Diffusion phenomena in the chemically amplified CARL resist systm:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
München
Utz, Wiss.
2000
|
| Schriftenreihe: | Physikalische Chemie
|
| Schlagworte: | |
| Beschreibung: | Zugl.: Regensburg, Univ., Diss., 2000 |
| Beschreibung: | VII, 68 S. Ill., graph. Darst. |
| ISBN: | 3896758454 |
Internformat
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV013469697 | ||
| 003 | DE-604 | ||
| 005 | 20010314 | ||
| 007 | t | ||
| 008 | 001128s2000 gw ad|| m||| 00||| eng d | ||
| 016 | 7 | |a 96003790X |2 DE-101 | |
| 020 | |a 3896758454 |9 3-89675-845-4 | ||
| 035 | |a (OCoLC)50253949 | ||
| 035 | |a (DE-599)BVBBV013469697 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 044 | |a gw |c DE | ||
| 049 | |a DE-12 |a DE-19 |a DE-355 | ||
| 084 | |a VK 5075 |0 (DE-625)147396: |2 rvk | ||
| 100 | 1 | |a Richter, Ernst-Christian |d 1969- |e Verfasser |0 (DE-588)122435044 |4 aut | |
| 245 | 1 | 0 | |a Diffusion phenomena in the chemically amplified CARL resist systm |c Ernst-Christian Richter |
| 264 | 1 | |a München |b Utz, Wiss. |c 2000 | |
| 300 | |a VII, 68 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Physikalische Chemie | |
| 500 | |a Zugl.: Regensburg, Univ., Diss., 2000 | ||
| 650 | 0 | 7 | |a Excimerlaser |0 (DE-588)4153300-8 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Laserlithografie |0 (DE-588)4240927-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Photoresist |0 (DE-588)4174545-0 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
| 689 | 0 | 0 | |a Photoresist |0 (DE-588)4174545-0 |D s |
| 689 | 0 | 1 | |a Laserlithografie |0 (DE-588)4240927-5 |D s |
| 689 | 0 | 2 | |a Excimerlaser |0 (DE-588)4153300-8 |D s |
| 689 | 0 | |5 DE-604 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-009194346 | ||
Datensatz im Suchindex
| _version_ | 1804128262251610112 |
|---|---|
| any_adam_object | |
| author | Richter, Ernst-Christian 1969- |
| author_GND | (DE-588)122435044 |
| author_facet | Richter, Ernst-Christian 1969- |
| author_role | aut |
| author_sort | Richter, Ernst-Christian 1969- |
| author_variant | e c r ecr |
| building | Verbundindex |
| bvnumber | BV013469697 |
| classification_rvk | VK 5075 |
| ctrlnum | (OCoLC)50253949 (DE-599)BVBBV013469697 |
| discipline | Chemie / Pharmazie |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01426nam a2200409 c 4500</leader><controlfield tag="001">BV013469697</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20010314 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">001128s2000 gw ad|| m||| 00||| eng d</controlfield><datafield tag="016" ind1="7" ind2=" "><subfield code="a">96003790X</subfield><subfield code="2">DE-101</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">3896758454</subfield><subfield code="9">3-89675-845-4</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)50253949</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV013469697</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="044" ind1=" " ind2=" "><subfield code="a">gw</subfield><subfield code="c">DE</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-12</subfield><subfield code="a">DE-19</subfield><subfield code="a">DE-355</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">VK 5075</subfield><subfield code="0">(DE-625)147396:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Richter, Ernst-Christian</subfield><subfield code="d">1969-</subfield><subfield code="e">Verfasser</subfield><subfield code="0">(DE-588)122435044</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Diffusion phenomena in the chemically amplified CARL resist systm</subfield><subfield code="c">Ernst-Christian Richter</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">München</subfield><subfield code="b">Utz, Wiss.</subfield><subfield code="c">2000</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">VII, 68 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Physikalische Chemie</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Zugl.: Regensburg, Univ., Diss., 2000</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Excimerlaser</subfield><subfield code="0">(DE-588)4153300-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Laserlithografie</subfield><subfield code="0">(DE-588)4240927-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Photoresist</subfield><subfield code="0">(DE-588)4174545-0</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)4113937-9</subfield><subfield code="a">Hochschulschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Photoresist</subfield><subfield code="0">(DE-588)4174545-0</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Laserlithografie</subfield><subfield code="0">(DE-588)4240927-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">Excimerlaser</subfield><subfield code="0">(DE-588)4153300-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-009194346</subfield></datafield></record></collection> |
| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV013469697 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:46:27Z |
| institution | BVB |
| isbn | 3896758454 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009194346 |
| oclc_num | 50253949 |
| open_access_boolean | |
| owner | DE-12 DE-19 DE-BY-UBM DE-355 DE-BY-UBR |
| owner_facet | DE-12 DE-19 DE-BY-UBM DE-355 DE-BY-UBR |
| physical | VII, 68 S. Ill., graph. Darst. |
| publishDate | 2000 |
| publishDateSearch | 2000 |
| publishDateSort | 2000 |
| publisher | Utz, Wiss. |
| record_format | marc |
| series2 | Physikalische Chemie |
| spelling | Richter, Ernst-Christian 1969- Verfasser (DE-588)122435044 aut Diffusion phenomena in the chemically amplified CARL resist systm Ernst-Christian Richter München Utz, Wiss. 2000 VII, 68 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Physikalische Chemie Zugl.: Regensburg, Univ., Diss., 2000 Excimerlaser (DE-588)4153300-8 gnd rswk-swf Laserlithografie (DE-588)4240927-5 gnd rswk-swf Photoresist (DE-588)4174545-0 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Photoresist (DE-588)4174545-0 s Laserlithografie (DE-588)4240927-5 s Excimerlaser (DE-588)4153300-8 s DE-604 |
| spellingShingle | Richter, Ernst-Christian 1969- Diffusion phenomena in the chemically amplified CARL resist systm Excimerlaser (DE-588)4153300-8 gnd Laserlithografie (DE-588)4240927-5 gnd Photoresist (DE-588)4174545-0 gnd |
| subject_GND | (DE-588)4153300-8 (DE-588)4240927-5 (DE-588)4174545-0 (DE-588)4113937-9 |
| title | Diffusion phenomena in the chemically amplified CARL resist systm |
| title_auth | Diffusion phenomena in the chemically amplified CARL resist systm |
| title_exact_search | Diffusion phenomena in the chemically amplified CARL resist systm |
| title_full | Diffusion phenomena in the chemically amplified CARL resist systm Ernst-Christian Richter |
| title_fullStr | Diffusion phenomena in the chemically amplified CARL resist systm Ernst-Christian Richter |
| title_full_unstemmed | Diffusion phenomena in the chemically amplified CARL resist systm Ernst-Christian Richter |
| title_short | Diffusion phenomena in the chemically amplified CARL resist systm |
| title_sort | diffusion phenomena in the chemically amplified carl resist systm |
| topic | Excimerlaser (DE-588)4153300-8 gnd Laserlithografie (DE-588)4240927-5 gnd Photoresist (DE-588)4174545-0 gnd |
| topic_facet | Excimerlaser Laserlithografie Photoresist Hochschulschrift |
| work_keys_str_mv | AT richterernstchristian diffusionphenomenainthechemicallyamplifiedcarlresistsystm |