IEEE transactions on semiconductor manufacturing: a publication of the IEEE Components, Packaging, and Manufacturing Technology, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid State Circuits Society
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Elektronisch Zeitschrift |
| Sprache: | English |
| Veröffentlicht: |
New York, NY
IEEE
1988-
|
| Schlagworte: | |
| Online-Zugang: | Volltext Volltext |
| Veröffentlicht: | 1.1988 - |
| Beschreibung: | Online-Ressource |
| ISSN: | 1558-2345 0894-6507 |
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| discipline | Elektrotechnik |
| format | Electronic Journal |
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| indexdate | 2025-02-20T07:18:40Z |
| institution | BVB |
| institution_GND | (DE-588)1692-5 |
| issn | 1558-2345 0894-6507 |
| language | English |
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| publishDate | 1988 |
| publishDateSearch | 1988 1989 1990 1991 1992 1993 1994 1995 1996 1997 1998 1999 2000 2001 2002 2003 2004 2005 2006 2007 2008 2009 2010 2011 2012 2013 2014 2015 2016 2017 2018 2019 2020 2021 2022 2023 2024 2025 8888 |
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| publisher | IEEE |
| record_format | marc |
| spellingShingle | IEEE transactions on semiconductor manufacturing a publication of the IEEE Components, Packaging, and Manufacturing Technology, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid State Circuits Society Zeitschrift (DE-588)4067488-5 gnd Halbleitertechnologie (DE-588)4158814-9 gnd Online-Ressource (DE-588)4511937-5 gnd |
| subject_GND | (DE-588)4067488-5 (DE-588)4158814-9 (DE-588)4511937-5 |
| title | IEEE transactions on semiconductor manufacturing a publication of the IEEE Components, Packaging, and Manufacturing Technology, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid State Circuits Society |
| title_alt | Transactions on semiconductor manufacturing |
| title_auth | IEEE transactions on semiconductor manufacturing a publication of the IEEE Components, Packaging, and Manufacturing Technology, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid State Circuits Society |
| title_exact_search | IEEE transactions on semiconductor manufacturing a publication of the IEEE Components, Packaging, and Manufacturing Technology, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid State Circuits Society |
| title_full | IEEE transactions on semiconductor manufacturing a publication of the IEEE Components, Packaging, and Manufacturing Technology, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid State Circuits Society |
| title_fullStr | IEEE transactions on semiconductor manufacturing a publication of the IEEE Components, Packaging, and Manufacturing Technology, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid State Circuits Society |
| title_full_unstemmed | IEEE transactions on semiconductor manufacturing a publication of the IEEE Components, Packaging, and Manufacturing Technology, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid State Circuits Society |
| title_short | IEEE transactions on semiconductor manufacturing |
| title_sort | ieee transactions on semiconductor manufacturing a publication of the ieee components packaging and manufacturing technology the ieee electron devices society the ieee reliability society the ieee solid state circuits society |
| title_sub | a publication of the IEEE Components, Packaging, and Manufacturing Technology, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid State Circuits Society |
| topic | Zeitschrift (DE-588)4067488-5 gnd Halbleitertechnologie (DE-588)4158814-9 gnd Online-Ressource (DE-588)4511937-5 gnd |
| topic_facet | Zeitschrift Halbleitertechnologie Online-Ressource |
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