Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films:
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
Pennington, NJ
Electrochemical Soc.
1997
|
| Schriftenreihe: | Electrochemical Society: Proceedings
1997,10 |
| Schlagworte: | |
| Beschreibung: | XIII, 588 S. Ill., graph. Darst. |
| ISBN: | 1566771374 |
Internformat
MARC
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| 245 | 1 | 0 | |a Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films |c ed. M. Jamal Deen ... |
| 246 | 1 | 3 | |a Silicon nitride and silicon dioxide thin insulating films |
| 264 | 1 | |a Pennington, NJ |b Electrochemical Soc. |c 1997 | |
| 300 | |a XIII, 588 S. |b Ill., graph. Darst. | ||
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Datensatz im Suchindex
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| building | Verbundindex |
| bvnumber | BV013588113 |
| classification_rvk | UP 7570 |
| ctrlnum | (OCoLC)632415111 (DE-599)BVBBV013588113 |
| discipline | Physik |
| format | Conference Proceeding Book |
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| genre | (DE-588)1071861417 Konferenzschrift 1997 Montréal gnd-content |
| genre_facet | Konferenzschrift 1997 Montréal |
| id | DE-604.BV013588113 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:48:29Z |
| institution | BVB |
| institution_GND | (DE-588)5274288-X |
| isbn | 1566771374 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009280116 |
| oclc_num | 632415111 |
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| physical | XIII, 588 S. Ill., graph. Darst. |
| publishDate | 1997 |
| publishDateSearch | 1997 |
| publishDateSort | 1997 |
| publisher | Electrochemical Soc. |
| record_format | marc |
| series | Electrochemical Society: Proceedings |
| series2 | Electrochemical Society: Proceedings |
| spelling | Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films 1997 Montréal Verfasser (DE-588)5274288-X aut Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films ed. M. Jamal Deen ... Silicon nitride and silicon dioxide thin insulating films Pennington, NJ Electrochemical Soc. 1997 XIII, 588 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Electrochemical Society: Proceedings 1997,10 Isolierschicht (DE-588)4147018-7 gnd rswk-swf Siliciumnitrid (DE-588)4127841-0 gnd rswk-swf Siliciumdioxid (DE-588)4077447-8 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1997 Montréal gnd-content Siliciumnitrid (DE-588)4127841-0 s Siliciumdioxid (DE-588)4077447-8 s Isolierschicht (DE-588)4147018-7 s DE-604 Deen, M. Jamal Sonstige oth Electrochemical Society: Proceedings 1997,10 (DE-604)BV001900941 1997,10 |
| spellingShingle | Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films Electrochemical Society: Proceedings Isolierschicht (DE-588)4147018-7 gnd Siliciumnitrid (DE-588)4127841-0 gnd Siliciumdioxid (DE-588)4077447-8 gnd |
| subject_GND | (DE-588)4147018-7 (DE-588)4127841-0 (DE-588)4077447-8 (DE-588)1071861417 |
| title | Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films |
| title_alt | Silicon nitride and silicon dioxide thin insulating films |
| title_auth | Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films |
| title_exact_search | Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films |
| title_full | Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films ed. M. Jamal Deen ... |
| title_fullStr | Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films ed. M. Jamal Deen ... |
| title_full_unstemmed | Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films ed. M. Jamal Deen ... |
| title_short | Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films |
| title_sort | proceedings of the symposium on silicon nitride and silicon dioxide thin insulating films |
| topic | Isolierschicht (DE-588)4147018-7 gnd Siliciumnitrid (DE-588)4127841-0 gnd Siliciumdioxid (DE-588)4077447-8 gnd |
| topic_facet | Isolierschicht Siliciumnitrid Siliciumdioxid Konferenzschrift 1997 Montréal |
| volume_link | (DE-604)BV001900941 |
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