Micromechanics: contributions revised from the technical digest of the Twelfth IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-99), Orlando, Florida, USA, 17 - 21 January 1999
Saved in:
| Format: | Conference Proceeding Book |
|---|---|
| Language: | Undetermined |
| Published: |
Amsterdam [u.a.]
Elsevier
2000
|
| Series: | Sensors and actuators / A
80,2 |
| Subjects: | |
| Item Description: | Einzelaufnahme eines Zeitschr.-H. |
| Physical Description: | 279 S. Ill., graph. Darst. |
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| physical | 279 S. Ill., graph. Darst. |
| publishDate | 2000 |
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| publisher | Elsevier |
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| series2 | Sensors and actuators / A |
| spelling | Micromechanics contributions revised from the technical digest of the Twelfth IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-99), Orlando, Florida, USA, 17 - 21 January 1999 coordinating ed.: J. E. Wood Amsterdam [u.a.] Elsevier 2000 279 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Sensors and actuators / A 80,2 Einzelaufnahme eines Zeitschr.-H. Mikromechanik (DE-588)4205811-9 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1999 Orlando Fla. gnd-content Mikromechanik (DE-588)4205811-9 s DE-604 Wood, J. E. Sonstige oth International Conference on Micro-Electro-Mechanical Systems 12 1999 Orlando, Fla. Sonstige (DE-588)5325660-8 oth |
| spellingShingle | Micromechanics contributions revised from the technical digest of the Twelfth IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-99), Orlando, Florida, USA, 17 - 21 January 1999 Mikromechanik (DE-588)4205811-9 gnd |
| subject_GND | (DE-588)4205811-9 (DE-588)1071861417 |
| title | Micromechanics contributions revised from the technical digest of the Twelfth IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-99), Orlando, Florida, USA, 17 - 21 January 1999 |
| title_auth | Micromechanics contributions revised from the technical digest of the Twelfth IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-99), Orlando, Florida, USA, 17 - 21 January 1999 |
| title_exact_search | Micromechanics contributions revised from the technical digest of the Twelfth IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-99), Orlando, Florida, USA, 17 - 21 January 1999 |
| title_full | Micromechanics contributions revised from the technical digest of the Twelfth IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-99), Orlando, Florida, USA, 17 - 21 January 1999 coordinating ed.: J. E. Wood |
| title_fullStr | Micromechanics contributions revised from the technical digest of the Twelfth IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-99), Orlando, Florida, USA, 17 - 21 January 1999 coordinating ed.: J. E. Wood |
| title_full_unstemmed | Micromechanics contributions revised from the technical digest of the Twelfth IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-99), Orlando, Florida, USA, 17 - 21 January 1999 coordinating ed.: J. E. Wood |
| title_short | Micromechanics |
| title_sort | micromechanics contributions revised from the technical digest of the twelfth ieee international workshop on micro electro mechanical systems mems 99 orlando florida usa 17 21 january 1999 |
| title_sub | contributions revised from the technical digest of the Twelfth IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-99), Orlando, Florida, USA, 17 - 21 January 1999 |
| topic | Mikromechanik (DE-588)4205811-9 gnd |
| topic_facet | Mikromechanik Konferenzschrift 1999 Orlando Fla. |
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