Structure and electronic properties of ultrathin dielectric films on silicon and related structures: symposium held November 29 - December 1, 1999, Boston, Massachusetts, U.S.A.
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Warrendale, Pa.
Materials Research Soc.
2000
|
| Schriftenreihe: | Materials Research Society: Materials Research Society symposia proceedings
592 |
| Schlagworte: | |
| Beschreibung: | XI, 386 S. Ill., graph. Darst. |
| ISBN: | 1558995005 |
Internformat
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Datensatz im Suchindex
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| genre | (DE-588)1071861417 Konferenzschrift 1999 Boston Mass. gnd-content |
| genre_facet | Konferenzschrift 1999 Boston Mass. |
| id | DE-604.BV013564888 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:48:05Z |
| institution | BVB |
| isbn | 1558995005 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009264276 |
| oclc_num | 314293805 |
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| physical | XI, 386 S. Ill., graph. Darst. |
| publishDate | 2000 |
| publishDateSearch | 2000 |
| publishDateSort | 2000 |
| publisher | Materials Research Soc. |
| record_format | marc |
| series | Materials Research Society: Materials Research Society symposia proceedings |
| series2 | Materials Research Society: Materials Research Society symposia proceedings |
| spelling | Structure and electronic properties of ultrathin dielectric films on silicon and related structures symposium held November 29 - December 1, 1999, Boston, Massachusetts, U.S.A. ed. D. A. Buchanan ... Warrendale, Pa. Materials Research Soc. 2000 XI, 386 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials Research Society: Materials Research Society symposia proceedings 592 SOI-Technik (DE-588)4128029-5 gnd rswk-swf Silicium (DE-588)4077445-4 gnd rswk-swf Dielektrische Schicht (DE-588)4194257-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1999 Boston Mass. gnd-content Dielektrische Schicht (DE-588)4194257-7 s SOI-Technik (DE-588)4128029-5 s DE-604 Silicium (DE-588)4077445-4 s 1\p DE-604 Buchanan, D. A. Sonstige oth Materials Research Society: Materials Research Society symposia proceedings 592 (DE-604)BV001899105 592 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Structure and electronic properties of ultrathin dielectric films on silicon and related structures symposium held November 29 - December 1, 1999, Boston, Massachusetts, U.S.A. Materials Research Society: Materials Research Society symposia proceedings SOI-Technik (DE-588)4128029-5 gnd Silicium (DE-588)4077445-4 gnd Dielektrische Schicht (DE-588)4194257-7 gnd |
| subject_GND | (DE-588)4128029-5 (DE-588)4077445-4 (DE-588)4194257-7 (DE-588)1071861417 |
| title | Structure and electronic properties of ultrathin dielectric films on silicon and related structures symposium held November 29 - December 1, 1999, Boston, Massachusetts, U.S.A. |
| title_auth | Structure and electronic properties of ultrathin dielectric films on silicon and related structures symposium held November 29 - December 1, 1999, Boston, Massachusetts, U.S.A. |
| title_exact_search | Structure and electronic properties of ultrathin dielectric films on silicon and related structures symposium held November 29 - December 1, 1999, Boston, Massachusetts, U.S.A. |
| title_full | Structure and electronic properties of ultrathin dielectric films on silicon and related structures symposium held November 29 - December 1, 1999, Boston, Massachusetts, U.S.A. ed. D. A. Buchanan ... |
| title_fullStr | Structure and electronic properties of ultrathin dielectric films on silicon and related structures symposium held November 29 - December 1, 1999, Boston, Massachusetts, U.S.A. ed. D. A. Buchanan ... |
| title_full_unstemmed | Structure and electronic properties of ultrathin dielectric films on silicon and related structures symposium held November 29 - December 1, 1999, Boston, Massachusetts, U.S.A. ed. D. A. Buchanan ... |
| title_short | Structure and electronic properties of ultrathin dielectric films on silicon and related structures |
| title_sort | structure and electronic properties of ultrathin dielectric films on silicon and related structures symposium held november 29 december 1 1999 boston massachusetts u s a |
| title_sub | symposium held November 29 - December 1, 1999, Boston, Massachusetts, U.S.A. |
| topic | SOI-Technik (DE-588)4128029-5 gnd Silicium (DE-588)4077445-4 gnd Dielektrische Schicht (DE-588)4194257-7 gnd |
| topic_facet | SOI-Technik Silicium Dielektrische Schicht Konferenzschrift 1999 Boston Mass. |
| volume_link | (DE-604)BV001899105 |
| work_keys_str_mv | AT buchananda structureandelectronicpropertiesofultrathindielectricfilmsonsiliconandrelatedstructuressymposiumheldnovember29december11999bostonmassachusettsusa |