Mechanical microsensors:
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Berlin [u.a.]
Springer
2001
|
| Schriftenreihe: | Microtechnology and mems
Physics and astronomy online library |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | X, 295 S. Ill., graph. Darst. |
| ISBN: | 3540675825 |
Internformat
MARC
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Datensatz im Suchindex
| _version_ | 1804128047071232000 |
|---|---|
| adam_text | M. ELWENSPOEK R. WIEGERINK MECHANICAL MICROSENSORS WITH 235 FIGURES
CONTENTS 1. INTRODUCTIOII I 2. MEMS 5 2.1 MINIATURISATION AND SYSTEMS 5
2.2 EXAMPLES FOR MEMS N 2.2.1 BUBBLEJET !!! 7 2.2.2 ACLUATORS 9
2.2.3 MICROPUMPS (0 2.3 SMALL AND LARGE: SCALING [3 2.3.1
ELECTROMAGNETIC FORCES 13 2.3.2 COULOMB FRICTION 16 2.3.3 MECHANICAL
STRENGT!] ]6 2.3.4 DYNAMIC PROPERTIES (7 2.4 AVAILABLE FABRICATION
TECHNOLOGY 20 2.4.1 TECHNOLOGIES BASED 011 LITHOGRAPHY 20 2.4.1.1
SILICON MICRONIACHINING 21 2.4.1.2 LIGA . . . .* 22 2.4.2
MINIATURISATION OF CONVENTIONAL TECHNOLOGIES 23 3. INTRODUCTIOII INTO
SILICON IVLICROMACHINING 24 3.1 PHOTOLITHOGRAPHY 24 3.2 THIN FILM
DEPOSITION AND DOPING 25 3.2.1 SILICON DIOXIDE 26 3.2.2 CHEMICAL VAPOUR
DEPOSITION 27 3.2.3 EVAPORATION 29 3.2.4 SPUTTCRDEPO.SILION 3] 3.2.5
DOPING 3] 3.3 WET CHEMICAL ETCHING 32 3.3.1 ISOTROPIE ETCHING 32 3.3.2
ANISOTROPIE ETCHING 34 3.3.3 ETCHSTOP ZZZZ 36 3.4 WAFERBONDING 40 3.4.1
ANODIC BONDING 41 3.4.2 SILICON FUSION BONDING 43 VIII CONTENTS 3.5
PLASMA ETCHING 45 3.5.1 PLASMA 45 3.5.2 ANISOTROPIE PLASMA ETCHING MODES
47 3.5.3 CONFIGURATIONS 48 3.5.4 BLACK SILICON METHOD 53 3.6 SURFACE
MICRROMACHINING 55 3.6.1 THIN FILM STRESS 56 3.6.2 STICKING 57 4.
MECHANICS OF MEMBRANES AND BEAMS 59 4.1 DYNAMICS OF THE MASS SPRING
SYSTEM 59 4.2 STRINGS 63 4.3 BEAMS 65 4.3.1 SIRCSS AND SLRAIN 65 4.3.2
BENDING ENERGY 66 4.3.3 RADIUS OF CURVALURE 67 4.3.4 LAGRANGE FUNCTION
OF A FLEXIBLE BEAM 70 4.3.5 DIFFERENTIAL EQUATION FOR BEAMS 70 4.3.6
BOUNDARY CONDITIONS FOR BEAMS 72 4.3.7 EXAMPLES 73 4.3.8 MECHANICAL
STABILITY 75 4.3.9 TRANSVERSAL VIBRATION OF BEAMS 77 4.4 DIAPHRAGMS AND
MEMBRANES 80 4.4.1 CIRCULAR DIAPHRAGMS 80 4.4.2 SQUARE MEMBRANES *-***
82 APPENDIX 4.1: BUECKLING OF BRIDGES 84 5. PRINCIPLES OF MCASURING
MECHANICAL QUANTITICS: TRANSDUCTION OF DEFORMATION 85 5.1 MCTAL STRAIN
GANGES 85 5.2 SCMICONDUCTOR STRAIN GANGES 86 5.2.1 PIEZORESISUEVE EFFECT
IN SINGLE CRVSTALLINC SILICON 87 5.2.2 PIEZORESISTIVE EFFECT IN
POLYSILICON THIN FILMS 88 5.2.3 TRANSDUCTION FROM DEFORMATION TO
RESISTANCE 89 5.3 CAPACITIVE TRANSDUCERS W 5.3.1 ELECTROMECHANICS 90
5.3.2 DIAPHRAGM PRESSURE SENSORS 94 6. FORCE AND PRESSURE SENSORS 97 6.!
FORCE SENSORS 98 6.1.1 LOADCELLS 101 6.2 PRESSURE SENSORS 06 6.2.1
PIEZORESISTIVE PRESSURE SENSORS 107 6.2.2 CAPACITIVE PRESSURE SENSORS
112 6.2.3 FORCE COMPENSATIO!! PRESSURE SENSORS 119 CONTENTS IX 6.2.4
RCSONANL PRESSURE SENSORS 121 6.2.5 MINIATURE MICROPHONES 126 6.2.6
TACTILE IMAGING ARRAYS 130 7. ACCELERATION AND ANGULAR RATE SENSORS 1 32
7.1 ACCELERATION SENSORS 133 7.1.1 TNTRODUCTION 133 7.1.2 BULK
MICROMACHINED ACCELEROMETERS 134 7.1.3 SURFACE MICROMACHINED
ACCELEROMETERS 138 7.1.4 FORCE FEEDBACK 143 7.2 ANGULAR RATE SENSORS 145
8. FLOW SENSORS 153 8.1 THE LAMINAR BOUNDARY LAYCR 153 8.1.1 THE
NAVIER-STOKES EQUATIONS 153 8.1.2 HEAT TRANSPORT 157 8.1.3 HYDRODYNAMIC
BOUNDARY LAYER 158 8.1.4 THERMAL BOUNDARY LAYER 163 8.1.5 SKIN FRICTION
AND HEAT. TRANSFER 166 8.2 HEAT TRANSPORT, IN THE LIMIT OF VCRY SMALL
REYNOLDS NUMBERS 168 8.3 THERMAL FLOW SENSORS 173 8.3.1 ANEMOMETER TYPE
FLOW SENSORS 174 8.3.2 TWO-WIRE ANEMOMETERS 181 8.3.3 CALORIMELRIC TYPE
FLOW SENSORS 183 8.3.4 SOUND INTENSITY SENSORS - THE MICROFLOWN 188
8.3.5 TIME OFFLIGHT SENSORS 194 8.4 SKIN FRICTION SENSORS 195 8.5 DRY
FLUID FLOW SENSORS 200 8.6 WET FLUID FLOW SENSORS 205 9. RESONANT
SENSORS 209 9.1 BASIC PRINCAEPLES AND PHYSICS 209 9.1.1 LNTRODUCTION 209
9.1.2 THE DIFFERENTIAL EQUATION OF A PRISMATIC MICROBRIDGE 211 9.1.3
SOLVING DIE HOMOGENEOUS, UNDAMPED PROBLEM USING LAPLACE TRANSFORMS 212
9.1.4 SOLVING THE INHOMOGENEOUS PROBLEM BY MODAL ANALVSIS.... 215 9.1.5
RESPONSE TO AXIAL LOADS 217 9.1.6 QUALITY FACTOR 219 9.1.7 NONLINEAR
LARGC-AMPLILUDC EFFECTS 220 9.2 EXCITATION AND DETECLION MCCHANISMS 222
9.2.1 ETCCTROSLALIC EXCITATION AND CAPACITIVE DETECTION 223 9.2.2
MAGNETIC EXCITATION AND DETECTION 223 9.2.3 PIEZOELECTRIC EXCITATION AND
DETECTION 223 9.2.4 ELCCTROLHCRMAL EXCITATION AND PIEZORESISTIVE
DETECTION 224 9.2.5 OPTOTHERMAL EXCITATION AND OPTICAL DETECTION 224 X
CONTENTS 9.2.6 DIELECTRIC EXCITATION AND DETECTION 225 9.3 EXAMPLES AND
APPLICATIONS 225 10. ELECTRONIC INTERFACING 229 10.1 PIEZORESISLIVC
SENSORS 230 10.1.1 WHEATSTONE BRIDGE CONFIGURATIONS 230 10.1.2
AMPLIFICATION OFTHE BRIDGE OUTPUT VOLTAGE 233 10.1.3 NOISE AND OFFSET.
235 10.1.4 FEEDBACK CONLROL LOOPS 236 10.1.5 LNTERFACING WITH DIGITAL
SYSTEMS 237 10.1.5.1 ANALOG-LO-DIGITAL CONVERSION 237 10.1.5.2 VOLTAGE
TO FREQUENCY CONVERTERS 240 10.2 CAPACIUEVE SENSORS 240 10.2.1 IMPEDANCE
BRIDGES 241 10.2.2 CAPACITANCE CONTROLLCD OSCILLATORS 245 10.3 RESONANT
SENSORS 248 10.3.1 FREQUENCY DCPENDENT BEHAVIOR OF RESONANT SENSORS 248
10.3.2 REAJIZING AN OSCILLATOR 249 10.3.3 ONE-PORT VERSUS TWO-PORT
RESONATORS 251 10.3.4 OSCILLATOR BASED ON ONE-PORT ELECTROSLALICALLV
DRIVEN BEAM RESONATOR 251 10.3.5 OSCILLATOR BASED ON TWO-PORT
ELECIRODYNAMICALLY DRIVEN H-SHAPED RESONATOR 257 11. PACKAGING 259 11.1
PACKAGING TCCHNIQUES -60 11.1.1 STANDARD PACKAGES 260 11.1.2 CHIP
MOUNTING METHODS 262 11.1.2 WAFCR LEVEL PACKAGING 263 11.1.3
INTERCONNEELION TECHNIQUES 265 I 1.1.4 MULTICHIP MODULES 267 11.1.5
ENCAPSULATION PROCESSUS 269 11.2 STRESS RCDUCTION 269 11.3 PRESSURE
SENSORS 270 11.4 TNERTIAL SENSORS 272 11.5 THERMAL FLOW SENSORS 272
REFERENCES 274 INDEX 291
|
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| author | Elwenspoek, Miko 1949- Wiegerink, Remco J. 1964- |
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| discipline | Technik Elektrotechnik / Elektronik / Nachrichtentechnik Maschinenbau |
| format | Book |
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| indexdate | 2024-07-09T18:43:01Z |
| institution | BVB |
| isbn | 3540675825 |
| language | English |
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| series2 | Microtechnology and mems Physics and astronomy online library |
| spelling | Elwenspoek, Miko 1949- Verfasser (DE-588)12212183X aut Mechanical microsensors M. Elwenspoek ; R. Wiegerink Berlin [u.a.] Springer 2001 X, 295 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Microtechnology and mems Physics and astronomy online library Detectors Design and construction Microelectromechanical systems Design and construction Micromachining Silicon Transducers Mikromechanik (DE-588)4205811-9 gnd rswk-swf Mikrosensor (DE-588)4561097-6 gnd rswk-swf Mikrosensor (DE-588)4561097-6 s DE-604 Mikromechanik (DE-588)4205811-9 s Wiegerink, Remco J. 1964- Verfasser (DE-588)122121872 aut GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009053823&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Elwenspoek, Miko 1949- Wiegerink, Remco J. 1964- Mechanical microsensors Detectors Design and construction Microelectromechanical systems Design and construction Micromachining Silicon Transducers Mikromechanik (DE-588)4205811-9 gnd Mikrosensor (DE-588)4561097-6 gnd |
| subject_GND | (DE-588)4205811-9 (DE-588)4561097-6 |
| title | Mechanical microsensors |
| title_auth | Mechanical microsensors |
| title_exact_search | Mechanical microsensors |
| title_full | Mechanical microsensors M. Elwenspoek ; R. Wiegerink |
| title_fullStr | Mechanical microsensors M. Elwenspoek ; R. Wiegerink |
| title_full_unstemmed | Mechanical microsensors M. Elwenspoek ; R. Wiegerink |
| title_short | Mechanical microsensors |
| title_sort | mechanical microsensors |
| topic | Detectors Design and construction Microelectromechanical systems Design and construction Micromachining Silicon Transducers Mikromechanik (DE-588)4205811-9 gnd Mikrosensor (DE-588)4561097-6 gnd |
| topic_facet | Detectors Design and construction Microelectromechanical systems Design and construction Micromachining Silicon Transducers Mikromechanik Mikrosensor |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009053823&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
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