Digest of papers: July 17 - 20, 1995, Sendai, Japan
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
Tokyo
Japan Soc. of Applied Physics [u.a.]
1995
|
| Schlagworte: | |
| Beschreibung: | XVIII, 292 S. Ill., graph. Darst. |
Internformat
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Datensatz im Suchindex
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| id | DE-604.BV013228713 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:42:06Z |
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| physical | XVIII, 292 S. Ill., graph. Darst. |
| publishDate | 1995 |
| publishDateSearch | 1995 |
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| publisher | Japan Soc. of Applied Physics [u.a.] |
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| spelling | MicroProcess Conference 8 1995 Sendai Verfasser (DE-588)1901147-7 aut Digest of papers July 17 - 20, 1995, Sendai, Japan MicroProcess '95, the 8th International MicroProcess Conference MicroProcess '95 Tokyo Japan Soc. of Applied Physics [u.a.] 1995 XVIII, 292 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1995 Sendai gnd-content Lithografie Halbleitertechnologie (DE-588)4191584-7 s DE-604 |
| spellingShingle | Digest of papers July 17 - 20, 1995, Sendai, Japan Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| subject_GND | (DE-588)4191584-7 (DE-588)1071861417 |
| title | Digest of papers July 17 - 20, 1995, Sendai, Japan |
| title_alt | MicroProcess '95 |
| title_auth | Digest of papers July 17 - 20, 1995, Sendai, Japan |
| title_exact_search | Digest of papers July 17 - 20, 1995, Sendai, Japan |
| title_full | Digest of papers July 17 - 20, 1995, Sendai, Japan MicroProcess '95, the 8th International MicroProcess Conference |
| title_fullStr | Digest of papers July 17 - 20, 1995, Sendai, Japan MicroProcess '95, the 8th International MicroProcess Conference |
| title_full_unstemmed | Digest of papers July 17 - 20, 1995, Sendai, Japan MicroProcess '95, the 8th International MicroProcess Conference |
| title_short | Digest of papers |
| title_sort | digest of papers july 17 20 1995 sendai japan |
| title_sub | July 17 - 20, 1995, Sendai, Japan |
| topic | Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| topic_facet | Lithografie Halbleitertechnologie Konferenzschrift 1995 Sendai |
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