Papers from the 13th International Vacuum Microelectronics Conference: 13 - 17 August 2000, Guangzhou, China
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
New York, NY
American Inst. of Physics
2001
|
| Schriftenreihe: | Journal of vacuum science & technology / B
19,3 |
| Schlagworte: | |
| Beschreibung: | Einzelaufnahme eines Zeitschr.-H. |
| Beschreibung: | S. 861 - 1090 Ill., graph. Darst. |
Internformat
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| 700 | 1 | |a Xu, Ning-sheng |e Sonstige |4 oth | |
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Datensatz im Suchindex
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| genre_facet | Konferenzschrift 2000 Kanton Stadt |
| id | DE-604.BV013806787 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:52:18Z |
| institution | BVB |
| institution_GND | (DE-588)5528663-X |
| language | English |
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| physical | S. 861 - 1090 Ill., graph. Darst. |
| publishDate | 2001 |
| publishDateSearch | 2001 |
| publishDateSort | 2001 |
| publisher | American Inst. of Physics |
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| series2 | Journal of vacuum science & technology / B |
| spelling | International Vacuum Microelectronics Conference 13 2000 Kanton, Stadt Verfasser (DE-588)5528663-X aut Papers from the 13th International Vacuum Microelectronics Conference 13 - 17 August 2000, Guangzhou, China ed. for the conference: Ningsheng Xu New York, NY American Inst. of Physics 2001 S. 861 - 1090 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Journal of vacuum science & technology / B 19,3 Einzelaufnahme eines Zeitschr.-H. Vakuumtechnik (DE-588)4062270-8 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 gnd rswk-swf Vakuumelektronik (DE-588)4214651-3 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2000 Kanton Stadt gnd-content Mikroelektronik (DE-588)4039207-7 s Vakuumtechnik (DE-588)4062270-8 s DE-604 Vakuumelektronik (DE-588)4214651-3 s Xu, Ning-sheng Sonstige oth |
| spellingShingle | Papers from the 13th International Vacuum Microelectronics Conference 13 - 17 August 2000, Guangzhou, China Vakuumtechnik (DE-588)4062270-8 gnd Mikroelektronik (DE-588)4039207-7 gnd Vakuumelektronik (DE-588)4214651-3 gnd |
| subject_GND | (DE-588)4062270-8 (DE-588)4039207-7 (DE-588)4214651-3 (DE-588)1071861417 |
| title | Papers from the 13th International Vacuum Microelectronics Conference 13 - 17 August 2000, Guangzhou, China |
| title_auth | Papers from the 13th International Vacuum Microelectronics Conference 13 - 17 August 2000, Guangzhou, China |
| title_exact_search | Papers from the 13th International Vacuum Microelectronics Conference 13 - 17 August 2000, Guangzhou, China |
| title_full | Papers from the 13th International Vacuum Microelectronics Conference 13 - 17 August 2000, Guangzhou, China ed. for the conference: Ningsheng Xu |
| title_fullStr | Papers from the 13th International Vacuum Microelectronics Conference 13 - 17 August 2000, Guangzhou, China ed. for the conference: Ningsheng Xu |
| title_full_unstemmed | Papers from the 13th International Vacuum Microelectronics Conference 13 - 17 August 2000, Guangzhou, China ed. for the conference: Ningsheng Xu |
| title_short | Papers from the 13th International Vacuum Microelectronics Conference |
| title_sort | papers from the 13th international vacuum microelectronics conference 13 17 august 2000 guangzhou china |
| title_sub | 13 - 17 August 2000, Guangzhou, China |
| topic | Vakuumtechnik (DE-588)4062270-8 gnd Mikroelektronik (DE-588)4039207-7 gnd Vakuumelektronik (DE-588)4214651-3 gnd |
| topic_facet | Vakuumtechnik Mikroelektronik Vakuumelektronik Konferenzschrift 2000 Kanton Stadt |
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