Selected papers revised from the proceedings of the Fifth International Symposium on Sputtering and Plasma Processes: (ISSP '99) ; 16 - 18 June 1999, Kanazawa, Japan
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
Amsterdam [u.a.]
Elsevier
2000
|
| Schriftenreihe: | Vacuum
59,2/3 |
| Schlagworte: | |
| Beschreibung: | Einzelaufnahme eines Zeitschr.-H. |
| Beschreibung: | S. 382 - 951 Ill., graph. Darst. |
Internformat
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Datensatz im Suchindex
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| id | DE-604.BV013624958 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:49:09Z |
| institution | BVB |
| institution_GND | (DE-588)5348534-8 |
| language | Undetermined |
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| physical | S. 382 - 951 Ill., graph. Darst. |
| publishDate | 2000 |
| publishDateSearch | 2000 |
| publishDateSort | 2000 |
| publisher | Elsevier |
| record_format | marc |
| series2 | Vacuum |
| spelling | International Symposium on Sputtering and Plasma Processes 5 1999 Kanazawa Verfasser (DE-588)5348534-8 aut Selected papers revised from the proceedings of the Fifth International Symposium on Sputtering and Plasma Processes (ISSP '99) ; 16 - 18 June 1999, Kanazawa, Japan sponsored by the Japan Society of Applied Physics Amsterdam [u.a.] Elsevier 2000 S. 382 - 951 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Vacuum 59,2/3 Einzelaufnahme eines Zeitschr.-H. Sputtern (DE-588)4182614-0 gnd rswk-swf Plasmastrahlbearbeitung (DE-588)4136199-4 gnd rswk-swf Kanazawa (DE-588)4073191-1 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Sputtern (DE-588)4182614-0 s Kanazawa (DE-588)4073191-1 g DE-604 Plasmastrahlbearbeitung (DE-588)4136199-4 s |
| spellingShingle | Selected papers revised from the proceedings of the Fifth International Symposium on Sputtering and Plasma Processes (ISSP '99) ; 16 - 18 June 1999, Kanazawa, Japan Sputtern (DE-588)4182614-0 gnd Plasmastrahlbearbeitung (DE-588)4136199-4 gnd |
| subject_GND | (DE-588)4182614-0 (DE-588)4136199-4 (DE-588)4073191-1 (DE-588)1071861417 |
| title | Selected papers revised from the proceedings of the Fifth International Symposium on Sputtering and Plasma Processes (ISSP '99) ; 16 - 18 June 1999, Kanazawa, Japan |
| title_auth | Selected papers revised from the proceedings of the Fifth International Symposium on Sputtering and Plasma Processes (ISSP '99) ; 16 - 18 June 1999, Kanazawa, Japan |
| title_exact_search | Selected papers revised from the proceedings of the Fifth International Symposium on Sputtering and Plasma Processes (ISSP '99) ; 16 - 18 June 1999, Kanazawa, Japan |
| title_full | Selected papers revised from the proceedings of the Fifth International Symposium on Sputtering and Plasma Processes (ISSP '99) ; 16 - 18 June 1999, Kanazawa, Japan sponsored by the Japan Society of Applied Physics |
| title_fullStr | Selected papers revised from the proceedings of the Fifth International Symposium on Sputtering and Plasma Processes (ISSP '99) ; 16 - 18 June 1999, Kanazawa, Japan sponsored by the Japan Society of Applied Physics |
| title_full_unstemmed | Selected papers revised from the proceedings of the Fifth International Symposium on Sputtering and Plasma Processes (ISSP '99) ; 16 - 18 June 1999, Kanazawa, Japan sponsored by the Japan Society of Applied Physics |
| title_short | Selected papers revised from the proceedings of the Fifth International Symposium on Sputtering and Plasma Processes |
| title_sort | selected papers revised from the proceedings of the fifth international symposium on sputtering and plasma processes issp 99 16 18 june 1999 kanazawa japan |
| title_sub | (ISSP '99) ; 16 - 18 June 1999, Kanazawa, Japan |
| topic | Sputtern (DE-588)4182614-0 gnd Plasmastrahlbearbeitung (DE-588)4136199-4 gnd |
| topic_facet | Sputtern Plasmastrahlbearbeitung Kanazawa Konferenzschrift |
| work_keys_str_mv | AT internationalsymposiumonsputteringandplasmaprocesseskanazawa selectedpapersrevisedfromtheproceedingsofthefifthinternationalsymposiumonsputteringandplasmaprocessesissp991618june1999kanazawajapan |