
| title_sort | suspension handling system a micromachined channel network with integrated actuators and sensors |
| topic | Mikrosystemtechnik (DE-588)4221617-5 gnd Strömungskanal (DE-588)4183713-7 gnd Handhabungstechnik (DE-588)4129683-7 gnd Fluid-Feststoff-System (DE-588)4198003-7 gnd Ventil (DE-588)4062521-7 gnd |
| topic_facet | Mikrosystemtechnik Strömungskanal Handhabungstechnik Fluid-Feststoff-System Ventil Hochschulschrift |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009454487&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT bachidaniel suspensionhandlingsystemamicromachinedchannelnetworkwithintegratedactuatorsandsensors |