Mesh generation algorithms for three-dimensional semiconductor process simulation:
Gespeichert in:
| 1. Verfasser: | |
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| Format: | Mikrofilm Buch |
| Sprache: | English |
| Veröffentlicht: |
2000
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| Ausgabe: | [Mikrofiche-Ausg.] |
| Schlagworte: | |
| Beschreibung: | Zürich, Techn. Hochsch., Diss., 2000. - Mikrofiche-Ausg.: 2 Mikrofiches : 24x |
| Beschreibung: | VIII, 103 S. Ill., graph. Darst. |
Internformat
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Datensatz im Suchindex
| _version_ | 1804128369594335232 |
|---|---|
| any_adam_object | |
| author | Villablanca, Luis |
| author_facet | Villablanca, Luis |
| author_role | aut |
| author_sort | Villablanca, Luis |
| author_variant | l v lv |
| building | Verbundindex |
| bvnumber | BV013568102 |
| classification_tum | MAT 674d ELT 270d DAT 780d MAT 350d |
| ctrlnum | (OCoLC)633392327 (DE-599)BVBBV013568102 |
| discipline | Informatik Elektrotechnik Mathematik |
| edition | [Mikrofiche-Ausg.] |
| format | Microfilm Book |
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| genre_facet | Hochschulschrift |
| id | DE-604.BV013568102 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:48:09Z |
| institution | BVB |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009267170 |
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| owner_facet | DE-91 DE-BY-TUM |
| physical | VIII, 103 S. Ill., graph. Darst. |
| publishDate | 2000 |
| publishDateSearch | 2000 |
| publishDateSort | 2000 |
| record_format | marc |
| spelling | Villablanca, Luis Verfasser aut Mesh generation algorithms for three-dimensional semiconductor process simulation vorgelegt von Luis Villablanca [Mikrofiche-Ausg.] 2000 VIII, 103 S. Ill., graph. Darst. txt rdacontent h rdamedia he rdacarrier Zürich, Techn. Hochsch., Diss., 2000. - Mikrofiche-Ausg.: 2 Mikrofiches : 24x Gittererzeugung (DE-588)4402542-7 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf Finite-Elemente-Methode (DE-588)4017233-8 gnd rswk-swf Delaunay-Triangulierung (DE-588)4628829-6 gnd rswk-swf System von partiellen Differentialgleichungen (DE-588)4116672-3 gnd rswk-swf Prozesssimulation (DE-588)4176077-3 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Halbleitertechnologie (DE-588)4158814-9 s Prozesssimulation (DE-588)4176077-3 s System von partiellen Differentialgleichungen (DE-588)4116672-3 s Finite-Elemente-Methode (DE-588)4017233-8 s Gittererzeugung (DE-588)4402542-7 s Delaunay-Triangulierung (DE-588)4628829-6 s DE-604 |
| spellingShingle | Villablanca, Luis Mesh generation algorithms for three-dimensional semiconductor process simulation Gittererzeugung (DE-588)4402542-7 gnd Halbleitertechnologie (DE-588)4158814-9 gnd Finite-Elemente-Methode (DE-588)4017233-8 gnd Delaunay-Triangulierung (DE-588)4628829-6 gnd System von partiellen Differentialgleichungen (DE-588)4116672-3 gnd Prozesssimulation (DE-588)4176077-3 gnd |
| subject_GND | (DE-588)4402542-7 (DE-588)4158814-9 (DE-588)4017233-8 (DE-588)4628829-6 (DE-588)4116672-3 (DE-588)4176077-3 (DE-588)4113937-9 |
| title | Mesh generation algorithms for three-dimensional semiconductor process simulation |
| title_auth | Mesh generation algorithms for three-dimensional semiconductor process simulation |
| title_exact_search | Mesh generation algorithms for three-dimensional semiconductor process simulation |
| title_full | Mesh generation algorithms for three-dimensional semiconductor process simulation vorgelegt von Luis Villablanca |
| title_fullStr | Mesh generation algorithms for three-dimensional semiconductor process simulation vorgelegt von Luis Villablanca |
| title_full_unstemmed | Mesh generation algorithms for three-dimensional semiconductor process simulation vorgelegt von Luis Villablanca |
| title_short | Mesh generation algorithms for three-dimensional semiconductor process simulation |
| title_sort | mesh generation algorithms for three dimensional semiconductor process simulation |
| topic | Gittererzeugung (DE-588)4402542-7 gnd Halbleitertechnologie (DE-588)4158814-9 gnd Finite-Elemente-Methode (DE-588)4017233-8 gnd Delaunay-Triangulierung (DE-588)4628829-6 gnd System von partiellen Differentialgleichungen (DE-588)4116672-3 gnd Prozesssimulation (DE-588)4176077-3 gnd |
| topic_facet | Gittererzeugung Halbleitertechnologie Finite-Elemente-Methode Delaunay-Triangulierung System von partiellen Differentialgleichungen Prozesssimulation Hochschulschrift |
| work_keys_str_mv | AT villablancaluis meshgenerationalgorithmsforthreedimensionalsemiconductorprocesssimulation |