Micro-electro-mechanical systems (MEMS) 1998: micro-manufacturing processes in MEMS and other advanced systems, applications of micro-fabrication to fluid mechanics, micro-electro-mechanical systems, computational methods for analysis, design and simulation of MEMS ; presented at The 1998 ASME International Mechanical Engineering Congress and Exposition, November, 15 - 20, 1998, Anaheim, California
Gespeichert in:
Bibliographische Detailangaben
Format: Tagungsbericht Buch
Sprache:English
Veröffentlicht: New York, N.Y. American Soc. of Mechanical Engineers 1998
Schriftenreihe:American Society of Mechanical Engineers / Dynamic Systems and Control Division: DSC 66
Schlagworte:
Beschreibung:X, 583 S. Ill., graph. Darst.
ISBN:079181596X

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