Mechanical properties of CMOS thin films:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Mikrofilm Buch |
| Sprache: | English German |
| Veröffentlicht: |
1999
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| Ausgabe: | [Mikrofiche-Ausg.] |
| Schlagworte: | |
| Beschreibung: | Zürich, Techn. Hochsch., Diss., 1999. - Zsfassung in engl. und dt. Sprache |
| Beschreibung: | II, 143 S. Ill., graph. Darst. |
Internformat
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| 776 | 0 | 8 | |i Reproduktion von |a Ziebart, Volker, 1969- |t Mechanical properties of CMOS thin films |d 1999 |
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Datensatz im Suchindex
| _version_ | 1804128071824965632 |
|---|---|
| any_adam_object | |
| author | Ziebart, Volker 1969- |
| author_GND | (DE-588)122072901 |
| author_facet | Ziebart, Volker 1969- |
| author_role | aut |
| author_sort | Ziebart, Volker 1969- |
| author_variant | v z vz |
| building | Verbundindex |
| bvnumber | BV013302457 |
| classification_tum | ELT 321d |
| ctrlnum | (OCoLC)633227697 (DE-599)BVBBV013302457 |
| discipline | Elektrotechnik |
| edition | [Mikrofiche-Ausg.] |
| format | Microfilm Book |
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| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV013302457 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:43:25Z |
| institution | BVB |
| language | English German |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009069737 |
| oclc_num | 633227697 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM DE-29T DE-355 DE-BY-UBR |
| owner_facet | DE-91 DE-BY-TUM DE-29T DE-355 DE-BY-UBR |
| physical | II, 143 S. Ill., graph. Darst. |
| publishDate | 1999 |
| publishDateSearch | 1999 |
| publishDateSort | 1999 |
| record_format | marc |
| spelling | Ziebart, Volker 1969- Verfasser (DE-588)122072901 aut Mechanical properties of CMOS thin films by Volker Ziebart [Mikrofiche-Ausg.] 1999 II, 143 S. Ill., graph. Darst. txt rdacontent h rdamedia he rdacarrier Zürich, Techn. Hochsch., Diss., 1999. - Zsfassung in engl. und dt. Sprache Mikroform-Ausgabe Mikrofiche-Ausg.: 2 Mikrofiches : 24x Siliciumbauelement (DE-588)4181368-6 gnd rswk-swf CMOS-Schaltung (DE-588)4148111-2 gnd rswk-swf Mikromechanik (DE-588)4205811-9 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 gnd rswk-swf Biegefestigkeit (DE-588)4145333-5 gnd rswk-swf Mechanische Eigenschaft (DE-588)4217961-0 gnd rswk-swf Sensor (DE-588)4038824-4 gnd rswk-swf Eigenspannung (DE-588)4013788-0 gnd rswk-swf CMOS (DE-588)4010319-5 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content CMOS (DE-588)4010319-5 s Dünne Schicht (DE-588)4136925-7 s Eigenspannung (DE-588)4013788-0 s Mechanische Eigenschaft (DE-588)4217961-0 s DE-604 Siliciumbauelement (DE-588)4181368-6 s 1\p DE-604 Mikromechanik (DE-588)4205811-9 s 2\p DE-604 Sensor (DE-588)4038824-4 s 3\p DE-604 CMOS-Schaltung (DE-588)4148111-2 s 4\p DE-604 Biegefestigkeit (DE-588)4145333-5 s 5\p DE-604 Reproduktion von Ziebart, Volker, 1969- Mechanical properties of CMOS thin films 1999 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 3\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 4\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 5\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Ziebart, Volker 1969- Mechanical properties of CMOS thin films Siliciumbauelement (DE-588)4181368-6 gnd CMOS-Schaltung (DE-588)4148111-2 gnd Mikromechanik (DE-588)4205811-9 gnd Dünne Schicht (DE-588)4136925-7 gnd Biegefestigkeit (DE-588)4145333-5 gnd Mechanische Eigenschaft (DE-588)4217961-0 gnd Sensor (DE-588)4038824-4 gnd Eigenspannung (DE-588)4013788-0 gnd CMOS (DE-588)4010319-5 gnd |
| subject_GND | (DE-588)4181368-6 (DE-588)4148111-2 (DE-588)4205811-9 (DE-588)4136925-7 (DE-588)4145333-5 (DE-588)4217961-0 (DE-588)4038824-4 (DE-588)4013788-0 (DE-588)4010319-5 (DE-588)4113937-9 |
| title | Mechanical properties of CMOS thin films |
| title_auth | Mechanical properties of CMOS thin films |
| title_exact_search | Mechanical properties of CMOS thin films |
| title_full | Mechanical properties of CMOS thin films by Volker Ziebart |
| title_fullStr | Mechanical properties of CMOS thin films by Volker Ziebart |
| title_full_unstemmed | Mechanical properties of CMOS thin films by Volker Ziebart |
| title_short | Mechanical properties of CMOS thin films |
| title_sort | mechanical properties of cmos thin films |
| topic | Siliciumbauelement (DE-588)4181368-6 gnd CMOS-Schaltung (DE-588)4148111-2 gnd Mikromechanik (DE-588)4205811-9 gnd Dünne Schicht (DE-588)4136925-7 gnd Biegefestigkeit (DE-588)4145333-5 gnd Mechanische Eigenschaft (DE-588)4217961-0 gnd Sensor (DE-588)4038824-4 gnd Eigenspannung (DE-588)4013788-0 gnd CMOS (DE-588)4010319-5 gnd |
| topic_facet | Siliciumbauelement CMOS-Schaltung Mikromechanik Dünne Schicht Biegefestigkeit Mechanische Eigenschaft Sensor Eigenspannung CMOS Hochschulschrift |
| work_keys_str_mv | AT ziebartvolker mechanicalpropertiesofcmosthinfilms |