International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication Rancho Mirage, Calif. (1999). Papers from the 44th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication: 30 May - 2 June 2000, ... , Rancho Mirage, California. American Inst. of Physics.
Chicago-Zitierstil (17. Ausg.)International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication Rancho Mirage, Calif. Papers from the 44th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication: 30 May - 2 June 2000, ... , Rancho Mirage, California. New York: American Inst. of Physics, 1999.
MLA-Zitierstil (9. Ausg.)International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication Rancho Mirage, Calif. Papers from the 44th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication: 30 May - 2 June 2000, ... , Rancho Mirage, California. American Inst. of Physics, 1999.