Digest of papers 1990: July 16 - 19, 1990, Chiba, Japan
Gespeichert in:
Körperschaft: | |
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Format: | Tagungsbericht Buch |
Sprache: | Undetermined |
Veröffentlicht: |
Tokyo
Japan Soc. of Applied Physics [u.a.]
1990
|
Schlagworte: | |
Beschreibung: | XVII, 191 S. Ill., graph. Darst. |
ISBN: | 4930813409 |
Internformat
MARC
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264 | 1 | |a Tokyo |b Japan Soc. of Applied Physics [u.a.] |c 1990 | |
300 | |a XVII, 191 S. |b Ill., graph. Darst. | ||
336 | |b txt |2 rdacontent | ||
337 | |b n |2 rdamedia | ||
338 | |b nc |2 rdacarrier | ||
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Datensatz im Suchindex
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any_adam_object | |
author_corporate | MicroProcess Conference Chiba |
author_corporate_role | aut |
author_facet | MicroProcess Conference Chiba |
author_sort | MicroProcess Conference Chiba |
building | Verbundindex |
bvnumber | BV013228682 |
classification_rvk | ZN 4100 |
ctrlnum | (OCoLC)634944508 (DE-599)BVBBV013228682 |
discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
format | Conference Proceeding Book |
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genre | (DE-588)1071861417 Konferenzschrift 1990 Chiba gnd-content |
genre_facet | Konferenzschrift 1990 Chiba |
id | DE-604.BV013228682 |
illustrated | Illustrated |
indexdate | 2024-07-09T18:42:06Z |
institution | BVB |
institution_GND | (DE-588)1801116-0 |
isbn | 4930813409 |
language | Undetermined |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009015635 |
oclc_num | 634944508 |
open_access_boolean | |
owner | DE-703 |
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physical | XVII, 191 S. Ill., graph. Darst. |
publishDate | 1990 |
publishDateSearch | 1990 |
publishDateSort | 1990 |
publisher | Japan Soc. of Applied Physics [u.a.] |
record_format | marc |
spelling | MicroProcess Conference 3 1990 Chiba Verfasser (DE-588)1801116-0 aut Digest of papers 1990 July 16 - 19, 1990, Chiba, Japan 3rd MicroProcess Conference Tokyo Japan Soc. of Applied Physics [u.a.] 1990 XVII, 191 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1990 Chiba gnd-content Lithografie Halbleitertechnologie (DE-588)4191584-7 s DE-604 |
spellingShingle | Digest of papers 1990 July 16 - 19, 1990, Chiba, Japan Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
subject_GND | (DE-588)4191584-7 (DE-588)1071861417 |
title | Digest of papers 1990 July 16 - 19, 1990, Chiba, Japan |
title_auth | Digest of papers 1990 July 16 - 19, 1990, Chiba, Japan |
title_exact_search | Digest of papers 1990 July 16 - 19, 1990, Chiba, Japan |
title_full | Digest of papers 1990 July 16 - 19, 1990, Chiba, Japan 3rd MicroProcess Conference |
title_fullStr | Digest of papers 1990 July 16 - 19, 1990, Chiba, Japan 3rd MicroProcess Conference |
title_full_unstemmed | Digest of papers 1990 July 16 - 19, 1990, Chiba, Japan 3rd MicroProcess Conference |
title_short | Digest of papers 1990 |
title_sort | digest of papers 1990 july 16 19 1990 chiba japan |
title_sub | July 16 - 19, 1990, Chiba, Japan |
topic | Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
topic_facet | Lithografie Halbleitertechnologie Konferenzschrift 1990 Chiba |
work_keys_str_mv | AT microprocessconferencechiba digestofpapers1990july16191990chibajapan |