Holdings: Mechanical microsensors

Mechanical microsensors:

Saved in:

Bibliographic Details
Main Authors:	Elwenspoek, Miko 1949- (Author), Wiegerink, Remco J. 1964- (Author)
Format:	Book
Language:	English
Published:	Berlin [u.a.] Springer 2001
Series:	Microtechnology and mems Physics and astronomy online library
Subjects:	Detectors > Design and construction Microelectromechanical systems > Design and construction Micromachining Silicon Transducers Mikromechanik Mikrosensor
Online Access:	Inhaltsverzeichnis
Physical Description:	X, 295 S. Ill., graph. Darst.
ISBN:	3540675825

Staff View

MARC


LEADER	00000nam a22000008c 4500
001	BV013279216
003	DE-604
005	20060912
007	t
008	000725s2001 gw ad\|\| \|\|\|\| 00\|\|\| eng d
016	7		\|a 959238603 \|2 DE-101
020			\|a 3540675825 \|9 3-540-67582-5
035			\|a (OCoLC)56475511
035			\|a (DE-599)BVBBV013279216
040			\|a DE-604 \|b ger \|e rakddb
041	0		\|a eng
044			\|a gw \|c DE
049			\|a DE-703 \|a DE-29T \|a DE-91 \|a DE-91G \|a DE-19 \|a DE-706 \|a DE-522
050		0	\|a TK7875
084			\|a ZN 3700 \|0 (DE-625)157333: \|2 rvk
084			\|a ZN 4980 \|0 (DE-625)157428: \|2 rvk
084			\|a MAS 990f \|2 stub
084			\|a TEC 025f \|2 stub
100	1		\|a Elwenspoek, Miko \|d 1949- \|e Verfasser \|0 (DE-588)12212183X \|4 aut
245	1	0	\|a Mechanical microsensors \|c M. Elwenspoek ; R. Wiegerink
264		1	\|a Berlin [u.a.] \|b Springer \|c 2001
300			\|a X, 295 S. \|b Ill., graph. Darst.
336			\|b txt \|2 rdacontent
337			\|b n \|2 rdamedia
338			\|b nc \|2 rdacarrier
490	0		\|a Microtechnology and mems
490	0		\|a Physics and astronomy online library
650		4	\|a Detectors \|x Design and construction
650		4	\|a Microelectromechanical systems \|x Design and construction
650		4	\|a Micromachining
650		4	\|a Silicon
650		4	\|a Transducers
650	0	7	\|a Mikromechanik \|0 (DE-588)4205811-9 \|2 gnd \|9 rswk-swf
650	0	7	\|a Mikrosensor \|0 (DE-588)4561097-6 \|2 gnd \|9 rswk-swf
689	0	0	\|a Mikrosensor \|0 (DE-588)4561097-6 \|D s
689	0		\|5 DE-604
689	1	0	\|a Mikrosensor \|0 (DE-588)4561097-6 \|D s
689	1	1	\|a Mikromechanik \|0 (DE-588)4205811-9 \|D s
689	1		\|5 DE-604
700	1		\|a Wiegerink, Remco J. \|d 1964- \|e Verfasser \|0 (DE-588)122121872 \|4 aut
856	4	2	\|m GBV Datenaustausch \|q application/pdf \|u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009053823&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA \|3 Inhaltsverzeichnis
999			\|a oai:aleph.bib-bvb.de:BVB01-009053823

Record in the Search Index

_version_	1804128047071232000
adam_text	M. ELWENSPOEK R. WIEGERINK MECHANICAL MICROSENSORS WITH 235 FIGURES CONTENTS 1. INTRODUCTIOII I 2. MEMS 5 2.1 MINIATURISATION AND SYSTEMS 5 2.2 EXAMPLES FOR MEMS N 2.2.1 BUBBLEJET !!! 7 2.2.2 ACLUATORS 9 2.2.3 MICROPUMPS (0 2.3 SMALL AND LARGE: SCALING [3 2.3.1 ELECTROMAGNETIC FORCES 13 2.3.2 COULOMB FRICTION 16 2.3.3 MECHANICAL STRENGT!] ]6 2.3.4 DYNAMIC PROPERTIES (7 2.4 AVAILABLE FABRICATION TECHNOLOGY 20 2.4.1 TECHNOLOGIES BASED 011 LITHOGRAPHY 20 2.4.1.1 SILICON MICRONIACHINING 21 2.4.1.2 LIGA . . . .* 22 2.4.2 MINIATURISATION OF CONVENTIONAL TECHNOLOGIES 23 3. INTRODUCTIOII INTO SILICON IVLICROMACHINING 24 3.1 PHOTOLITHOGRAPHY 24 3.2 THIN FILM DEPOSITION AND DOPING 25 3.2.1 SILICON DIOXIDE 26 3.2.2 CHEMICAL VAPOUR DEPOSITION 27 3.2.3 EVAPORATION 29 3.2.4 SPUTTCRDEPO.SILION 3] 3.2.5 DOPING 3] 3.3 WET CHEMICAL ETCHING 32 3.3.1 ISOTROPIE ETCHING 32 3.3.2 ANISOTROPIE ETCHING 34 3.3.3 ETCHSTOP ZZZZ 36 3.4 WAFERBONDING 40 3.4.1 ANODIC BONDING 41 3.4.2 SILICON FUSION BONDING 43 VIII CONTENTS 3.5 PLASMA ETCHING 45 3.5.1 PLASMA 45 3.5.2 ANISOTROPIE PLASMA ETCHING MODES 47 3.5.3 CONFIGURATIONS 48 3.5.4 BLACK SILICON METHOD 53 3.6 SURFACE MICRROMACHINING 55 3.6.1 THIN FILM STRESS 56 3.6.2 STICKING 57 4. MECHANICS OF MEMBRANES AND BEAMS 59 4.1 DYNAMICS OF THE MASS SPRING SYSTEM 59 4.2 STRINGS 63 4.3 BEAMS 65 4.3.1 SIRCSS AND SLRAIN 65 4.3.2 BENDING ENERGY 66 4.3.3 RADIUS OF CURVALURE 67 4.3.4 LAGRANGE FUNCTION OF A FLEXIBLE BEAM 70 4.3.5 DIFFERENTIAL EQUATION FOR BEAMS 70 4.3.6 BOUNDARY CONDITIONS FOR BEAMS 72 4.3.7 EXAMPLES 73 4.3.8 MECHANICAL STABILITY 75 4.3.9 TRANSVERSAL VIBRATION OF BEAMS 77 4.4 DIAPHRAGMS AND MEMBRANES 80 4.4.1 CIRCULAR DIAPHRAGMS 80 4.4.2 SQUARE MEMBRANES -** 82 APPENDIX 4.1: BUECKLING OF BRIDGES 84 5. PRINCIPLES OF MCASURING MECHANICAL QUANTITICS: TRANSDUCTION OF DEFORMATION 85 5.1 MCTAL STRAIN GANGES 85 5.2 SCMICONDUCTOR STRAIN GANGES 86 5.2.1 PIEZORESISUEVE EFFECT IN SINGLE CRVSTALLINC SILICON 87 5.2.2 PIEZORESISTIVE EFFECT IN POLYSILICON THIN FILMS 88 5.2.3 TRANSDUCTION FROM DEFORMATION TO RESISTANCE 89 5.3 CAPACITIVE TRANSDUCERS W 5.3.1 ELECTROMECHANICS 90 5.3.2 DIAPHRAGM PRESSURE SENSORS 94 6. FORCE AND PRESSURE SENSORS 97 6.! FORCE SENSORS 98 6.1.1 LOADCELLS 101 6.2 PRESSURE SENSORS 06 6.2.1 PIEZORESISTIVE PRESSURE SENSORS 107 6.2.2 CAPACITIVE PRESSURE SENSORS 112 6.2.3 FORCE COMPENSATIO!! PRESSURE SENSORS 119 CONTENTS IX 6.2.4 RCSONANL PRESSURE SENSORS 121 6.2.5 MINIATURE MICROPHONES 126 6.2.6 TACTILE IMAGING ARRAYS 130 7. ACCELERATION AND ANGULAR RATE SENSORS 1 32 7.1 ACCELERATION SENSORS 133 7.1.1 TNTRODUCTION 133 7.1.2 BULK MICROMACHINED ACCELEROMETERS 134 7.1.3 SURFACE MICROMACHINED ACCELEROMETERS 138 7.1.4 FORCE FEEDBACK 143 7.2 ANGULAR RATE SENSORS 145 8. FLOW SENSORS 153 8.1 THE LAMINAR BOUNDARY LAYCR 153 8.1.1 THE NAVIER-STOKES EQUATIONS 153 8.1.2 HEAT TRANSPORT 157 8.1.3 HYDRODYNAMIC BOUNDARY LAYER 158 8.1.4 THERMAL BOUNDARY LAYER 163 8.1.5 SKIN FRICTION AND HEAT. TRANSFER 166 8.2 HEAT TRANSPORT, IN THE LIMIT OF VCRY SMALL REYNOLDS NUMBERS 168 8.3 THERMAL FLOW SENSORS 173 8.3.1 ANEMOMETER TYPE FLOW SENSORS 174 8.3.2 TWO-WIRE ANEMOMETERS 181 8.3.3 CALORIMELRIC TYPE FLOW SENSORS 183 8.3.4 SOUND INTENSITY SENSORS - THE MICROFLOWN 188 8.3.5 TIME OFFLIGHT SENSORS 194 8.4 SKIN FRICTION SENSORS 195 8.5 DRY FLUID FLOW SENSORS 200 8.6 WET FLUID FLOW SENSORS 205 9. RESONANT SENSORS 209 9.1 BASIC PRINCAEPLES AND PHYSICS 209 9.1.1 LNTRODUCTION 209 9.1.2 THE DIFFERENTIAL EQUATION OF A PRISMATIC MICROBRIDGE 211 9.1.3 SOLVING DIE HOMOGENEOUS, UNDAMPED PROBLEM USING LAPLACE TRANSFORMS 212 9.1.4 SOLVING THE INHOMOGENEOUS PROBLEM BY MODAL ANALVSIS.... 215 9.1.5 RESPONSE TO AXIAL LOADS 217 9.1.6 QUALITY FACTOR 219 9.1.7 NONLINEAR LARGC-AMPLILUDC EFFECTS 220 9.2 EXCITATION AND DETECLION MCCHANISMS 222 9.2.1 ETCCTROSLALIC EXCITATION AND CAPACITIVE DETECTION 223 9.2.2 MAGNETIC EXCITATION AND DETECTION 223 9.2.3 PIEZOELECTRIC EXCITATION AND DETECTION 223 9.2.4 ELCCTROLHCRMAL EXCITATION AND PIEZORESISTIVE DETECTION 224 9.2.5 OPTOTHERMAL EXCITATION AND OPTICAL DETECTION 224 X CONTENTS 9.2.6 DIELECTRIC EXCITATION AND DETECTION 225 9.3 EXAMPLES AND APPLICATIONS 225 10. ELECTRONIC INTERFACING 229 10.1 PIEZORESISLIVC SENSORS 230 10.1.1 WHEATSTONE BRIDGE CONFIGURATIONS 230 10.1.2 AMPLIFICATION OFTHE BRIDGE OUTPUT VOLTAGE 233 10.1.3 NOISE AND OFFSET. 235 10.1.4 FEEDBACK CONLROL LOOPS 236 10.1.5 LNTERFACING WITH DIGITAL SYSTEMS 237 10.1.5.1 ANALOG-LO-DIGITAL CONVERSION 237 10.1.5.2 VOLTAGE TO FREQUENCY CONVERTERS 240 10.2 CAPACIUEVE SENSORS 240 10.2.1 IMPEDANCE BRIDGES 241 10.2.2 CAPACITANCE CONTROLLCD OSCILLATORS 245 10.3 RESONANT SENSORS 248 10.3.1 FREQUENCY DCPENDENT BEHAVIOR OF RESONANT SENSORS 248 10.3.2 REAJIZING AN OSCILLATOR 249 10.3.3 ONE-PORT VERSUS TWO-PORT RESONATORS 251 10.3.4 OSCILLATOR BASED ON ONE-PORT ELECTROSLALICALLV DRIVEN BEAM RESONATOR 251 10.3.5 OSCILLATOR BASED ON TWO-PORT ELECIRODYNAMICALLY DRIVEN H-SHAPED RESONATOR 257 11. PACKAGING 259 11.1 PACKAGING TCCHNIQUES -60 11.1.1 STANDARD PACKAGES 260 11.1.2 CHIP MOUNTING METHODS 262 11.1.2 WAFCR LEVEL PACKAGING 263 11.1.3 INTERCONNEELION TECHNIQUES 265 I 1.1.4 MULTICHIP MODULES 267 11.1.5 ENCAPSULATION PROCESSUS 269 11.2 STRESS RCDUCTION 269 11.3 PRESSURE SENSORS 270 11.4 TNERTIAL SENSORS 272 11.5 THERMAL FLOW SENSORS 272 REFERENCES 274 INDEX 291
any_adam_object	1
author	Elwenspoek, Miko 1949- Wiegerink, Remco J. 1964-
author_GND	(DE-588)12212183X (DE-588)122121872
author_facet	Elwenspoek, Miko 1949- Wiegerink, Remco J. 1964-
author_role	aut aut
author_sort	Elwenspoek, Miko 1949-
author_variant	m e me r j w rj rjw
building	Verbundindex
bvnumber	BV013279216
callnumber-first	T - Technology
callnumber-label	TK7875
callnumber-raw	TK7875
callnumber-search	TK7875
callnumber-sort	TK 47875
callnumber-subject	TK - Electrical and Nuclear Engineering
classification_rvk	ZN 3700 ZN 4980
classification_tum	MAS 990f TEC 025f
ctrlnum	(OCoLC)56475511 (DE-599)BVBBV013279216
discipline	Technik Elektrotechnik / Elektronik / Nachrichtentechnik Maschinenbau
format	Book
fullrecord	<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01966nam a22005298c 4500</leader><controlfield tag="001">BV013279216</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20060912 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">000725s2001 gw ad\|\| \|\|\|\| 00\|\|\| eng d</controlfield><datafield tag="016" ind1="7" ind2=" "><subfield code="a">959238603</subfield><subfield code="2">DE-101</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">3540675825</subfield><subfield code="9">3-540-67582-5</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)56475511</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV013279216</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="044" ind1=" " ind2=" "><subfield code="a">gw</subfield><subfield code="c">DE</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-703</subfield><subfield code="a">DE-29T</subfield><subfield code="a">DE-91</subfield><subfield code="a">DE-91G</subfield><subfield code="a">DE-19</subfield><subfield code="a">DE-706</subfield><subfield code="a">DE-522</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TK7875</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 3700</subfield><subfield code="0">(DE-625)157333:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 4980</subfield><subfield code="0">(DE-625)157428:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">MAS 990f</subfield><subfield code="2">stub</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">TEC 025f</subfield><subfield code="2">stub</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Elwenspoek, Miko</subfield><subfield code="d">1949-</subfield><subfield code="e">Verfasser</subfield><subfield code="0">(DE-588)12212183X</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Mechanical microsensors</subfield><subfield code="c">M. Elwenspoek ; R. Wiegerink</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Berlin [u.a.]</subfield><subfield code="b">Springer</subfield><subfield code="c">2001</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">X, 295 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Microtechnology and mems</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Physics and astronomy online library</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Detectors</subfield><subfield code="x">Design and construction</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microelectromechanical systems</subfield><subfield code="x">Design and construction</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Micromachining</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Silicon</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Transducers</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Mikromechanik</subfield><subfield code="0">(DE-588)4205811-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Mikrosensor</subfield><subfield code="0">(DE-588)4561097-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Mikrosensor</subfield><subfield code="0">(DE-588)4561097-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">Mikrosensor</subfield><subfield code="0">(DE-588)4561097-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2="1"><subfield code="a">Mikromechanik</subfield><subfield code="0">(DE-588)4205811-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Wiegerink, Remco J.</subfield><subfield code="d">1964-</subfield><subfield code="e">Verfasser</subfield><subfield code="0">(DE-588)122121872</subfield><subfield code="4">aut</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">GBV Datenaustausch</subfield><subfield code="q">application/pdf</subfield><subfield code="u">http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009053823&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA</subfield><subfield code="3">Inhaltsverzeichnis</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-009053823</subfield></datafield></record></collection>
id	DE-604.BV013279216
illustrated	Illustrated
indexdate	2024-07-09T18:43:01Z
institution	BVB
isbn	3540675825
language	English
oai_aleph_id	oai:aleph.bib-bvb.de:BVB01-009053823
oclc_num	56475511
open_access_boolean
owner	DE-703 DE-29T DE-91 DE-BY-TUM DE-91G DE-BY-TUM DE-19 DE-BY-UBM DE-706 DE-522
owner_facet	DE-703 DE-29T DE-91 DE-BY-TUM DE-91G DE-BY-TUM DE-19 DE-BY-UBM DE-706 DE-522
physical	X, 295 S. Ill., graph. Darst.
publishDate	2001
publishDateSearch	2001
publishDateSort	2001
publisher	Springer
record_format	marc
series2	Microtechnology and mems Physics and astronomy online library
spelling	Elwenspoek, Miko 1949- Verfasser (DE-588)12212183X aut Mechanical microsensors M. Elwenspoek ; R. Wiegerink Berlin [u.a.] Springer 2001 X, 295 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Microtechnology and mems Physics and astronomy online library Detectors Design and construction Microelectromechanical systems Design and construction Micromachining Silicon Transducers Mikromechanik (DE-588)4205811-9 gnd rswk-swf Mikrosensor (DE-588)4561097-6 gnd rswk-swf Mikrosensor (DE-588)4561097-6 s DE-604 Mikromechanik (DE-588)4205811-9 s Wiegerink, Remco J. 1964- Verfasser (DE-588)122121872 aut GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009053823&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis
spellingShingle	Elwenspoek, Miko 1949- Wiegerink, Remco J. 1964- Mechanical microsensors Detectors Design and construction Microelectromechanical systems Design and construction Micromachining Silicon Transducers Mikromechanik (DE-588)4205811-9 gnd Mikrosensor (DE-588)4561097-6 gnd
subject_GND	(DE-588)4205811-9 (DE-588)4561097-6
title	Mechanical microsensors
title_auth	Mechanical microsensors
title_exact_search	Mechanical microsensors
title_full	Mechanical microsensors M. Elwenspoek ; R. Wiegerink
title_fullStr	Mechanical microsensors M. Elwenspoek ; R. Wiegerink
title_full_unstemmed	Mechanical microsensors M. Elwenspoek ; R. Wiegerink
title_short	Mechanical microsensors
title_sort	mechanical microsensors
topic	Detectors Design and construction Microelectromechanical systems Design and construction Micromachining Silicon Transducers Mikromechanik (DE-588)4205811-9 gnd Mikrosensor (DE-588)4561097-6 gnd
topic_facet	Detectors Design and construction Microelectromechanical systems Design and construction Micromachining Silicon Transducers Mikromechanik Mikrosensor
url	http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009053823&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA
work_keys_str_mv	AT elwenspoekmiko mechanicalmicrosensors AT wiegerinkremcoj mechanicalmicrosensors

Holdings

There is no print copy available.

Interlibrary loan Place Request Caution: Not in THWS collection! Indexes

MARC

Record in the Search Index

There is no print copy available.

Similar Items