Papers from the 44th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication: 30 May - 2 June 2000, ... , Rancho Mirage, California
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
New York
American Inst. of Physics
1999
|
| Schriftenreihe: | Journal of vacuum science & technology / B
18,6 |
| Schlagworte: | |
| Beschreibung: | Einzelaufnahme eines Zeitschr.-H. |
| Beschreibung: | S. 2876 - 3614 graph. Darst. |
Internformat
MARC
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| 111 | 2 | |a International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |n 44 |d 2000 |c Rancho Mirage, Calif. |j Verfasser |0 (DE-588)1500287-1 |4 aut | |
| 245 | 1 | 0 | |a Papers from the 44th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |b 30 May - 2 June 2000, ... , Rancho Mirage, California |c ed. for the proceedings: John Melngailis |
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| 700 | 1 | |a Melngailis, John |e Sonstige |4 oth | |
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Datensatz im Suchindex
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| genre_facet | Konferenzschrift 2000 Rancho Mirage Calif. |
| id | DE-604.BV013540660 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:47:38Z |
| institution | BVB |
| institution_GND | (DE-588)1500287-1 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009244986 |
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| physical | S. 2876 - 3614 graph. Darst. |
| publishDate | 1999 |
| publishDateSearch | 1999 |
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| publisher | American Inst. of Physics |
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| series2 | Journal of vacuum science & technology / B |
| spelling | International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 44 2000 Rancho Mirage, Calif. Verfasser (DE-588)1500287-1 aut Papers from the 44th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 30 May - 2 June 2000, ... , Rancho Mirage, California ed. for the proceedings: John Melngailis New York American Inst. of Physics 1999 S. 2876 - 3614 graph. Darst. txt rdacontent n rdamedia nc rdacarrier Journal of vacuum science & technology / B 18,6 Einzelaufnahme eines Zeitschr.-H. Mikroelektronik (DE-588)4039207-7 gnd rswk-swf Nanotechnologie (DE-588)4327470-5 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2000 Rancho Mirage Calif. gnd-content Mikroelektronik (DE-588)4039207-7 s Nanotechnologie (DE-588)4327470-5 s DE-604 Melngailis, John Sonstige oth |
| spellingShingle | Papers from the 44th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 30 May - 2 June 2000, ... , Rancho Mirage, California Mikroelektronik (DE-588)4039207-7 gnd Nanotechnologie (DE-588)4327470-5 gnd |
| subject_GND | (DE-588)4039207-7 (DE-588)4327470-5 (DE-588)1071861417 |
| title | Papers from the 44th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 30 May - 2 June 2000, ... , Rancho Mirage, California |
| title_auth | Papers from the 44th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 30 May - 2 June 2000, ... , Rancho Mirage, California |
| title_exact_search | Papers from the 44th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 30 May - 2 June 2000, ... , Rancho Mirage, California |
| title_full | Papers from the 44th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 30 May - 2 June 2000, ... , Rancho Mirage, California ed. for the proceedings: John Melngailis |
| title_fullStr | Papers from the 44th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 30 May - 2 June 2000, ... , Rancho Mirage, California ed. for the proceedings: John Melngailis |
| title_full_unstemmed | Papers from the 44th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 30 May - 2 June 2000, ... , Rancho Mirage, California ed. for the proceedings: John Melngailis |
| title_short | Papers from the 44th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |
| title_sort | papers from the 44th international conference on electron ion and photon beam technology and nanofabrication 30 may 2 june 2000 rancho mirage california |
| title_sub | 30 May - 2 June 2000, ... , Rancho Mirage, California |
| topic | Mikroelektronik (DE-588)4039207-7 gnd Nanotechnologie (DE-588)4327470-5 gnd |
| topic_facet | Mikroelektronik Nanotechnologie Konferenzschrift 2000 Rancho Mirage Calif. |
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