17th Annual Symposium on Photomask Technology and Management: 17 - 19 September 1997 Redwood City, California
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
Bellingham, Wash.
SPIE
1998
|
| Schriftenreihe: | Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE
3236 |
| Schlagworte: | |
| Beschreibung: | IX, 554 S. Ill., graph. Darst. |
| ISBN: | 0819426695 |
Internformat
MARC
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| 300 | |a IX, 554 S. |b Ill., graph. Darst. | ||
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Datensatz im Suchindex
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| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
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| dewey-search | 621.3815/31 |
| dewey-sort | 3621.3815 231 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Conference Proceeding Book |
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| genre_facet | Konferenzschrift 1997 Redwood City Calif. |
| id | DE-604.BV013241339 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:42:18Z |
| institution | BVB |
| institution_GND | (DE-588)5291553-0 |
| isbn | 0819426695 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009023856 |
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| physical | IX, 554 S. Ill., graph. Darst. |
| publishDate | 1998 |
| publishDateSearch | 1998 |
| publishDateSort | 1998 |
| publisher | SPIE |
| record_format | marc |
| series | Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE |
| series2 | Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE |
| spelling | Symposium on Photomask Technology and Management 17 1997 Redwood City, Calif. Verfasser (DE-588)5291553-0 aut 17th Annual Symposium on Photomask Technology and Management 17 - 19 September 1997 Redwood City, California James A. Reynolds ... chairs Seventeenth Annual Symposium on Photomask Technology and Managemeent Bellingham, Wash. SPIE 1998 IX, 554 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE 3236 Maskentechnik (DE-588)4125845-9 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1997 Redwood City Calif. gnd-content Maskentechnik (DE-588)4125845-9 s DE-604 Reynolds, James A. Sonstige oth Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE 3236 (DE-604)BV000010887 3236 |
| spellingShingle | 17th Annual Symposium on Photomask Technology and Management 17 - 19 September 1997 Redwood City, California Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE Maskentechnik (DE-588)4125845-9 gnd |
| subject_GND | (DE-588)4125845-9 (DE-588)1071861417 |
| title | 17th Annual Symposium on Photomask Technology and Management 17 - 19 September 1997 Redwood City, California |
| title_alt | Seventeenth Annual Symposium on Photomask Technology and Managemeent |
| title_auth | 17th Annual Symposium on Photomask Technology and Management 17 - 19 September 1997 Redwood City, California |
| title_exact_search | 17th Annual Symposium on Photomask Technology and Management 17 - 19 September 1997 Redwood City, California |
| title_full | 17th Annual Symposium on Photomask Technology and Management 17 - 19 September 1997 Redwood City, California James A. Reynolds ... chairs |
| title_fullStr | 17th Annual Symposium on Photomask Technology and Management 17 - 19 September 1997 Redwood City, California James A. Reynolds ... chairs |
| title_full_unstemmed | 17th Annual Symposium on Photomask Technology and Management 17 - 19 September 1997 Redwood City, California James A. Reynolds ... chairs |
| title_short | 17th Annual Symposium on Photomask Technology and Management |
| title_sort | 17th annual symposium on photomask technology and management 17 19 september 1997 redwood city california |
| title_sub | 17 - 19 September 1997 Redwood City, California |
| topic | Maskentechnik (DE-588)4125845-9 gnd |
| topic_facet | Maskentechnik Konferenzschrift 1997 Redwood City Calif. |
| volume_link | (DE-604)BV000010887 |
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